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Tuning the piezoelectric properties of PZT thin films on Si-MEMS by control of the crystallographic orientation

Activity: Talk or presentation › Oral presentation

Description

Plaats van uitgifte: Delhi, India
Period14 Dec 2009
Event titleInternational Conference on Electroceramics 2009
Event typeConference
LocationDelhi, IndiaShow on map

Keywords

  • METIS-260724