STM lithography on silicon

  • N. Kramer (Speaker)
  • M.L. van den Berg (Speaker)
  • H. Birk (Speaker)
  • M. Niesten (Speaker)
  • C. Schönenberger (Speaker)

Activity: Talk or presentationOral presentation

Period25 Sept 1995
Event titleIVS/ICSS 1995
Event typeConference
LocationYokohama, JapanShow on map
Degree of RecognitionInternational