Tertiary etching of W/Si multilayer mirrors for the fabrication of lamellar multilayer gratings

Activity: Talk or presentationOral presentation

Period17 Sep 2012
Event titleMicro and NanoEngineering 2012: Tertiary Etching of W/Si multilayer mirrors for the fabrication of lamellar multilayer gratings
Event typeConference
LocationToulouse, FranceShow on map
Degree of RecognitionInternational