Tertiary etching of W/Si multilayer mirrors for the fabrication of lamellar multilayer gratings
- R. van der Meer (Speaker)
- B. Krishnan (Speaker)
- I.V. Kozhevnikov (Speaker)
- M.J. de Boer (Speaker)
- B. Vratzov (Speaker)
- H.M.J. Bastiaens (Speaker)
- Huskens, J. (Speaker)
- van der Wiel, W. G. (Speaker)
- P.E. Hegeman (Speaker)
- Boller, K. (Speaker)
- Bijkerk, F. (Speaker)
Activity: Talk or presentation › Oral presentation