Fingerprint Dive into the research topics where Integrated Devices and Systems is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.

Silicon Chemical Compounds
Sensors Engineering & Materials Science
silicon Physics & Astronomy
MEMS Engineering & Materials Science
Metals Chemical Compounds
Fabrication Engineering & Materials Science
Atomic layer deposition Engineering & Materials Science
mass flow Physics & Astronomy

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Research Output 1972 2020

6 Downloads (Pure)

Linearisation of a 3D printed flexible tactile sensor based on piezoresistive sensing

Schouten, M., Prakken, B., Sanders, R. G. P. & Krijnen, G., 13 Jan 2020, 2019 IEEE Sensors. IEEE

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
Cantilever beams
1 Citation (Scopus)
26 Downloads (Pure)
Open Access

A short post-processing method for high aspect ratio trenches after Bosch etching

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 23 Sep 2019. 1 p.

Research output: Contribution to conferenceAbstract

Open Access
Aspect ratio

Activities 1990 2019

  • 108 Oral presentation
  • 15 Invited talk
  • 3 Organising a conference, workshop, ...
  • 1 Publication Peer-review

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

Kees van der Zouw (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)
19 Mar 2019

Activity: Talk or presentationOral presentation

Test structures without metal contacts for DC measurement of 2D-materials deposited on silicon

Lis Karen Nanver (Speaker), Xingyu Liu (Contributor), Tihomir Knežević (Contributor)
20 Mar 2018

Activity: Talk or presentationOral presentation

Hotwire-assisted Atomic Layer Deposition: principles and examples

Alexey Y. Kovalgin (Invited speaker)
3 Sep 20186 Sep 2018

Activity: Talk or presentationInvited talk

Press / Media

Direct Delivery of Reagents from a Pipette Tip to a PDMS Microfluidic Device

Hoon Suk Rho, Yoonsun Yang, Henk-Willem Veltkamp & Johannes G.E. Gardeniers


2 Media contributions

Press/Media: Expert Comment