Status of multilayer reflective optics

Louis, E. (Speaker), H. Enkisch (Contributor), van de Kruijs, R. W. E. (Contributor), Yakshin, A. (Contributor), Sturm, J. M. (Contributor), Makhotkin, I. A. (Contributor), Christopher James Lee (Contributor), Stephan Müllender (Contributor), Bijkerk, F. (Contributor)

Activity: Talk or presentationOral presentation

Period28 Feb 2017
Event titleSPIE Advanced Lithography 2017: null
Event typeConference
LocationSan Jose, United States, California
Degree of RecognitionInternational