Adaptieve Quantum Optica

Research output

Research output per year 2021 2021 2022 2023 2024 2024

• 52 Poster
• 20 Article
• 15 Conference contribution
• 11 Preprint
• 19 More
  • 10 Abstract
  • 2 Patent
  • 2 PhD Thesis - Research UT, graduation UT
  • 1 Inaugural speech
  • 1 Other
  • 1 Paper
  • 1 Conference article
  • 1 Review article

Research output per year

Research output per year

Search results

• 2024

  Vertical silicon nanowedge formation by repetitive dry and wet anisotropic etching combined with 3D self-aligned sidewall nanopatterning

  Pordeli, Y., Steenge, C., Berenschot, E. J. W., Hueting, R. J. E., Migliorini, A., Parkin, S. S. P. & Tas, N. R., 1 Dec 2024, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 42, 6, 062805.

  Research output: Contribution to journal › Conference article › Academic › peer-review

  Open Access

  File

  • Silicon 100%
  • Anisotropic Etching 100%
  • Silicon Nitride 50%
  • Density 33%
  • Dry Etching 33%
  66 Downloads (Pure)