Research Output 1971 2019

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PhD Thesis - Research external, graduation UT
2014
27 Downloads (Pure)

Thermally induced diffusion phenomena and compound interlayer structural changes in EUV multilayers

Nyabero, S. L., 7 Feb 2014, Enschede: Universiteit Twente. 110 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

File
interlayers
theses
wavelengths
thermal stability
coatings
2013
178 Downloads (Pure)

Hydrogen particle and plasma interactions with heterogeneous structures

Kuznetsov, A., 18 Oct 2013, Enschede: Universiteit Twente. 157 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

Open Access
File
plasma interactions
particle interactions
theses
hydrogen
photolithography
82 Downloads (Pure)

Interlayer thermodynamics in nanoscale layered structures for reflection of EUV radiation

Bosgra, J., 4 Jul 2013, Enschede: University of Twente. 124 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

Open Access
File
laminates
interlayers
thermodynamics
theses
radiation
24 Downloads (Pure)

Structural and reflective characteristics of multilayers for 6.x nm wavelength

Makhotkin, I. A., 31 Oct 2013, Enschede: Universiteit Twente. 104 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

Open Access
File
theses
mirrors
photolithography
wavelengths
optics
2011
423 Downloads (Pure)

Characterization of EUV induced contamination on multilayer optics

Chen, J., 1 Jul 2011, Enschede: Universiteit Twente. 119 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

Open Access
File
contamination
optics
theses
reflectance
lithography
29 Downloads (Pure)

Diffusion phenomena in chemically stabilized multilayer structures

Bruijn, S., 27 Apr 2011, Enschede: University of Twente. 114 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

File
laminates
barrier layers
theses
damage
annealing
11 Downloads (Pure)

Ion-enhanced growth in planar and structured Mo/Si multilayers

van den Boogaard, T., 13 Dec 2011, Enschede: Universiteit Twente. 104 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

Open Access
File
molybdenum
polishing
gratings
silicon
roughness
2010
30 Downloads (Pure)

Nanoscale diffusion, compound formation and phase transitions in Mo/Si multilayer structures

de Rooij-Lohmann, V. I. T. A., 1 Oct 2010, Enschede: University of Twente. 109 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

File
laminates
interlayers
roughness
mirrors
ions
2005
22 Downloads (Pure)

Interfaces in soft X-ray multilayer mirrors

Kessels, M. J. H., 10 Mar 2005, Enschede: University of Twente. 107 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

Open Access
File
theses
mirrors
wavelengths
x rays
2002

Infrared RF excited gas lasers with slab geometry

Starostin, S. A., 8 Feb 2002, Enschede: Universiteit Twente. 147 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

1997
20 Downloads (Pure)

A high brightness electron beam for Free Electron Lasers

van Oerle, B. M., 19 Jun 1997, Enschede: Universiteit Twente. 116 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

File
free electron lasers
brightness
electron beams
cathodes
quantum efficiency