Tertiary etching of W/Si multilayer mirrors for the fabrication of lamellar multilayer gratings

R. van der Meer (Speaker), B. Krishnan (Speaker), I.V. Kozhevnikov (Speaker), M.J. de Boer (Speaker), B. Vratzov (Speaker), Bastiaens, H. M. J. (Speaker), Huskens, J. (Speaker), van der Wiel, W. G. (Speaker), P.E. Hegeman (Speaker), Boller, K. (Speaker), Bijkerk, F. (Speaker)

Activity: Talk or presentationOral presentation

Period17 Sep 2012
Event titleMicro and NanoEngineering 2012: Tertiary Etching of W/Si multilayer mirrors for the fabrication of lamellar multilayer gratings
Event typeConference
LocationToulouse, France
Degree of RecognitionInternational