Research Output 1971 2019

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PhD Thesis - Research external, graduation UT
20 Downloads (Pure)

A high brightness electron beam for Free Electron Lasers

van Oerle, B. M., 19 Jun 1997, Enschede: Universiteit Twente. 116 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

File
free electron lasers
brightness
electron beams
cathodes
quantum efficiency
446 Downloads (Pure)

Characterization of EUV induced contamination on multilayer optics

Chen, J., 1 Jul 2011, Enschede: Universiteit Twente. 119 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

Open Access
File
contamination
optics
theses
reflectance
lithography
31 Downloads (Pure)

Diffusion phenomena in chemically stabilized multilayer structures

Bruijn, S., 27 Apr 2011, Enschede: University of Twente. 114 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

File
laminates
barrier layers
theses
damage
annealing
183 Downloads (Pure)

Hydrogen particle and plasma interactions with heterogeneous structures

Kuznetsov, A., 18 Oct 2013, Enschede: Universiteit Twente. 157 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

Open Access
File
plasma interactions
particle interactions
theses
hydrogen
photolithography

Infrared RF excited gas lasers with slab geometry

Starostin, S. A., 8 Feb 2002, Enschede: Universiteit Twente. 147 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

24 Downloads (Pure)

Interfaces in soft X-ray multilayer mirrors

Kessels, M. J. H., 10 Mar 2005, Enschede: University of Twente. 107 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

Open Access
File
theses
mirrors
wavelengths
x rays
88 Downloads (Pure)

Interlayer thermodynamics in nanoscale layered structures for reflection of EUV radiation

Bosgra, J., 4 Jul 2013, Enschede: University of Twente. 124 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

Open Access
File
laminates
interlayers
thermodynamics
theses
radiation
11 Downloads (Pure)

Ion-enhanced growth in planar and structured Mo/Si multilayers

van den Boogaard, T., 13 Dec 2011, Enschede: Universiteit Twente. 104 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

Open Access
File
molybdenum
polishing
gratings
silicon
roughness
31 Downloads (Pure)

Nanoscale diffusion, compound formation and phase transitions in Mo/Si multilayer structures

de Rooij-Lohmann, V. I. T. A., 1 Oct 2010, Enschede: University of Twente. 109 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

File
laminates
interlayers
roughness
mirrors
ions
25 Downloads (Pure)

Structural and reflective characteristics of multilayers for 6.x nm wavelength

Makhotkin, I. A., 31 Oct 2013, Enschede: Universiteit Twente. 104 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

Open Access
File
theses
mirrors
photolithography
wavelengths
optics
27 Downloads (Pure)

Thermally induced diffusion phenomena and compound interlayer structural changes in EUV multilayers

Nyabero, S. L., 7 Feb 2014, Enschede: Universiteit Twente. 110 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

File
interlayers
theses
wavelengths
thermal stability
coatings