Wet anisotropic etching for fluidic 1D nanochannels

J. Haneveld (Speaker), Henricus V. Jansen (Speaker), Berenschot, J. W. (Speaker), Tas, N. R. (Speaker), Michael Curt Elwenspoek (Speaker)

    Activity: Talk or presentationOral presentation

    Period2003
    Event title5th Sensor Technology Workshop Sense of Contact 2003
    Event typeWorkshop
    Conference number5
    LocationWageningen, Netherlands
    Degree of RecognitionNational