Surface roughness improvements of Tungsten LPCVD

A. Hasper (Speaker), J. Holleman (Speaker), J. Middelhoek (Speaker)

    Activity: Talk or presentationOral presentation

    Period22 Oct 1990
    Held at7th Workshop on Tungsten and Other Advanced Metals for ULSI Applications 1990
    Event typeWorkshop
    Conference number7
    LocationDallas, United States, Texas
    Degree of RecognitionInternational

    Keywords

    • METIS-117185