Vacuum sealed polysilicum resonating microbridge in medical sensors

H.A.C. Tilmans (Speaker), R. Legtenberg (Speaker), D.J. IJntema (Speaker), Michael Curt Elwenspoek (Speaker), J.H.J. Fluitman (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Veldhoven
    Period17 Nov 1992
    Event titleVoordracht Veldhoven
    Event typeConference
    LocationVeldhoven

    Keywords

    • METIS-117935