Wavelength selection for multilayer coatings for the lithography generation beyond EUVL

Makhotkin, I. A. (Speaker), E. Zoethout (Speaker), Eric Louis (Speaker), A.M. Yakunin (Speaker), S. Muellender (Speaker), Bijkerk, F. (Speaker)

Activity: Talk or presentation › Oral presentation

Period12 Feb 2012
Event titleSPIE Conference on Extreme Ultraviolet (EUV) Lithography III, 2012
Event typeConference
Conference number3
LocationSan Jose, United States, California

Keywords

  • METIS-288363

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