Vapour growth of silicon: growth anisotropy and adsorption

Gardeniers, J. G. E. (Speaker), L.J. Giling (Speaker)

    Activity: Talk or presentation › Oral presentation

    Description

    Plaats van uitgifte: Nagoya, Japan
    Period14 Jul 1991
    Event titleICVGE-7
    Event typeConference
    LocationNagoya, Japan

    Keywords

    • METIS-117921