Status of multilayer reflective optics

Louis, E. (Speaker), H. Enkisch (Contributor), van de Kruijs, R. W. E. (Contributor), Yakshin, A. (Contributor), Sturm, J. M. (Contributor), Makhotkin, I. A. (Contributor), Lee, C. J. (Contributor), Stephan Müllender (Contributor), Bijkerk, F. (Contributor)

Activity: Talk or presentationOral presentation

Period28 Feb 2017
Held atSPIE Advanced Lithography 2017
Event typeConference
LocationSan Jose, United States, California
Degree of RecognitionInternational