Tailoring the spectral properties of extreme UV multilayer optics

V.V. Medvedev (Speaker), Yakshin, A. (Contributor), Bijkerk, F. (Contributor)

Activity: Talk or presentationOral presentation

Description

The ongoing intensive exploration of soft x-ray and extreme ultraviolet spectral ranges is governed by the interest of fundamental science and by a myriad of potential applications. The most prominent are “water-window” microscopy of biological objects, generation of high harmonics of laser radiation, photoelectron spectroscopy and photolithography. High opacity of materials for the corresponding radiation bands prohibits the construction of conventional lens optics. Furthermore, this radiation is not significantly reflected by standard mirrors. Multilayer interference coatings, exploiting the principle of Bragg reflection, made the desired high-throughput optical components available for the above mentioned applications. Essential is the ability to simultaneously provide a high reflection for desired band, while reducing the reflection for undesired wavelength bands. This talk reviews a contribution to the improvement of functional performance of the short-wavelength multilayer optics, studies of its thermal properties and search for new materials.
Period17 Jan 2017
Held atPhysics@Veldhoven 2017
Event typeConference
LocationVeldhoven, Netherlands
Degree of RecognitionInternational