Research Output 2009 2019

Filter
Paper
2018
1 Citation (Scopus)

A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes

Banerjee, S. & Kovalgin, A. Y., 30 Sep 2018, p. 21-29.

Research output: Contribution to conferencePaperAcademicpeer-review

Open Access
atomic layer epitaxy
adducts
nitrides
surface reactions
versatility
1 Citation (Scopus)
98 Downloads (Pure)

Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators

Zeng, Y., Groenesteijn, J., Alveringh, D., Steenwelle, R. J. A., Ma, K., Wiegerink, R. J. & Lötters, J. C., 21 Jan 2018.

Research output: Contribution to conferencePaperAcademicpeer-review

File
mass flow
actuators
actuation
sensors
thin films
2016
84 Downloads (Pure)
Open Access
File
gallium nitrides
gallium
ammonia
pulses
carbon