XUV Optics

Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems

Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Metal-on-metal interface formation laws of nanoscale thin films

Anirudhan Chandrasekaran (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), J.M. Sturm (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Invited talk

Advancing thin film X-ray reflectivity data analysis

Igor A. Makhotkin (Speaker), Sergey N. Yakunin (Contributor), J.F. Woitok (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Stress development of thin films monitored in-situ by cantilever laser deflection and low energy ion scattering

Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), Johan Reinink (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Adaptive multilayer mirrors based on piezoelectric actuators for XUV lithography

Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Simulations of Damage of Ru Thin Films Induced by Single-Shot fs EUV FEL Pulses

Igor Milov (Speaker), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), N. Inogamov (Contributor), V. Zhakhovsky (Contributor), Viacheslav Medvedev (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Atomic oxygen diffusion in ultrathin transition metal oxide films at room temperature

Cristiane Regina Stilhano Vilas Boas (Speaker), J.M. Sturm (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Correlated lateral density fluctuations in the Si layers of a W/Si multilayer revealed by GISAXS

Konstantin Nikolaev (Contributor), Sergey N. Yakunin (Contributor), Igor A. Makhotkin (Speaker), Joris de la Rie (Contributor), Roman Medvedev (Contributor), A.V. Rogachev (Contributor), C.P. Hendrikx (Contributor), M. Gateshki (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold

Igor A. Makhotkin (Speaker), Hartmut Enkisch (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Gosse de Vries (Contributor), Michael Störmer (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), Marek Jurek (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), E. Ploenjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor)

Activity: Talk or presentation › Oral presentation

Damage processes in thin Ru films induced by single and multiple ultra-short XUV pulses

Igor A. Makhotkin (Speaker), Igor Milov (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), Frank Scholze (Contributor), V. Zhakhovsky (Contributor), N. Inogamov (Contributor), Hartmut Enkisch (Contributor), Gosse de Vries (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), J.M. Sturm (Contributor), Konstantin Nikolaev (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Eric Louis (Contributor), Iwanna Jacyna (Contributor), Marek Jurek (Contributor), Dorota Klinger (Contributor), Laurent Nittler (Contributor), Yevgen Syryanyy (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), Elke Plönjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor), Rilpho Dunker (Contributor), Grzegorz Gwalt (Contributor), Tobias Mey (Contributor), Mark A. Smithers (Contributor), Hendricus A.G.M. van Wolferen (Contributor), Enrico G. Keim (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Invited talk

Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold

Igor A. Makhotkin (Speaker), Hartmut Enkisch (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Gosse de Vries (Contributor), Michael Störmer (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), Marek Jurek (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), E. Ploenjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor)

Activity: Talk or presentation › Oral presentation

Damage processes in ruthenium thin films induced by XUV and x-ray free electron lasers

Igor Milov (Speaker), Igor A. Makhotkin (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Frank Scholze (Contributor), F. Sievert (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), V. Zhakhovsky (Contributor), N. Inogamov (Contributor), Hartmut Enkisch (Contributor), Gosse de Vries (Contributor), Ryszard Sobierajski (Contributor)

Activity: Talk or presentation › Invited talk

Nanometer scale oxidation and oxygen diffusion at low temperature: Static and Isotope Exchange Depth Profile

Cristiane Regina Stilhano Vilas Boas (Speaker), J.M. Sturm (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Photon-induced damage processes in Ruthenium thin films developed for Free Electron Laser Optics

Igor Milov (Contributor), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), V.V. Medvedev (Contributor), Eric Louis (Speaker), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Unraveling extreme ultraviolet (EUV) light source spectra

Muharrem Bayraktar (Speaker), Caspar Bruineman (Contributor), Boris Vratzov (Contributor), Hubertus M.J. Bastiaens (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Matrix effects involving quasiresonant neutralization from valence band in Low Energy Ion Scattering

Andrey Zameshin (Contributor), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Cristiane Regina Stilhano Vilas Boas (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Broadband spectral characterization of EUV light sources with a transmission grating spectrometer

Muharrem Bayraktar (Speaker), Fei Liu (Contributor), Hubertus M.J. Bastiaens (Contributor), Caspar Bruineman (Contributor), Frederik Bijkerk (Contributor)

Activity: Talk or presentation › Invited talk

Ruthenium growth on B, C and B4C: combining surface and in-depth information from LEIS

Andrey Zameshin (Speaker), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Frederik Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold

Igor Alexandrovich Makhotkin (Invited speaker), H. Enkisch (Contributor), R. Sobierajski (Contributor), Jaromir Chalupsky (Contributor), K. Tiedtke (Contributor), Gosse de Vries (Contributor), M. Störmer (Contributor), F. Scholze (Contributor), F. Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), M. Jurek (Contributor), L. Juha (Contributor), V. Hájková (Contributor), V. Vozda (Contributor), T. Burian (Contributor), K. Saksl (Contributor), B. Faatz (Contributor), B. Keitel (Contributor), E. Ploenjes (Contributor), S. Schreiber (Contributor), S. Toleikis (Contributor), R.A. Loch (Contributor), M. Hermann (Contributor), S. Strobel (Contributor), H. Nienhuys (Contributor)

Activity: Talk or presentation › Invited talk

Single-shot damage of Ru thin film induced by XUV FEL fs pulses

Igor Milov (Speaker), Igor Alexandrovich Makhotkin (Contributor), R. Sobierajski (Contributor), H. Enkisch (Contributor), Jaromir Chalupsky (Contributor), K. Tiedtke (Contributor), Gosse de Vries (Contributor), M. Störmer (Contributor), Frank Scholze (Contributor), F. Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), R. Keim (Contributor), H.A.G.M. van Wolferen (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), M. Jurek (Contributor), L. Juha (Contributor), V. Hájková (Contributor), V. Vozda (Contributor), T. Burian (Contributor), K. Saksl (Contributor), B. Faatz (Contributor), B. Keitel (Contributor), E. Ploenjes (Contributor), S. Schreiber (Contributor), S. Toleikis (Contributor), R. Loch (Contributor), M. Hermann (Contributor), S. Strobel (Contributor), H. Nienhuys (Contributor), G. Gwalt (Contributor), Tobias Mey (Contributor), Klaus Man (Contributor)

Activity: Talk or presentation › Invited talk

X-ray Standing Wave Measurements at the Free-Electron Laser FLASH

G. Mercurio (Contributor), Igor Alexandrovich Makhotkin (Contributor), Igor Milov (Contributor), Y-Y. Kim (Contributor), I. Zaluzhnyy (Contributor), S. Dziarzhytski (Speaker), L. Wenthaus (Contributor), Frederik Bijkerk (Contributor), Ivan Vartaniants (Speaker), W. Wurth (Contributor)

Activity: Talk or presentation › Oral presentation

Capabilities of model free X-ray standing wave analysis of periodic multilayer structures

I.A. Makhotkin (Speaker), S.N. Yakunin (Contributor), C.P. Hendrikx (Contributor), A. Chandrasekaran (Contributor), Andrey Zameshin (Contributor), A. Zarkadas (Contributor), M. Gateshki (Contributor), R.W.E. van de Kruijs (Contributor), E. Reuvekamp (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Model independent approach for the analysis of GIXR data from thin films

Igor Alexandrovich Makhotkin (Speaker), Sergey N. Yakunin (Contributor), J.F. Woitok (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), E.J. Reuvekamp (Contributor), Frederik Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Status of multilayer reflective optics

Eric Louis (Speaker), H. Enkisch (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Igor A. Makhotkin (Contributor), Christopher James Lee (Contributor), Stephan Müllender (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Broadband spectroscopy of EUV light sources using a transmission grating spectrometer

Muharrem Bayraktar (Speaker), Francesco Torretti (Contributor), Ruben Schupp (Contributor), Oscar Versolato (Contributor), Fei Liu (Contributor), Caspar Bruineman (Contributor), Boris Vratzov (Contributor), Hubertus M.J. Bastiaens (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Single-shot damage of Ru thin film induced by XUV FEL fs pulses

Igor Milov (Speaker), Igor Alexandrovich Makhotkin (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), R. Keim (Contributor), H.A.G.M. van Wolferen (Contributor), Eric Louis (Contributor), Frederik Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

In vacuo low-energy ions scattering studies of ZrO2 growth by magnetron sputtering

J.M. Sturm (Speaker), Roger Coloma Ribera (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), Frederik Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

EUVL optics for Free Electron Laser sources: damage threshold studies and the use of adjusted wavelengths

Eric Louis (Speaker), Andrey Zameshin (Contributor), Andrey Yakshin (Contributor), Igor Alexandrovich Makhotkin (Contributor), Frederik Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Model independent approach for the analysis of GIXR data from thin films

I.A. Makhotkin (Contributor), S.N. Yakunin (Speaker), J.F. Woitok (Contributor), R.W.E. van de Kruijs (Contributor), E. Reuvekamp (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Multilayer reflective optics for EUV Lithography

Eric Louis (Invited speaker), H. Enkisch (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Igor Alexandrovich Makhotkin (Contributor), Stephan Müllender (Contributor), Frederik Bijkerk (Contributor)

Activity: Talk or presentation › Invited talk

Ruthenium growth on B, C and B4C studied by LEIS

Andrey Zameshin (Speaker), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Frederik Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Tailoring the spectral properties of extreme UV multilayer optics

V.V. Medvedev (Speaker), Andrey Yakshin (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Ruthenium growth on B, C and B4C studied by LEIS

Andrey Zameshin (Speaker), Andrey E. Yakshin (Contributor), Marko Sturm (Contributor), Fred Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

High efficiency multilayer coated blazed grating for tender X-rays

A. Sokolov (Speaker), F. Senf (Speaker), Frederik Bijkerk (Speaker), F. Eggenstein (Speaker), G. Gwalt (Speaker), Qiushi Huang (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), O. Kutz (Speaker), S. Lemke (Speaker), Eric Louis (Speaker), M. Mertin (Speaker), I. Packe (Speaker), I. Rudolph (Speaker), F. Schafers (Speaker), F. Siewert (Speaker), Jacobus Marinus Sturm (Speaker), C. Waberski (Speaker), Z. Wang (Speaker), J. Wolf (Speaker), T. Zeschke (Speaker), A. Erko (Speaker)

Activity: Talk or presentation › Oral presentation

Basic principles of single-order soft x-ray multilayer diffraction gratings

I.V. Kozhevnikov (Speaker), X. Yang (Speaker), R. van der Meer (Speaker), Qingxu Huang (Speaker), Klaus J. Boller (Speaker), Hubertus M.J. Bastiaens (Speaker), Frederik Bijkerk (Speaker), Zhouhong Wang (Speaker)

Activity: Talk or presentation › Oral presentation

Ultra-broadband Supercontinuum Generation at Telecommunication Wavelengths in Dispersion Engineered Stoichiometric Si3N4 Waveguides

F. Schepers (Speaker), M.A. Porcel (Speaker), J.P. Epping (Speaker), T. Hellwig (Speaker), M. Hoekman (Speaker), R. Mateman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), A. van Rees (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), R. Schmidt (Speaker), R. Bratschitsch (Speaker), Klaus J. Boller (Speaker), Carsten Fallnich (Speaker)

Activity: Talk or presentation › Oral presentation

Insitu Stress Measurement of Thin Film and Multilayer Deposition

Johan Reinink (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Frederik Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Ultra-wide super continuum generation in Si3N4/SiO2 waveguides

Petrus J.M. van der Slot (Speaker), J.P. Epping (Speaker), Christopher James Lee (Speaker), Klaus J. Boller (Speaker), T. Hellwig (Speaker), Carsten Fallnich (Speaker), Rene Heideman (Speaker), Arne Leinse (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker)

Activity: Talk or presentation › Oral presentation

Adaptive optics at the angstrom scale: from discrete to continuous surface manipulation

Benjamin Wylie- Van Eerd (Speaker), B. Krijnen (Speaker), Frederik Bijkerk (Speaker), Augustinus J.H.M. Rijnders (Speaker), Eric Louis (Speaker)

Activity: Talk or presentation › Oral presentation

Narrow-band Zr-coated Ni/Si multilayer Borrmann filter for 13.5 nm monitoring

J.L.P. Barreaux (Speaker), I.V. Kozhevnikov (Speaker), Hubertus M.J. Bastiaens (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), Frederik Bijkerk (Speaker), Klaus J. Boller (Speaker)

Activity: Talk or presentation › Oral presentation

Simultaneous supercontinuum and third harmonic generation in Si3N4 waveguides

J.P. Epping (Speaker), T. Hellwig (Speaker), R. Mateman (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Carsten Fallnich (Speaker), Klaus J. Boller (Speaker)

Activity: Talk or presentation › Oral presentation

Large-Alphabet Quantum Key Distribution Using Spatially Encoded Light

Tristan Tentrup (Speaker), Peter Hooijschuur (Contributor), Reinier van der Meer (Contributor), Georgios Ctistis (Contributor), Pepijn Pinkse (Contributor)

Activity: Talk or presentation › Oral presentation

Supercontinuum Generation in Si3N4 Waveguides

Youwen Fan (Speaker), J.P. Epping (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Klaus J. Boller (Speaker)

Activity: Talk or presentation › Oral presentation

Enabling supercontinuum generation in Si3N4 waveguides

J.P. Epping (Speaker), T. Hellwig (Speaker), R. Mateman (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Carsten Fallnich (Speaker), Klaus J. Boller (Speaker)

Activity: Talk or presentation › Oral presentation

Nonlinear optics in silicon nitride waveguides

J.P. Epping (Speaker), T. Hellwig (Speaker), R. Mateman (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Carsten Fallnich (Speaker), Klaus J. Boller (Speaker)

Activity: Talk or presentation › Oral presentation

Supercontinuum generation in thick silicon nitride waveguides

J.P. Epping (Speaker), T. Hellwig (Speaker), R. Mateman (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Carsten Fallnich (Speaker), Klaus J. Boller (Speaker)

Activity: Talk or presentation › Oral presentation

Smart Multilayer Interactive Optics for Lithography at Extreme UV Wavelenghts

F.A. van Goor (Speaker), Frederik Bijkerk (Speaker)

Activity: Talk or presentation › Oral presentation

Collector mirror design to separate the stray 10.6 μm CO2 laser light from the EUV light at the intermediate focus,

Muharrem Bayraktar (Speaker), F.A. van Goor (Speaker), Klaus J. Boller (Speaker), Frederik Bijkerk (Speaker)

Activity: Talk or presentation › Oral presentation

Multiple pulse damage in Mo/Si multilayer optics irradiated by intense short-wavelength FELs

R. Sobierajski (Speaker), R.A. Loch (Speaker), Eric Louis (Speaker), D. Klinger (Speaker), P. Dluzewski (Speaker), M. Klepka (Speaker), Frederik Bijkerk (Speaker), T. Burian (Speaker), J. Chalupsky (Speaker), N. Coppola (Speaker), S. Dastjani Farahani (Speaker), G. Galasso (Speaker), V. Hajkova (Speaker), M. Harmand (Speaker), J. Krzywinski (Speaker), L. Juha (Speaker), M. Jurek (Speaker), S. Möller (Speaker), M. Nagasono (Speaker), C. Ozkan (Speaker), J.B. Pelka (Speaker), K. Saskl (Speaker), J. Schultz (Speaker), P. Sovak (Speaker), S. Toleikis (Speaker), K. Tiedtke (Speaker), L. Vysin (Speaker), A. Wawro (Speaker), J. Gaudin (Speaker)

Activity: Talk or presentation › Oral presentation

IR refocusing: collector mirror design

Muharrem Bayraktar (Speaker), F.A. van Goor (Speaker), Eric Louis (Speaker), Klaus J. Boller (Speaker), Frederik Bijkerk (Speaker)

Activity: Talk or presentation › Oral presentation