Wavelength selection for multilayer coatings for the lithography generation beyond EUVL

Makhotkin, I. A. (Speaker), E. Zoethout (Speaker), Louis, E. (Speaker), S.N. Yakunin (Speaker), S. Muellender (Speaker), Bijkerk, F. (Speaker)

Activity: Talk or presentationOral presentation

Period12 Feb 2012
Held atSPIE Advanced Lithography 2012
Event typeConference
LocationSan Jose, United States, California
Degree of RecognitionInternational

Keywords

  • METIS-298887