Stress development of thin films monitored in-situ by cantilever laser deflection and low energy ion scattering

van de Kruijs, R. W. E. (Speaker), Johan Reinink (Contributor), Bijkerk, F. (Contributor)

Activity: Talk or presentationOral presentation

Period11 Dec 2018
Held atInternational MicroNanoConference, IMNC 2018
Event typeConference
LocationAmsterdam, Netherlands
Degree of RecognitionInternational