Fingerprint The fingerprint is based on mining the text of the scientific documents related to the associated persons. Based on that an index of weighted terms is created, which defines the key subjects of research unit

Silicon Chemical Compounds
Sensors Engineering & Materials Science
mass flow Physics & Astronomy
silicon Physics & Astronomy
Metals Chemical Compounds
CMOS Physics & Astronomy
MEMS Engineering & Materials Science
Thin films Engineering & Materials Science

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Profiles

No photo of Ramazan Oguzhan Apaydin

Ramazan Oguzhan Apaydin

Person: Academic

20172017
No photo of Sourish Banerjee
20152018

Research Output 2009 2019

9 Downloads (Pure)
Open Access
File

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 18 Mar 2019, 2019 IEEE 32nd ICMTS Conference Proceedings. p. 48-53 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

tungsten
wire
atomic layer epitaxy
contact resistance
transmission lines

High power Si sidewall heaters for fluidic application fabricated by trench-assisted surface channel technology

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., Jan 2019, 2019 IEEE 32nd Conference on Micro Electro Mechanical Systems (MEMS). IEEE, Vol. 32. p. 648-651 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

fluidics
heaters
heating
silicon
thermal expansion

Activities 2014 2019

  • 11 Oral presentation
  • 6 Invited talk

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

Kees van der Zouw (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)
19 Mar 2019

Activity: Talk or presentationOral presentation

Hotwire-assisted Atomic Layer Deposition: principles and examples

Alexey Y. Kovalgin (Invited speaker)
3 Sep 20186 Sep 2018

Activity: Talk or presentationInvited talk

Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C

Sourish Banerjee (Speaker), Satadal Dutta (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor), Alexey Y. Kovalgin (Contributor)
29 Jul 20181 Aug 2018

Activity: Talk or presentationOral presentation