Wafer scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond

Yasser Pordeli (Contributor), van der Wel, B. Y. (Contributor), Kooijman, L. J. (Contributor), Jonker, D. (Contributor), Erwin J. W. Berenschot (Contributor), Borgelink, B. T. H. (Contributor), Le The, H. (Contributor), Meint J. de Boer (Contributor), Eijkel, J. C. T. (Contributor), Hueting, R. (Contributor), Roald M. Tiggelaar (Contributor), Gardeniers, J. G. E. (Contributor), Tas, N. R. (Speaker)

Activity: Talk or presentationOral presentation

Period6 Nov 2019
Event title7th International Workshop on Nanotechnology and Application, IWNA 2019
Event typeWorkshop
Conference number7
LocationPhan Viet, Viet Nam
Degree of RecognitionInternational