Thin films and nano-gratings study using X-ray standing waves excited by an in-lab X-ray source

  • Ksenia Matveevskii (Contributor)
  • Konstantin Nikolaev (Contributor)
  • S.N. Yakunin (Contributor)
  • Roberto Fallica (Contributor)
  • Ackermann, M. D. (Contributor)
  • Makhotkin, I. A. (Speaker)

Activity: Talk or presentationInvited talk

Description

Nanofabrication technology is rapidly progressing in two directions. First, more complex 3D architecture, and second, structure sizes reduced down to sub-nm scale. The International Roadmap for Devices and Systems from 2020 assumes that implementing of a hybrid metrology will address the metrology challenge for such structure. The extended X-ray scatterometry (XS) is considered a part of this hybrid metrology.
We focus our study on two scattering techniques: X-ray scattering (XS) and angular resolved grazing-incidence X-ray fluorescence (GIXRF). XS is based on the analysis of the far-field of X-rays scattered on the periodic structure. The GIXRF is based on the secondary scattering modulated by the near-field in a form of the 2D/3D X-ray standing wave (XSW). The XS signal depends on the geometrical configuration of the structure such as grating period, height and shapes. The buried structures are then detected by fluorescence analysis, making the scheme element-specific and showing the material and its in-depth position inside the structure.
The results of the first measurements will be discussed in the presentation as well as the initial step of GIXRF map analysis using the recently published semi-analytical approach, capable of relatively fast simulation of these complex XRF maps.
Period4 Apr 20235 Apr 2023
Event titleNWO Physics 2023
Event typeConference
LocationVeldhoven, NetherlandsShow on map
Degree of RecognitionNational