Vacuum sealed polysilicum resonating microbridge in medical sensors

  • H.A.C. Tilmans (Speaker)
  • Legtenberg, R. (Speaker)
  • D.J. IJntema (Speaker)
  • Michael Curt Elwenspoek (Speaker)
  • J.H.J. Fluitman (Speaker)

    Activity: Talk or presentation › Oral presentation

    Period17 Nov 1992
    Event titleFOM Werkgemeenschap Halfgeleiders 1992
    Event typeConference
    LocationVeldhoven, NetherlandsShow on map
    Degree of RecognitionInternational