Fingerprint The fingerprint is based on mining the text of the scientific documents related to the associated persons. Based on that an index of weighted terms is created, which defines the key subjects of research unit

Silicon Chemical Compounds
Sensors Engineering & Materials Science
silicon Physics & Astronomy
MEMS Engineering & Materials Science
Fabrication Engineering & Materials Science
sensors Physics & Astronomy
fabrication Physics & Astronomy
Thin films Engineering & Materials Science

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Profiles

No photo of Ramazan Oguzhan Apaydin

Ramazan Oguzhan Apaydin

Person: Academic

20172017
No photo of Sourish Banerjee
20152018

Research Output 2009 2019

Open Access
File

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 18 Mar 2019, 2019 IEEE 32nd ICMTS Conference Proceedings. p. 48-53 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
tungsten
wire
atomic layer epitaxy
contact resistance
transmission lines

High power Si sidewall heaters for fluidic application fabricated by trench-assisted surface channel technology

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., Jan 2019, 2019 IEEE 32nd Conference on Micro Electro Mechanical Systems (MEMS). IEEE, Vol. 32. p. 648-651 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

fluidics
heaters
heating
silicon
thermal expansion

Activities 2014 2019

  • 11 Oral presentation
  • 6 Invited talk

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

Kees van der Zouw (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)
19 Mar 2019

Activity: Talk or presentationOral presentation

Test structures without metal contacts for DC measurement of 2D-materials deposited on silicon

Lis Karen Nanver (Speaker), Xingyu Liu (Contributor), Tihomir Knežević (Contributor)
20 Mar 2018

Activity: Talk or presentationOral presentation

A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes

Alexey Y. Kovalgin (Invited speaker), Sourish Banerjee (Contributor), Ramazan Oguzhan Apaydin (Contributor)
1 Oct 2018

Activity: Talk or presentationInvited talk