Towards position control of electrostatic comb drives

R. Legtenberg (Speaker), Berenschot, J. W. (Speaker), Michael Curt Elwenspoek (Speaker), J.H.J. Fluitman (Speaker)

    Activity: Talk or presentationOral presentation

    Period13 Oct 1995
    Event title6th Micromechanics Europe Workshop, MME 1995
    Event typeConference
    Conference number6
    LocationCopenhagen, Denmark