The black silicon method IV: the fabrication of three dimensional structures in silicon with high aspect ratio for scanning probe microscopy and other applications

  • Henricus V. Jansen (Keynote speaker)
  • Meint J. de Boer (Keynote speaker)
  • A.M. Otter (Keynote speaker)
  • Michael Curt Elwenspoek (Keynote speaker)

    Activity: Talk or presentation › Invited talk

    Period29 Jan 1995
    Event titleIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995
    Event typeWorkshop
    LocationAmsterdam, NetherlandsShow on map