XUV Optics

Activities

Activities per year 2010 2012 2017 2018 2023 2024

• 94 Oral presentation
• 18 Invited talk
• 1 Organising a conference, workshop, ...

Activities per year

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• The effect of W thickness on the interface Si-on-W, a LEIS and TEM study

  Valpreda, A. (Speaker)

  4 Jun 2024

  Activity: Talk or presentation › Oral presentation

• Work-Function-Dependent Reduction of Transition Metal Nitrides/Oxides (TMNs/TMOs) in Hydrogen Radicals (H*)

  Rehman, A. (Speaker)

  17 Jun 2024

  Activity: Talk or presentation › Oral presentation

• Grazing Emission and grazing incidence X-ray fluorescence methods for waveguided structures

  Terentev, T. (Speaker)

  24 Jun 2024 → 30 Jun 2024

  Activity: Talk or presentation › Oral presentation

• Infrared emissivity of MoxSiy thin films

  Baskakov, A. (Speaker), van de Kruijs, R. W. E. (Contributor), Golsanamlou, Z. (Contributor), Bokdam, M. (Contributor), Sturm, M. (Contributor) & Ackermann, M. D. (Contributor)

  24 Jan 2024

  Activity: Talk or presentation › Oral presentation

• Probing thin film interfaces at the nanoscale by Low Energy Ion Scattering

  Sturm, M. (Speaker), Chandrasekaran, A. (Contributor), Valpreda, A. (Contributor), Zameshin, A. (Contributor), van de Kruijs, R. W. E. (Contributor), Yakshin, A. (Contributor), Bijkerk, F. (Contributor) & Ackermann, M. D. (Contributor)

  10 Nov 2023

  Activity: Talk or presentation › Invited talk

• Thermally stable MoNx/Si1-xNx multilayer as a substrate for XSW study of SMSI

  Tiwari, A. (Speaker), Monai, M. (Contributor), Matveevskii, K. (Contributor), Yakunin, S. N. (Contributor), Ackermann, M. D. (Contributor), Mandemaker, L. D. B. (Contributor), Meirer, F. (Contributor) & Makhotkin, I. A. (Contributor)

  12 Oct 2023

  Activity: Talk or presentation › Oral presentation

• Characterization of strong metal–support interaction (SMSI) using X-ray standing waves (XSW)

  Tiwari, A. (Speaker), Monai, M. (Contributor), Matveevskii, K. (Contributor), Yakunin, S. N. (Contributor), Ackermann, M. D. (Contributor), Meirer, F. (Contributor) & Makhotkin, I. A. (Contributor)

  3 Apr 2023 → 5 Apr 2023

  Activity: Talk or presentation › Oral presentation

• Laser-induced heating and surface modification in ruthenium thin films

  Akhmetov, F. (Speaker)

  25 Apr 2023

  Activity: Talk or presentation › Oral presentation

• Development of thin film fracture testing technique

  Shafikov, A. (Speaker)

  25 Sept 2023

  Activity: Talk or presentation › Oral presentation

• The interface study of photoresist/underlayer using hybrid x-ray reflectivity and x-ray standing wave approach

  Tiwari, A. (Speaker), Fallica, R. (Contributor), Ackermann, M. D. (Contributor) & Makhotkin, I. A. (Contributor)

  15 Nov 2023

  Activity: Talk or presentation › Oral presentation

• Simultaneous spectroscopy and imaging of an EUV plasma using zone-plates dispersion matched to transmission gratings

  Bayraktar, M. (Speaker)

  23 Oct 2023 → 25 Oct 2023

  Activity: Talk or presentation › Invited talk

• Can we resolve buried interfaces by Low Energy Ion Scattering?

  Valpreda, A. (Speaker)

  5 Apr 2023

  Activity: Talk or presentation › Oral presentation

• QUNOM 2023

  Tiwari, A. (Participant)

  22 May 2023 → 24 May 2023

  Activity: Participating in or organising an event › Organising a conference, workshop, ...

• Can we resolve buried interfaces by LEIS?

  Valpreda, A. (Speaker)

  4 May 2023

  Activity: Talk or presentation › Oral presentation

• Thin films and nano-gratings study using X-ray standing waves excited by an in-lab X-ray source

  Matveevskii , K. (Contributor), Nikolaev, K. (Contributor), Yakunin, S. N. (Contributor), Fallica, R. (Contributor), Ackermann, M. D. (Contributor) & Makhotkin, I. A. (Speaker)

  4 Apr 2023 → 5 Apr 2023

  Activity: Talk or presentation › Invited talk

• Metal and metal oxide nanofilms exposed to reactive ions and radical species

  Sturm, M. (Speaker)

  2 May 2023

  Activity: Talk or presentation › Invited talk

• Characterization of Strong Metal-Support Interaction (SMSI) Using X-ray Standing Wave

  Tiwari, A. (Speaker), Monai, M. (Contributor), Matveevskii, K. (Contributor), Yakunin, S. N. (Contributor), Ackermann, M. D. (Contributor), Mandemaker, L. D. B. (Contributor), Meirer, F. (Contributor) & Makhotkin, I. A. (Contributor)

  7 Sept 2023

  Activity: Talk or presentation › Oral presentation

• Fracture testing of free-standing thin films: drawbridge technique

  Shafikov, A. (Speaker)

  13 Jun 2022

  Activity: Talk or presentation › Oral presentation

• Low Energy Ion Interactions with Transition Metal Films: ballistic and Diffusive Transport Processes

  Phadke, P. (Speaker), Sturm, M. (Contributor), van de Kruijs, R. W. E. (Contributor), Bijkerk, F. (Contributor) & Ackermann, M. D. (Contributor)

  11 Jul 2022

  Activity: Talk or presentation › Oral presentation

• Charge exchange between He ions and solid targets: the dependence on target electronic structure revisited

  Sturm, M. (Speaker), Zameshin, A. (Contributor), Lokhorst, N. (Contributor) & Ackermann, M. D. (Contributor)

  19 May 2022

  Activity: Talk or presentation › Oral presentation

• Full spectrum [ranging 5-265nm] of a tin microdroplet laser-produced plasma light source

  Bouza, Z. (Speaker), Scheers, J. (Contributor), Schupp, R. (Contributor), Behnke, L. (Contributor), Mostafa, Y. (Contributor), Mazzotta, Z. (Contributor), Sheil, J. (Contributor), Byers, J. (Contributor), Ubachs, W. (Contributor), Hoekstra, R. (Contributor), Bayraktar, M. (Contributor) & Versolato, O. (Contributor)

  26 Jan 2022

  Activity: Talk or presentation › Oral presentation

• LEIS characterization of Si/Transition Metal structures by simulation of LEIS tails

  Valpreda, A. (Speaker), Sturm, M. (Contributor), Yakshin, A. (Contributor) & Ackermann, M. (Contributor)

  19 May 2022

  Activity: Talk or presentation › Oral presentation

• Drawbridge technique for fracture testing of freestanding ultrathin films

  Shafikov, A. (Speaker)

  26 Jan 2022

  Activity: Talk or presentation › Oral presentation

• Extreme ultraviolet light from tin plasma driven by 2-μm-wavelength laser light

  Behnke, L. (Speaker), Schupp, R. (Contributor), Lassise, A. (Contributor), Bouza, Z. (Contributor), Mazzotta, Z. (Contributor), Sheil, J. (Contributor), Bayraktar, M. (Contributor), Hoekstra, R. (Contributor), Ubachs, W. (Contributor) & Versolato, O. (Contributor)

  20 Jan 2021

  Activity: Talk or presentation › Oral presentation

• Fully-calibrated Sn LPP EUV Source Spectrum from 5.5 nm – 265 nm

  Byers, J. (Speaker), Bayraktar, M. (Contributor), Bouza, Z. (Speaker), Scheers, J. (Speaker), Schupp, R. (Speaker), Mostafa, Y. (Speaker), Behnke, L. (Speaker), Mazzotta, Z. (Speaker), Sheil, J. (Speaker), Ubachs, W. (Speaker), Hoekstra, R. (Speaker) & Versolato, O. (Speaker)

  25 Oct 2021

  Activity: Talk or presentation › Oral presentation

• Thin films and nano-gratings study using X-ray standing waves excited by an in-lab X-ray source

  Matveevskii, K. (Speaker), Nikolaev, K. (Contributor), Yakunin, S. N. (Contributor), Fallica, R. (Contributor), Ackermann, M. D. (Contributor) & Makhotkin, I. A. (Contributor)

  19 Oct 2021

  Activity: Talk or presentation › Oral presentation

• EUV Multilayers mirrors - wider, thinner and deeper

  Ackermann, M. D. (Speaker)

  28 Oct 2021

  Activity: Talk or presentation › Invited talk

• Thermal and non-thermal phase transitions in laser-irradiated metals

  Milov, I. (Speaker), Medvedev, N. (Contributor), Nikolaev, K. (Contributor) & Zhakhovsky, V. (Contributor)

  4 Oct 2021 → 8 Oct 2021

  Activity: Talk or presentation › Invited talk

• Sputtering and ion transport of low energy reactive ions interacting with transition metal surfaces

  Phadke, P. (Speaker)

  19 Jan 2021

  Activity: Talk or presentation › Oral presentation

• Dynamics of ultrafast melting in laser-irradiated ruthenium thin films

  Akhmetov, F. (Speaker), Milov, I. (Contributor), Medvedev, N. (Contributor), Semin, S. (Contributor), Formisano, F. (Contributor), Kimel, A. (Contributor), Makhotkin, I. A. (Contributor) & Ackermann, M. D. (Contributor)

  4 Oct 2021

  Activity: Talk or presentation › Oral presentation

• Broadband Metrology of EUV Light Sources

  Bayraktar, M. (Speaker)

  28 Oct 2021

  Activity: Talk or presentation › Invited talk

• Similarity in Ru damage induced by photons with different energy: From visible light to hard X-rays

  Milov, I. (Speaker), Lipp, V. (Contributor), Ilnitsky, D. (Contributor), Medvedev, N. (Contributor), Migdal, K. (Contributor), Zhakhovsky, V. (Contributor), Khokhlov, V. (Contributor), Petrov, Y. (Contributor), Inogamov, N. (Contributor), Semin, S. (Contributor), Kimel, A. (Contributor), Ziaja, B. (Contributor), Medvedev, V. (Contributor), Makhotkin, I. A. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  21 Jan 2020 → 22 Jan 2020

  Activity: Talk or presentation › Oral presentation

• Adaptive piezoelectric actuators for XUV wavelengths and scaling of hysteresis

  Lucke, P. (Speaker), Bayraktar, M. (Contributor), Nematollahi, M. (Contributor), Houwman, E. (Contributor), Birkhölzer, Y. A. (Contributor), Yakshin, A. (Contributor), Rijnders, G. (Contributor) & Bijkerk, F. (Contributor)

  22 Jan 2020

  Activity: Talk or presentation › Oral presentation

• Transmission Grating Spectrometer for Broadband Spectroscopy of Sources

  Bayraktar, M. (Speaker)

  15 Sept 2020

  Activity: Talk or presentation › Invited talk

• Ultrafast ablation of ruthenium: from visible to hard X¬ray irradiation

  Milov, I. (Invited speaker), Lipp, V. (Contributor), Ilnitsky, D. (Contributor), Medvedev, N. (Contributor), Migdal, K. (Contributor), Zhakhovsky, V. (Contributor), Khokhlov, V. (Contributor), Petrov, Y. (Contributor), Inogamov, N. (Contributor), Semin, S. (Contributor), Kimel, A. (Contributor), Ziaja, B. (Contributor), Medvedev , V. V. (Contributor), Makhotkin, I. A. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  28 Sept 2020 → 2 Oct 2020

  Activity: Talk or presentation › Invited talk

• Characterization of Tin Plasma Driven by High Energy, 2-μm-wavelength Light

  Behnke, L. (Speaker), Schupp, R. (Contributor), Lassise, A. (Contributor), Bouza, Z. (Contributor), Sheil, J. (Contributor), Bayraktar, M. (Contributor), Hoekstra, R. (Contributor), Ubachs, W. (Contributor) & Versolato, O. (Contributor)

  5 Nov 2020

  Activity: Talk or presentation › Oral presentation

• Metal and metal oxide nanofilms exposed to reactive ions and radical species

  Sturm, M. (Speaker)

  3 Nov 2020

  Activity: Talk or presentation › Invited talk

• Optical properties of multilayers for operational wavelengths between 6.6 and 13.5 nm’

  Yakshin, A. (Speaker), Zameshin, A. (Contributor), Kuznetsov, D. (Contributor), Milov, I. (Contributor), Makhotkin, I. A. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  4 Nov 2019 → 6 Nov 2019

  Activity: Talk or presentation › Invited talk

• Structural analysis of ion polished W/Si soft X-ray multilayer reflectors

  Medvedev, R. (Contributor), Nikolaev, K. (Contributor), Zameshin, A. (Contributor), IJpes, D. (Contributor), Makhotkin, I. A. (Contributor), Yakunin, S. N. (Contributor), Yakshin, A. (Speaker) & Bijkerk, F. (Contributor)

  21 Oct 2019 → 23 Oct 2019

  Activity: Talk or presentation › Oral presentation

• Active Piezoelectric Photonic Integrated Circuits (APPICs)

  Bayraktar, M. (Speaker)

  5 Jun 2019

  Activity: Talk or presentation › Oral presentation

• Damage processes in ruthenium thin films induced by femtosecond laser pulses with varying incident photon energy

  Milov, I. (Contributor), Makhotkin, I. A. (Speaker), Medvedev, N. (Contributor), lipp, V. (Contributor), Ziaja, B. (Contributor), Khokhlov, V. (Contributor), Zhakhovsky, V. (Contributor), Petrov, Y. (Contributor), Shepelev, V. (Contributor), Ilnitsky, D. (Contributor), Migdal, K. (Contributor), Inogamov, N. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  27 May 2019

  Activity: Talk or presentation › Oral presentation

• Lithography machine in-line broadband spectrum metrology and feedback control system

  Liu, F. (Speaker), Smeets, D. (Contributor), Huang, S. (Contributor), Yakunin, A. (Contributor), Havermans, P. (Contributor), Oesterholt, R. (Contributor), Bayraktar, M. (Contributor) & Bijkerk, F. (Contributor)

  10 Jun 2019 → 13 Jun 2019

  Activity: Talk or presentation › Oral presentation

• Research at the Industrial Focus Group XUV Optics

  Bayraktar, M. (Speaker)

  10 Apr 2019

  Activity: Talk or presentation › Oral presentation

• Unexpectedly Large Radiative Emission between Highly-excited States in Sn Laser-produced Plasma

  Colgan, J. (Invited speaker), Neukirch, A. (Contributor), Torretti, F. (Contributor), Sheil, J. (Contributor), Schupp, R. (Contributor), Basko, M. M. (Contributor), Bayraktar, M. (Contributor), Meijer, R. (Contributor), Witte, S. (Contributor), Ubachs, W. (Contributor), Hoekstra, R. (Contributor) & Versolato, O. (Contributor)

  4 Nov 2019

  Activity: Talk or presentation › Oral presentation

• Damage processes in ruthenium thin films induced by femtosecond laser pulses for a wide range of incident photon energy

  Milov, I. (Contributor), Makhotkin, I. A. (Speaker), Medvedev, N. (Contributor), lipp, V. (Contributor), Ziaja, B. (Contributor), Khokhlov, V. (Contributor), Zhakhovsky, V. (Contributor), Petrov, Y. (Contributor), Shepelev, V. (Contributor), Ilnitsky, D. (Contributor), Migdal, K. (Contributor), Inogamov, N. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  21 Oct 2019

  Activity: Talk or presentation › Oral presentation

• Single-shot ablation of Ru thin films induced by fs EUV Free-Electron Laser

  Milov, I. (Speaker), Makhotkin, I. A. (Contributor), Sobierajski, R. (Contributor), Medvedev, N. (Contributor), Lipp, V. (Speaker), Inogamov, N. (Contributor), Zhakhovsky, V. (Contributor), Khokhlov, V. (Contributor), Medvedev, V. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  19 Jun 2018

  Activity: Talk or presentation › Oral presentation

• Advancing thin film X-ray reflectivity data analysis

  Makhotkin, I. A. (Speaker), Yakunin, S. N. (Contributor), Woitok, J. F. (Contributor), van de Kruijs, R. W. E. (Contributor) & Bijkerk, F. (Contributor)

  12 Dec 2018

  Activity: Talk or presentation › Oral presentation

• Damage processes in thin Ru films induced by single and multiple ultra-short XUV pulses

  Makhotkin, I. A. (Speaker), Milov, I. (Contributor), Sobierajski, R. (Contributor), Chalupský, J. (Contributor), Tiedtke, K. (Contributor), Medvedev, N. (Contributor), lipp, V. (Contributor), Ziaja, B. (Contributor), Scholze, F. (Contributor), Zhakhovsky, V. (Contributor), Inogamov, N. (Contributor), Enkisch, H. (Contributor), de Vries, G. (Contributor), Scholze, F. (Contributor), Siewert, F. (Contributor), Sturm, J. M. (Contributor), Nikolaev, K. (Contributor), van de Kruijs, R. W. E. (Contributor), Louis, E. (Contributor), Jacyna, I. (Contributor), Jurek, M. (Contributor), Klinger, D. (Contributor), Nittler, L. (Contributor), Syryanyy, Y. (Contributor), Juha, L. (Contributor), Hájková, V. (Contributor), Vozda, V. (Contributor), Burian, T. (Contributor), Saksl, K. (Contributor), Faatz, B. (Contributor), Keitel, B. (Contributor), Plönjes, E. (Contributor), Schreiber, S. (Contributor), Toleikis, S. (Contributor), Loch, R. A. (Contributor), Hermann, M. (Contributor), Strobel, S. (Contributor), Nienhuys, H. K. (Contributor), Dunker, R. (Contributor), Gwalt, G. (Contributor), Mey, T. (Contributor), Smithers, M. A. (Contributor), van Wolferen, H. A. G. M. (Contributor), Keim, E. G. (Contributor) & Bijkerk, F. (Contributor)

  23 Jan 2018

  Activity: Talk or presentation › Invited talk

• Simulations of Damage of Ru Thin Films Induced by Single-Shot fs EUV FEL Pulses

  Milov, I. (Speaker), Makhotkin, I. A. (Contributor), Sobierajski, R. (Contributor), Medvedev, N. (Contributor), lipp, V. (Contributor), Inogamov, N. (Contributor), Zhakhovsky, V. (Contributor), Medvedev, V. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  27 Mar 2018

  Activity: Talk or presentation › Oral presentation

• Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold

  Makhotkin, I. A. (Speaker), Enkisch, H. (Contributor), Sobierajski, R. (Contributor), Chalupský, J. (Contributor), Tiedtke, K. (Contributor), de Vries, G. (Contributor), Störmer, M. (Contributor), Scholze, F. (Contributor), Siewert, F. (Contributor), van de Kruijs, R. W. E. (Contributor), Milov, I. (Contributor), Louis, E. (Contributor), Yatsyna, I. (Contributor), Jurek, M. (Contributor), Juha, L. (Contributor), Hájková, V. (Contributor), Vozda, V. (Contributor), Burian, T. (Contributor), Saksl, K. (Contributor), Faatz, B. (Contributor), Keitel, B. (Contributor), Ploenjes, E. (Contributor), Schreiber, S. (Contributor), Toleikis, S. (Contributor), Loch, R. A. (Contributor), Hermann, M. (Contributor), Strobel, S. (Contributor) & Nienhuys, H. K. (Contributor)

  26 Mar 2018

  Activity: Talk or presentation › Oral presentation