Research Output 2009 2019

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Paper
2019
7 Downloads (Pure)

Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor

Yu, Q., Veltkamp, H-W., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 2 Oct 2019, p. 103-105. 3 p.

Research output: Contribution to conferencePaperAcademic

Open Access
File
Microfluidics
Readout systems
Fabrication
Sensors
Substrates
3 Downloads (Pure)

Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology

Zhao, Y., Veltkamp, H-W., Schut, T. V. P., Groenesteijn, J., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 2 Oct 2019, p. 116-119. 4 p.

Research output: Contribution to conferencePaperAcademic

Open Access
File
electrodes
silicon
microchannels
fabrication
microfluidic devices
16 Downloads (Pure)

Towards 3D printed microfluidic devices in α-alumina

Veltkamp, H-W., Zhao, Y., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 2 Oct 2019, p. 156-159. 4 p.

Research output: Contribution to conferencePaperAcademic

Open Access
File
Microfluidics
Alumina
Printing
High temperature applications
Materials properties
11 Downloads (Pure)

Towards a fully integrated and disposable DNA amplification chip

Akegawa Monteiro, F., Veltkamp, H-W., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 2 Oct 2019, p. 128-131. 4 p.

Research output: Contribution to conferencePaperAcademic

Open Access
File
Agriculture
Amplification
Animals
DNA
Adhesion
2018
2 Citations (Scopus)

A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes

Banerjee, S. & Kovalgin, A. Y., 30 Sep 2018, p. 21-29.

Research output: Contribution to conferencePaperAcademicpeer-review

Open Access
atomic layer epitaxy
adducts
nitrides
surface reactions
versatility
1 Citation (Scopus)
120 Downloads (Pure)

Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators

Zeng, Y., Groenesteijn, J., Alveringh, D., Steenwelle, R. J. A., Ma, K., Wiegerink, R. J. & Lötters, J. C., 21 Jan 2018.

Research output: Contribution to conferencePaperAcademicpeer-review

File
mass flow
actuators
actuation
sensors
thin films
2016
104 Downloads (Pure)
Open Access
File
gallium nitrides
gallium
ammonia
pulses
carbon