Thermalbase-drive for micromechanical resonators employing deep-diffusion bases

S. Bouwstra (Speaker), J.A. van Rooijen (Speaker), H.A.C. Tilmans (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: San Sebastian, Spain
    Period5 Oct 1992
    Event titleEurosensors VI
    Event typeConference
    Conference number6
    LocationSan Sebastian, Spain

    Keywords

    • METIS-117940