Research Output 2009 2019

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2018

METHOD OF FORMING A DEVICE STRUCTURE USING SELECTIVE DEPOSITION OF GALLIUM NITRIDE AND SYSTEM FOR SAME

Banerjee, S., Aarnink, A. A. I. & Kovalgin, A. Y., 14 Dec 2018, (Submitted) Patent No. Application Number: 62779684

Research output: PatentProfessional

gallium
method
2 Downloads (Pure)

Selective deposition of Tungsten

Kovalgin, A. Y., Yang, M., Aarnink, A. A. I. & Wolters, R. A. M., 25 Jan 2018, Patent No. US 2018/0025939 A1, Priority date 6 Jun 2017, Priority No. 15/615,489

Research output: PatentProfessional

Tungsten
Hydrogen
Substrates
Metals
Wire