Unraveling extreme ultraviolet (EUV) light source spectra

Bayraktar, M. (Speaker), Caspar Bruineman (Contributor), Boris Vratzov (Contributor), Bastiaens, H. M. J. (Contributor), Bijkerk, F. (Contributor)

Activity: Talk or presentationOral presentation

Period24 Sep 2018
Held atMESA+ meeting 2018
Event typeConference
LocationEnschede, Netherlands
Degree of RecognitionLocal