The black silicon method IV: the fabrication of three dimensional structures in silicon with high aspect ratio for scanning probe microscopy and other applications

Henricus V. Jansen (Keynote speaker), Meint J. de Boer (Keynote speaker), A.M. Otter (Keynote speaker), Michael Curt Elwenspoek (Keynote speaker)

    Activity: Talk or presentationInvited talk

    Period29 Jan 1995
    Event titleIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995
    Event typeWorkshop
    LocationAmsterdam, Netherlands