Fingerprint Dive into the research topics where Integrated Devices and Systems is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.

Silicon Chemical Compounds
Sensors Engineering & Materials Science
silicon Physics & Astronomy
MEMS Engineering & Materials Science
Metals Chemical Compounds
Atomic layer deposition Engineering & Materials Science
Fabrication Engineering & Materials Science
mass flow Physics & Astronomy

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Research Output 2009 2019

23 Downloads (Pure)
Open Access
File

A short post-processing method for high aspect ratio trenches after Bosch etching

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 23 Sep 2019. 1 p.

Research output: Contribution to conferenceAbstractAcademic

Open Access
File
Aspect ratio
Etching
Cleaning
Processing
Vapors

A simple and robust fabrication method for creating 3D tapered polydimethylsiloxane channels

Rho, H. S., Veltkamp, H-W., Baptista, D., le Gac, S. & Habibović, P., 27 Oct 2019, 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences. p. 1156-1157 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

funnels
fabrication
lab-on-a-chip devices
veins
replicas

Activities 2014 2019

  • 11 Oral presentation
  • 6 Invited talk

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

Kees van der Zouw (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)
19 Mar 2019

Activity: Talk or presentationOral presentation

Hotwire-assisted Atomic Layer Deposition: principles and examples

Alexey Y. Kovalgin (Invited speaker)
3 Sep 20186 Sep 2018

Activity: Talk or presentationInvited talk

Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C

Sourish Banerjee (Speaker), Satadal Dutta (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor), Alexey Y. Kovalgin (Contributor)
29 Jul 20181 Aug 2018

Activity: Talk or presentationOral presentation