W-CMP for sub-micron inverse metallisation

H. van Kranenburg (Keynote speaker), van Corbach, H. D. (Keynote speaker), P.H. Woerlee (Keynote speaker)

Activity: Talk or presentationOral presentation

Description

Opmerking: Key-note speaker Plaats van uitgifte: Strasbourg (France)
Period5 Jun 1996
Event titleE-MRS Spring Meeting 1996
Event typeConference
LocationStrasbourg, France

Keywords

  • METIS-116266