Single-step etch mask for 3D monolithic nanostructures

Grishina, D. (Speaker), Harteveld, C. A. M. (Contributor), L.A. Woldering (Speaker), Vos, W. L. (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: San Francisco, USA
Period13 Feb 2016
Held atSPIE Photonics West 2016
Event typeConference
LocationSan Fransisco, United States, California

Keywords

  • METIS-317758