Activities 2014 2019

  • 11 Oral presentation
  • 6 Invited talk
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Invited talk

Hotwire-assisted Atomic Layer Deposition: principles and examples

Alexey Y. Kovalgin (Invited speaker)
3 Sep 20186 Sep 2018

Activity: Talk or presentationInvited talk

A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes

Alexey Y. Kovalgin (Invited speaker), Sourish Banerjee (Contributor), Ramazan Oguzhan Apaydin (Contributor)
1 Oct 2018

Activity: Talk or presentationInvited talk

Hotwire-assisted Atomic Layer Deposition of Pure Metals and Metal Nitrides

Alexey Y. Kovalgin (Invited speaker)
22 Sep 2017

Activity: Talk or presentationInvited talk

HOT WIRE ASSISTED ATOMIC LAYER DEPOSITION OF TWO- AND SINGLE-ELEMENT FILMS

Alexey Y. Kovalgin (Invited speaker)
24 Nov 2017

Activity: Talk or presentationInvited talk

Pure-metal and metal-nitride films by hotwire-assisted atomic layer deposition

Alexey Y. Kovalgin (Invited speaker)
22 Nov 2017

Activity: Talk or presentationInvited talk

Radical-enhanced Deposition and Etching of Thin Films without the Use of Plasma: Ideas and Experiments

Alexey Y. Kovalgin (Invited speaker)
29 Oct 20141 Nov 2014

Activity: Talk or presentationInvited talk