Data underlying the publication: Mirror Surface Nanostructuring via Laser Direct Writing - Characterization and Physical Origins

The addition of an optically absorptive layer to otherwise standard dielectric mirrors enables a set of laser direct writing nanostructuring methods that can add functionality to such mirrors while retaining their high reflectivity. A thorough characterization of this method is given in this paper, and its physical origins are investigated. In particular, our measurements show that laser direct writing of such mirrors has a reversible and a permanent component. The reversible process originates from the thermal expansion of the surface and allows a simple yet precise way to temporarily modify the shape of the mirror. Scanning electron microscope cross-sectional images suggest that the permanent part of the nanostructuring process is due to thermally induced pore formation and enlargement in the tantalum oxide layers of the used dielectric mirror.