Research Output 2009 2019

2019
14 Downloads (Pure)
Open Access
File
1 Downloads (Pure)

Characterizing the Electrical Properties of Anisotropic, 3D-Printed Conductive Sheets

Dijkshoorn, A., Schouten, M., Wolterink, G., Sanders, R. & Krijnen, G., 8 Aug 2019, IEEE International Conference on Flexible and Printable Sensors and Systems, FLEPS 2019. IEEE, 8792279

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Electric properties
conductors
electrical properties
Transducers
transducers
19 Downloads (Pure)

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 18 Mar 2019, 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, p. 48-53 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
Atomic layer deposition
Sheet resistance
Contact resistance
Tungsten
Electric lines
9 Downloads (Pure)

From radical-enhanced to pure thermal ALD of gallium and aluminium nitrides

Banerjee, S., 11 Sep 2019, Enschede: University of Twente. 201 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
gallium nitrides
aluminum nitrides
atomic layer epitaxy
silicon
microelectronics

High power Si sidewall heaters for fluidic application fabricated by trench-assisted surface channel technology

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., Jan 2019, 2019 IEEE 32nd Conference on Micro Electro Mechanical Systems (MEMS). IEEE, Vol. 32. p. 648-651 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

fluidics
heaters
heating
silicon
thermal expansion
7 Downloads (Pure)

How hot is the wire: Optical, electrical, and combined methods to determine filament temperature

Onnink, A. J., Schmitz, J. & Kovalgin, A. Y., 31 Mar 2019, In : Thin solid films. 674, p. 22-32 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Heat radiation
filaments
wire
Wire
optics

Impact of ultra-thin-layer material parameters on the suppression of carrier injection in rectifying junctions formed by interfacial charge layers

Kneževic, T., Suligoj, T. & Nanver, L. K., 1 May 2019, 2019 42nd International Convention on Information and Communication Technology, Electronics and Microelectronics, MIPRO 2019 - Proceedings. Skala, K., Car, Z., Pale, P., Huljenic, D., Janjic, M., Koricic, M., Sruk, V., Ribaric, S., Grbac, T. G., Butkovic, Z., Cicin-Sain, M., Skvorc, D., Mauher, M., Babic, S., Gros, S., Vrdoljak, B. & Tijan, E. (eds.). IEEE, p. 24-29 6 p. 8757156. (International Convention on Information and Communication Technology, Electronics and Microelectronics (MIPRO); vol. 2019).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Boron
Electron injection
Diodes
Current density
Electron affinity

In search of a hole inversion layer in Pd/MoOx/Si diodes through I- v characterization using dedicated ring-shaped test structures

Gupta, G., Tharnmaiah, S. D., Hueting, R. J. E. & Nanver, L. K., 6 Jun 2019, 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, p. 12-17 6 p. 8730920

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Molybdenum oxide
Inversion layers
Palladium
Diodes
Silicon
2 Citations (Scopus)

Limits on Thinning of Boron Layers With/Without Metal Contacting in PureB Si (Photo)Diodes

Knezevic, T., Liu, X., Hardeveld, E., Suligoj, T. & Nanver, L. K., 1 Jun 2019, In : IEEE electron device letters. 40, 6, p. 858-861 4 p., 8686173.

Research output: Contribution to journalArticleAcademicpeer-review

Electron injection
Boron
Diodes
Metals
Monolayers
13 Downloads (Pure)

Minimization of dark counts in PureB SPADs for NUV/VUV/EUV light detection by employing a 2D TCAD-based simulation environment

Knežević, T., Nanver, L. K. & Suligoj, T., 26 Feb 2019, Physics and Simulation of Optoelectronic Devices XXVII. Osinski, M., Witzigmann, B. & Arakawa, Y. (eds.). SPIE, 109120Y. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10912).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
Avalanche diodes
Single Photon Avalanche Diode
environment simulation
avalanche diodes
Simulation Environment
1 Citation (Scopus)
15 Downloads (Pure)

Monitoring phase transition of aqueous biomass model substrates by high-pressure and high-temperature microfluidics

Ripken, R. M., Schlautmann, S., Sanders, R. G. P., Gardeniers, J. G. E. & le Gac, S., 15 Feb 2019, In : Electrophoresis. 40, 4, p. 563-570 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Microfluidics
Phase Transition
Reforming reactions
Biomass
Xylitol

Nanometer-thin pure B layers Grown by MBE as metal diffusion barrier on GaN Diodes

Thammaiah, S. D., Hansen, J. L. & Nanver, L. K., 1 Mar 2019, China Semiconductor Technology International Conference 2019, CSTIC 2019. Claeys, C., Huang, R., Wu, H., Lin, Q., Liang, S., Song, P., Guo, Z., Lai, K., Yu, W., Zhang, Y., Qu, X. & Lung, H-L. (eds.). Piscataway, NJ: IEEE, 8755633

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Diffusion barriers
Molecular beam epitaxy
Diodes
molecular beam epitaxy
Metals

Reverse breakdown and light-emission patterns studied in Si PureB SPADs

Krakers, M., Kneževic, T. & Nanver, L. K., 1 May 2019, 2019 42nd International Convention on Information and Communication Technology, Electronics and Microelectronics, MIPRO 2019 - Proceedings. Skala, K., Car, Z., Pale, P., Huljenic, D., Janjic, M., Koricic, M., Sruk, V., Ribaric, S., Grbac, T. G., Butkovic, Z., Cicin-Sain, M., Skvorc, D., Mauher, M., Babic, S., Gros, S., Vrdoljak, B. & Tijan, E. (eds.). Piscataway, NJ: IEEE, p. 30-35 6 p. 8757007. (International Convention on Information and Communication Technology, Electronics and Microelectronics (MIPRO); vol. 2019).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Avalanche diodes
Boron
Light emission
Photons
Diodes
1 Downloads (Pure)

Thermal Atomic Layer Deposition of Polycrystalline Gallium Nitride

Banerjee, S., Aarnink, A. A. I., Gravesteijn, D. J. & Kovalgin, A. Y., 6 Sep 2019, In : Journal of physical chemistry C. 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Gallium nitride
Atomic layer deposition
gallium nitrides
atomic layer epitaxy
adducts
1 Downloads (Pure)

Van der Waals integration of silicene and hexagonal boron nitride

Wiggers, F. B., Fleurence, A., Aoyagi, K., Yonezawa, T., Yamada-Takamura, Y., Feng, H., Zhuang, J., Du, Y., Kovalgin, A. Y. & de Jong, M. P., 5 Apr 2019, In : 2D Materials. 035001.

Research output: Contribution to journalArticleAcademicpeer-review

Boron nitride
boron nitrides
Electronic properties
Silicon
electronics
2018
2 Citations (Scopus)
1 Downloads (Pure)

2D Dark-Count-Rate Modeling of PureB Single-Photon Avalanche Diodes in a TCAD Environment

Knežević, T., Nanver, L. K. & Suligoj, T., 23 Feb 2018, Physics and Simulation of Optoelectronic Devices XXVI: SPIE OPTO, 27 January - 1 February 2018, San Francisco, California, United States. Witzigmann, B., Osiński, M. & Arakawa, Y. (eds.). Bellingham, WA: SPIE, 10 p. 105261K. (Proceedings of SPIE; vol. 10526).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

avalanche diodes
photons
ionization
electric fields
rings
1 Citation (Scopus)

A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes

Banerjee, S. & Kovalgin, A. Y., 30 Sep 2018, p. 21-29.

Research output: Contribution to conferencePaperAcademicpeer-review

Open Access
atomic layer epitaxy
adducts
nitrides
surface reactions
versatility
1 Citation (Scopus)
1 Downloads (Pure)

An experimental view on PureB silicon photodiode device physics

Nanver, L. K., 28 Jun 2018, 2018 41st International Convention on Information and Communication Technology, Electronics and Microelectronics, MIPRO 2018 - Proceedings. IEEE, 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Photodiodes
Boron
Physics
Silicon
Diodes
1 Citation (Scopus)
105 Downloads (Pure)

Charge carrier transport and electroluminescence in atomic layer deposited poly-GaN/c-Si heterojunction diodes

Gupta, G., Banerjee, S., Dutta, S., Aarnink, A. A. I., Schmitz, J., Kovalgin, A. Y. & Hueting, R. J. E., 28 Aug 2018, In : Journal of applied physics. 124, 8, 8 p., 084503.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
electroluminescence
heterojunctions
charge carriers
diodes
traps
1 Citation (Scopus)

Composite GaN-C-Ga ("GaCN") Layers with Tunable Refractive Index

Banerjee, S., Onnink, A. J., Dutta, S., Aarnink, A. A. I., Gravesteijn, D. J. & Kovalgin, A. Y., 27 Dec 2018, In : Journal of physical chemistry C. 122, 51, p. 29567-29576 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
Refractive index
Carbon
refractivity
composite materials
carbon
3 Citations (Scopus)
32 Downloads (Pure)

Data Transmission Capabilities of Silicon Avalanche Mode Light-Emitting Diodes

Agarwal, V., Annema, A-J., Hueting, R. J. E., Dutta, S., Nanver, L. K. & Nauta, B., 1 Nov 2018, In : IEEE transactions on electron devices. 65, 11, p. 4883-4890 8 p., 8472882.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Silicon
Data communication systems
Light emitting diodes
Jitter
Leakage currents
1 Downloads (Pure)

Experimental analysis of thermomechanical noise in micro Coriolis mass flow sensors

Alveringh, D., Wiegerink, R. J., Groenesteijn, J., Sanders, R. G. P. & Lötters, J. C., 1 Mar 2018, In : Sensors and actuators. A: Physical. 271, p. 212-216 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

mass flow
sensors
Sensors
equipartition theorem
random vibration
1 Downloads (Pure)

Figures of merit of avalanche-mode silicon LEDS

Hueting, R. J. E., Dutta, S., Agarwal, V. & Annema, A. J., 8 Oct 2018, Fifth Conference on Sensors, MEMS, and Electro-Optic Systems, 2018, Skuluza, South Africa. SPIE International, Vol. 11043.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

figure of merit
avalanches
light emitting diodes
CMOS
silicon
4 Citations (Scopus)

From Single Atoms to Nanoparticles: Autocatalysis and Metal Aggregation in Atomic Layer Deposition of Pt on TiO2 Nanopowder

Grillo, F., Van Bui, H., La Zara, D., Aarnink, A. A. I., Kovalgin, A. Y., Kooyman, P., Kreutzer, M. T. & van Ommen, J. R., 7 Jun 2018, In : Small. 14, 23, 1800765.

Research output: Contribution to journalArticleAcademicpeer-review

Metal Nanoparticles
Atomic layer deposition
Nanoparticles
Agglomeration
Metals
128 Downloads (Pure)

Gold free contacts to AlGaN/GaN heterostructures

Hajlasz, M., 25 May 2018, Enschede: University of Twente. 109 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
gold
metals
electric contacts
theses
polarization
114 Downloads (Pure)

Hot-wire assisted atomic layer deposition of Tungsten films

Yang, M., 19 Jan 2018, Enschede: University of Twente. 135 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
atomic layer epitaxy
tungsten
wire
theses
large scale integration

Indirect optical crosstalk reduction by highly-doped backside layer in single-photon avalanche diode arrays

Osrečki, Ž., Knežević, T., Nanver, L. K. & Suligoj, T., 1 Mar 2018, In : Optical and quantum electronics. 50, 3, 152.

Research output: Contribution to journalArticleAcademicpeer-review

Avalanche diodes
avalanche diodes
Crosstalk
crosstalk
Photons
1 Citation (Scopus)
13 Downloads (Pure)

Inherently area-selective hot-wire assisted atomic layer deposition of tungsten films

Yang, M., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 1 Mar 2018, In : Thin solid films. 649, p. 17-23 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Tungsten
Atomic layer deposition
atomic layer epitaxy
tungsten
wire
229 Downloads (Pure)

Integrated throughflow mechanical microfluidic sensors

Alveringh, D., 6 Apr 2018, Enschede: University of Twente. 216 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
Microfluidics
Fluids
Sensors
Viscosity
Medical applications
2 Downloads (Pure)

Investigation of light-emission and avalanche-current mechanisms in PureB SPAD devices

Nanver, L. K., Krakers, M., Knezevic, T., Karavidas, A., Boturchuk, I., Agarwal, V., Hueting, R. J. E., Dutta, S. & Annema, A. J., 8 Oct 2018, Fifth Conference on Sensors, MEMS and Electro-Optical Systems 2018. SPIE International, Vol. 11043.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

avalanche diodes
avalanches
light emission
defects
photons
2 Citations (Scopus)
20 Downloads (Pure)

Low-resistivity α-phase tungsten films grown by hot-wire assisted atomic layer deposition in high-aspect-ratio structures

Yang, M., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 31 Jan 2018, In : Thin solid films. 646, p. 199-208 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Tungsten
Atomic layer deposition
atomic layer epitaxy
high aspect ratio
Aspect ratio
3 Citations (Scopus)
5 Downloads (Pure)

Material Reliability of Low-Temperature Boron Deposition for PureB Silicon Photodiode Fabrication

Nanver, L. K., Lyon, K., Liu, X., Italiano, J. & Huffman, J., 26 Jun 2018, In : MRS Advances. 3, 57-58, p. 3397-3402 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

photodiodes
boron
fabrication
silicon
diodes

METHOD OF FORMING A DEVICE STRUCTURE USING SELECTIVE DEPOSITION OF GALLIUM NITRIDE AND SYSTEM FOR SAME

Banerjee, S., Aarnink, A. A. I. & Kovalgin, A. Y., 14 Dec 2018, (Submitted) Patent No. Application Number: 62779684

Research output: PatentProfessional

gallium
method
1 Citation (Scopus)
106 Downloads (Pure)

Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators

Zeng, Y., Groenesteijn, J., Alveringh, D., Steenwelle, R. J. A., Ma, K., Wiegerink, R. J. & Lötters, J. C., 21 Jan 2018.

Research output: Contribution to conferencePaperAcademicpeer-review

File
mass flow
actuators
actuation
sensors
thin films

Non-linear behavior of Al-contacted pure amorphous boron (PureB) devices at low temperatures

Knezevic, T., Nanver, L. K., Capan, I. & Suligoj, T., 28 Jun 2018, 2018 41st International Convention on Information and Communication Technology, Electronics and Microelectronics, MIPRO 2018 - Proceedings. IEEE, p. 12-17 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Boron
Temperature
Electric potential
Cryogenics
Processing
2 Citations (Scopus)
82 Downloads (Pure)

On frequency-based interface circuits for capacitive MEMS accelerometers

Qiao, Z., Boom, B. A., Annema, A. J., Wiegerink, R. J. & Nauta, B., 25 Sep 2018, In : Micromachines. 9, 10, 21 p., 488.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Phase noise
Accelerometers
MEMS
Bandwidth
Networks (circuits)
1 Citation (Scopus)
30 Downloads (Pure)

Optocoupling in CMOS

Agarwal, V., Dutta, S., Annema, A. J., Hueting, R. J. E., Schmitz, J., Lee, M-J., Charbon, E. & Nauta, B., 2 Dec 2018, 2018 IEEE International Electron Devices Meeting (IEDM). San Francisco, USA: IEEE

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
CMOS
light emitting diodes
avalanches
quantum efficiency
communication
2 Citations (Scopus)
41 Downloads (Pure)

Random telegraph signal phenomena in ultra shallow p+n silicon avalanche diodes

Agarwal, V., Annema, A. J., Dutta, S., Hueting, R. J. E., Nanver, L. K. & Nauta, B., 10 May 2018, In : Journal of the Electron Devices Society. 6, 1, p. 642-652 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Avalanches
Avalanche diodes
Telegraph
Silicon
Defects
12 Downloads (Pure)

Response of suspensions of microfabricated magnetic discs to time varying fields

Löthman, P. A., Hageman, T., Hendrix, J., Keizer, H., van Wolferen, H., Ma, K., van de Loosdrecht, M. M., ten Haken, B., Bolhuis, T. & Abelmann, L., 2018.

Research output: Contribution to conferenceAbstractAcademic

File
magnetic disks
8 Downloads (Pure)

Scalable 3D Nanoparticle Trap for Electron Microscopy Analysis

Sun, X., Berenschot, E. J. W., Veltkamp, H-W., Gardeniers, H. J. G. E. & Tas, N. R., 28 Nov 2018, In : Small. 14, 48, 1803283.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
2 Downloads (Pure)

Selective deposition of Tungsten

Kovalgin, A. Y., Yang, M., Aarnink, A. A. I. & Wolters, R. A. M., 25 Jan 2018, Patent No. US 2018/0025939 A1, Priority date 6 Jun 2017, Priority No. 15/615,489

Research output: PatentProfessional

Tungsten
Hydrogen
Substrates
Metals
Wire
1 Citation (Scopus)
1 Downloads (Pure)

Selenidation of epitaxial silicene on ZrB2

Wiggers, F. B., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 15 Jan 2018, In : Applied surface science. 428, p. 793-797 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)

Test structures without metal contacts for DC measurement of 2D-materials deposited on silicon

Nanver, L. K., Liu, X. & Knežević, T., 2018, 2018 IEEE International Conference on Microelectronic Test Structures (ICMTS). Piscataway, NJ: IEEE, p. 69-74 6 p. (IEEE International Conference on Microelectronic Test Structures (ICMTS)).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Turnaround time
Diodes
Silicon
Electrons
Substrates
1 Citation (Scopus)
10 Downloads (Pure)

The balancing act in ferroelectric transistors: how hard can it be?

Hueting, R. J. E., 7 Nov 2018, In : Micromachines. 9, 11, 14 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Field effect transistors
Ferroelectric materials
Transistors
Capacitance
Polarization
1 Citation (Scopus)
15 Downloads (Pure)

Toward GHz Switching in SOI Light Emitting Diodes

Puliyankot, V., Piccolo, G., Hueting, R. J. E. & Schmitz, J., 10 Sep 2018, In : IEEE transactions on electron devices. 65, 10, p. 4413-4420 8 p., 8457503.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Light emitting diodes
Light emission
Silicon
Diodes
Geometry
21 Downloads (Pure)

Towards understanding recovery of hot-carrier induced degradation

de Jong, M. J., Salm, C. & Schmitz, J., 30 Sep 2018, In : Microelectronics reliability. 88-90, p. 147-151 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Hot carriers
recovery
degradation
Recovery
Degradation
2017
2 Citations (Scopus)
62 Downloads (Pure)

3D-printing soft sEMG sensing structures

Wolterink, G., Sanders, R., Muijzer, F., van Beijnum, B-J. & Krijnen, G., 29 Oct 2017, 2017 IEEE Sensors. IEEE, 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
Printing
Electrodes
Orthotics
Frequency division multiplexing
Prosthetics
10 Citations (Scopus)
178 Downloads (Pure)

Nano-G accelerometer using geometric anti-springs

Boom, B. A., Bertolini, A., Hennes, E., Brookhuis, R. A., Wiegerink, R. J., Brand, van den, J. F. J., Beker, M. G., Oner, A. & Wees, van, D., 22 Jan 2017, 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, p. 33-36 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
Accelerometers
Stiffness
Leaf springs
Mechanics
Bandwidth
6 Citations (Scopus)
31 Downloads (Pure)

The avalanche-mode superjunction LED

Dutta, S., Steeneken, P. G., Agarwal, V. V., Schmitz, J., Annema, A. J. & Hueting, R. J. E., Apr 2017, In : IEEE transactions on electron devices. 64, 4, p. 1612-1618 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Light emitting diodes
Silicon
Electric fields
Optical links
Photodiodes
2016
92 Downloads (Pure)
Open Access
File
gallium nitrides
gallium
ammonia
pulses
carbon