Wavelength selection for multilayer coatings for the lithography generation beyond EUVL

  • Igor Alexandrovich Makhotkin (Speaker)
  • E. Zoethout (Speaker)
  • Louis, E. (Speaker)
  • S.N. Yakunin (Speaker)
  • S. Muellender (Speaker)
  • Bijkerk, F. (Speaker)

Activity: Talk or presentation › Oral presentation

Period12 Feb 2012
Event titleSPIE Advanced Lithography 2012
Event typeConference
LocationSan Jose, United States, CaliforniaShow on map
Degree of RecognitionInternational

Keywords

  • METIS-298887