Surface roughness improvements of Tungsten LPCVD

A. Hasper (Speaker), J. Holleman (Speaker), J. Middelhoek (Speaker)

    Activity: Talk or presentation › Oral presentation

    Period22 Oct 1990
    Held at7th Workshop on Tungsten and Other Advanced Metals for ULSI Applications 1990
    Event typeWorkshop
    Conference number7
    LocationDallas, United States, Texas
    Degree of RecognitionInternational

    Keywords

    • METIS-117185