Silicon Oxynitride: a versatile material for integrated optics application

Kerstin Worhoff (Invited speaker), L.T.H. Hilderink (Invited speaker), A. Driessen (Invited speaker), Paul Lambeck (Invited speaker)

    Activity: Talk or presentationOral presentation

    Description

    Opmerking: Invited
    Period29 Mar 2001
    Held atThe Electrochemical Society, United States
    Degree of RecognitionInternational

    Keywords

    • METIS-116572