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Surface roughening and wet chemical etching of silicon
Michael Curt Elwenspoek (Keynote speaker)
Activity
:
Talk or presentation
›
Oral presentation
Description
Opmerking: Key-note speaker Plaats van uitgifte: Enschede
Period
9 Jan 1997
Event title
Voordracht, Microsystems Technology in Practice Symposium
Event type
Conference
Location
Enschede
Keywords
METIS-116428