Surface roughening and wet chemical etching of silicon

Michael Curt Elwenspoek (Keynote speaker)

    Activity: Talk or presentationOral presentation

    Description

    Opmerking: Key-note speaker Plaats van uitgifte: Enschede
    Period9 Jan 1997
    Event titleVoordracht, Microsystems Technology in Practice Symposium
    Event typeConference
    LocationEnschede

    Keywords

    • METIS-116428