Fingerprint Dive into the research topics where Integrated Devices and Systems is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.

Silicon Chemical Compounds
Sensors Engineering & Materials Science
silicon Physics & Astronomy
Metals Chemical Compounds
mass flow Physics & Astronomy
Atomic layer deposition Engineering & Materials Science
atomic layer epitaxy Physics & Astronomy
CMOS Physics & Astronomy

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Research Output 2009 2019

20 Downloads (Pure)
Open Access
File
2 Downloads (Pure)

Characterizing the Electrical Properties of Anisotropic, 3D-Printed Conductive Sheets

Dijkshoorn, A., Schouten, M., Wolterink, G., Sanders, R. & Krijnen, G., 8 Aug 2019, IEEE International Conference on Flexible and Printable Sensors and Systems, FLEPS 2019. IEEE, 8792279

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Electric properties
conductors
electrical properties
Transducers
transducers
19 Downloads (Pure)

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 18 Mar 2019, 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, p. 48-53 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
Atomic layer deposition
Sheet resistance
Contact resistance
Tungsten
Electric lines

Activities 2014 2019

  • 11 Oral presentation
  • 6 Invited talk

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

Kees van der Zouw (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)
19 Mar 2019

Activity: Talk or presentationOral presentation

Hotwire-assisted Atomic Layer Deposition: principles and examples

Alexey Y. Kovalgin (Invited speaker)
3 Sep 20186 Sep 2018

Activity: Talk or presentationInvited talk

Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C

Sourish Banerjee (Speaker), Satadal Dutta (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor), Alexey Y. Kovalgin (Contributor)
29 Jul 20181 Aug 2018

Activity: Talk or presentationOral presentation