Inorganic Materials Science

Research Output 1965 2019

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Conference article
2017
1 Citation (Scopus)
51 Downloads (Pure)

Wafer-scale growth of highly textured piezoelectric thin films by pulsed laser deposition for micro-scale sensors and actuators

Nguyen, M. D., Tiggelaar, R., Aukes, T., Rijnders, G. & Roelof, G., 23 Nov 2017, In : Journal of physics: Conference series. 922, 1, 012022.

Research output: Contribution to journal › Conference article › Academic › peer-review

Open Access
File
pulsed laser deposition
actuators
wafers
homogeneity
sensors
2007
5 Citations (Scopus)
42 Downloads (Pure)

Direct patterning of complex oxides by pulsed laser deposition through stencils

te Riele, P., Janssens, A., Rijnders, G. & Blank, D. H. A., 2007, In : Journal of physics: Conference series. 59, p. 404-407 4 p.

Research output: Contribution to journal › Conference article › Academic › peer-review

Open Access
File
pulsed laser deposition
oxides
apertures
chips
atomic force microscopy