Wavelength selection for multilayer coatings for the lithography generation beyond EUVL

Makhotkin, I. A. (Speaker), E. Zoethout (Speaker), Eric Louis (Speaker), S.N. Yakunin (Speaker), S. Muellender (Speaker), Bijkerk, F. (Speaker)

Activity: Talk or presentationOral presentation

Period17 Oct 2011
Event title2011 International Symposium on Extreme Ultraviolet Lithography
Event typeConference
LocationMiami, United States, Florida
Degree of RecognitionInternational


  • METIS-277890