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2011
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Method for manufacturing a multilayer structure with a lateral pattern for application in the XUV wavelength range, and BF and LMAG structures manufactured according to this method

Bijkerk, F., van der Wiel, W. G., van der Meer, R. & Hegeman, P. E., 16 Jun 2011, (Submitted) Patent No. WO 2011/071380 A1, Priority date 16 Jun 2011

Research output: PatentProfessional

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2010

Method for manufacturing a multilayer structure with a lateral pattern for application in the XUV wavelength range, and BF and LMAG structures manufactured according to this method

Bijkerk, F., van der Wiel, W. G., van der Meer, R. & Hegeman, P. E., 2010, (Submitted) Patent No. 10769182.3, Priority No. NL20092003950 20091211, WO2010NL50832 20101208

Research output: PatentProfessional