Wavelength selection for multilayer coatings for the lithography generation beyond EUVL

  • Igor Alexandrovich Makhotkin (Speaker)
  • E. Zoethout (Speaker)
  • Louis, E. (Speaker)
  • S.N. Yakunin (Speaker)
  • S. Muellender (Speaker)
  • Bijkerk, F. (Speaker)

Activity: Talk or presentation › Oral presentation

Period17 Oct 2011
Event title2011 International Symposium on Extreme Ultraviolet Lithography
Event typeConference
LocationMiami, United States, FloridaShow on map
Degree of RecognitionInternational

Keywords

  • METIS-277890