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Surface roughness improvements of Tungsten LPCVD
A. Hasper (Speaker), J. Holleman (Speaker), J. Middelhoek (Speaker)
Activity
:
Talk or presentation
›
Oral presentation
Period
22 Oct 1990
Event title
7th Workshop on Tungsten and Other Advanced Metals for ULSI Applications 1990
Event type
Workshop
Conference number
7
Location
Dallas, United States, Texas
Degree of Recognition
International
Keywords
METIS-117185