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Thermal Scanning Probe Lithography; A Highly Localized Spatially Controlled Approach for Sub 50 nm Thermal Chemical Lithography
Duvigneau, J.
(Speaker), Holger Schönherr (Speaker),
Vancso, G. J.
(Speaker)
Materials Science and Technology of Polymers
Activity
:
Talk or presentation
›
Oral presentation
Description
Plaats van uitgifte: Veldhoven, The Netherlands
Period
15 Feb 2010
Event title
Dutch Polymer Days, DPD 2010
Event type
Conference
Location
Veldhoven, Netherlands
Keywords
METIS-272716