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Silicon Chemical Compounds
Sensors Engineering & Materials Science
Metals Chemical Compounds
silicon Physics & Astronomy
mass flow Physics & Astronomy
CMOS Physics & Astronomy
MEMS Engineering & Materials Science
Atomic layer deposition Engineering & Materials Science

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Research Output 2009 2019

14 Downloads (Pure)
Open Access
File
19 Downloads (Pure)

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 18 Mar 2019, 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, p. 48-53 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Atomic layer deposition
Sheet resistance
Contact resistance
Tungsten
Electric lines

From radical-enhanced to pure thermal ALD of gallium and aluminium nitrides

Banerjee, S., 11 Sep 2019, Enschede: University of Twente. 201 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

gallium nitrides
aluminum nitrides
atomic layer epitaxy
silicon
microelectronics

Activities 2014 2019

  • 11 Oral presentation
  • 6 Invited talk

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

Kees van der Zouw (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)
19 Mar 2019

Activity: Talk or presentationOral presentation

Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C

Sourish Banerjee (Speaker), Satadal Dutta (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor), Alexey Y. Kovalgin (Contributor)
29 Jul 20181 Aug 2018

Activity: Talk or presentationOral presentation

How hot is the wire: optical, electrical and combined methods of filament temperature determination

Arnoud Jonathan Onnink (Speaker), Alexey Y. Kovalgin (Contributor), Jurriaan Schmitz (Contributor)
3 Sep 20186 Sep 2018

Activity: Talk or presentationOral presentation