Selective Chemical Vapor Deposition

  • J. Holleman (Speaker)

    Activity: Talk or presentation › Oral presentation

    Description

    Plaats van uitgifte: Lithuania
    Period3 Sept 2001
    Event titleNATO Advanced Study Institute on Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies 2001
    Event typeConference
    LocationKaunas, LithuaniaShow on map
    Degree of RecognitionInternational

    Keywords

    • METIS-200816