Silicon-based µ-Structures for Fluidic Handling

    Activity: Talk or presentation › Oral presentation

    Description

    Opmerking: Invited
    Period21 Jan 1999
    Event title12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999
    Event typeConference
    Conference number12
    LocationOrlando, United States, FloridaShow on map
    Degree of RecognitionInternational

    Keywords

    • METIS-116340