Research Output 2009 2019

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PhD Thesis - Research UT, graduation UT
2019
9 Downloads (Pure)

From radical-enhanced to pure thermal ALD of gallium and aluminium nitrides

Banerjee, S., 11 Sep 2019, Enschede: University of Twente. 201 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
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gallium nitrides
aluminum nitrides
atomic layer epitaxy
silicon
microelectronics
2018
128 Downloads (Pure)

Gold free contacts to AlGaN/GaN heterostructures

Hajlasz, M., 25 May 2018, Enschede: University of Twente. 109 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
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gold
metals
electric contacts
theses
polarization
114 Downloads (Pure)

Hot-wire assisted atomic layer deposition of Tungsten films

Yang, M., 19 Jan 2018, Enschede: University of Twente. 135 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
atomic layer epitaxy
tungsten
wire
theses
large scale integration
229 Downloads (Pure)

Integrated throughflow mechanical microfluidic sensors

Alveringh, D., 6 Apr 2018, Enschede: University of Twente. 216 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
Microfluidics
Fluids
Sensors
Viscosity
Medical applications