Uniform deposition with PECVD of SiON layers for integrated optics applications

H. Albers (Keynote speaker)

    Activity: Talk or presentation › Oral presentation

    Description

    Opmerking: Key-note speaker Plaats van uitgifte: Munchen
    Period19 Jan 1995
    Event titleVoordracht, Siemens
    Event typeConference
    LocationMunchen

    Keywords

    • METIS-116018