Activities per year
Activities 2012 2018
- 1 - 50 out of 54 results
- Start date (descending)
Adaptive multilayer mirrors based on piezoelectric actuators for XUV lithography
Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
Simulations of Damage of Ru Thin Films Induced by Single-Shot fs EUV FEL Pulses
Igor Milov (Speaker), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), N. Inogamov (Contributor), V. Zhakhovsky (Contributor), Viacheslav Medvedev (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold
Igor A. Makhotkin (Speaker), Hartmut Enkisch (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Gosse de Vries (Contributor), Michael Störmer (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), Marek Jurek (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), E. Ploenjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor)Activity: Talk or presentation › Oral presentation
Damage processes in ruthenium thin films induced by XUV and x-ray free electron lasers
Igor Milov (Speaker), Igor A. Makhotkin (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Frank Scholze (Contributor), F. Sievert (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), V. Zhakhovsky (Contributor), N. Inogamov (Contributor), Hartmut Enkisch (Contributor), Gosse de Vries (Contributor), Ryszard Sobierajski (Contributor)Activity: Talk or presentation › Invited talk
Nanometer scale oxidation and oxygen diffusion at low temperature: Static and Isotope Exchange Depth Profile
Cristiane Regina Stilhano Vilas Boas (Speaker), J.M. Sturm (Contributor), F. Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
Correlated lateral density fluctuations in the Si layers of a W/Si multilayer revealed by GISAXS
Konstantin Nikolaev (Contributor), Sergey N. Yakunin (Contributor), Igor A. Makhotkin (Speaker), Joris de la Rie (Contributor), Roman Medvedev (Contributor), A.V. Rogachev (Contributor), C.P. Hendrikx (Contributor), M. Gateshki (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), F. Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
Stress development of thin films monitored in-situ by cantilever laser deflection and low energy ion scattering
Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), Johan Reinink (Contributor), F. Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
Atomic oxygen diffusion in ultrathin transition metal oxide films at room temperature
Cristiane Regina Stilhano Vilas Boas (Speaker), J.M. Sturm (Contributor), F. Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
Damage processes in thin Ru films induced by single and multiple ultra-short XUV pulses
Igor A. Makhotkin (Speaker), Igor Milov (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), Frank Scholze (Contributor), V. Zhakhovsky (Contributor), N. Inogamov (Contributor), Hartmut Enkisch (Contributor), Gosse de Vries (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), J.M. Sturm (Contributor), Konstantin Nikolaev (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Eric Louis (Contributor), Iwanna Jacyna (Contributor), Marek Jurek (Contributor), Dorota Klinger (Contributor), Laurent Nittler (Contributor), Yevgen Syryanyy (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), Elke Plönjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor), Rilpho Dunker (Contributor), Grzegorz Gwalt (Contributor), Tobias Mey (Contributor), Mark A. Smithers (Contributor), Hendricus A.G.M. van Wolferen (Contributor), Enrico G. Keim (Contributor), F. Bijkerk (Contributor)Activity: Talk or presentation › Invited talk
Matrix effects involving quasiresonant neutralization from valence band in Low Energy Ion Scattering
Andrey Zameshin (Contributor), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Cristiane Regina Stilhano Vilas Boas (Contributor), F. Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
Advancing thin film X-ray reflectivity data analysis
Igor A. Makhotkin (Speaker), Sergey N. Yakunin (Contributor), J.F. Woitok (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), F. Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems
Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
Metal-on-metal interface formation laws of nanoscale thin films
Anirudhan Chandrasekaran (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), J.M. Sturm (Contributor), F. Bijkerk (Contributor)Activity: Talk or presentation › Invited talk
Photon-induced damage processes in Ruthenium thin films developed for Free Electron Laser Optics
Igor Milov (Contributor), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), V.V. Medvedev (Contributor), Eric Louis (Speaker), F. Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold
Igor A. Makhotkin (Speaker), Hartmut Enkisch (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Gosse de Vries (Contributor), Michael Störmer (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), Marek Jurek (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), E. Ploenjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor)Activity: Talk or presentation › Oral presentation
Unraveling extreme ultraviolet (EUV) light source spectra
Muharrem Bayraktar (Speaker), Caspar Bruineman (Contributor), Boris Vratzov (Contributor), Hubertus M.J. Bastiaens (Contributor), F. Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
Ruthenium growth on B, C and B4C studied by LEIS
Andrey Zameshin (Speaker), Andrey E. Yakshin (Contributor), Marko Sturm (Contributor), Fred Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
Capabilities of model free X-ray standing wave analysis of periodic multilayer structures
I.A. Makhotkin (Speaker), S.N. Yakunin (Contributor), C.P. Hendrikx (Contributor), A. Chandrasekaran (Contributor), Andrey Zameshin (Contributor), A. Zarkadas (Contributor), M. Gateshki (Contributor), R.W.E. van de Kruijs (Contributor), E. Reuvekamp (Contributor), F. Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
Broadband spectral characterization of EUV light sources with a transmission grating spectrometer
Muharrem Bayraktar (Speaker), Fei Liu (Contributor), Hubertus M.J. Bastiaens (Contributor), Caspar Bruineman (Contributor), Frederik Bijkerk (Contributor)Activity: Talk or presentation › Invited talk
Ruthenium growth on B, C and B4C: combining surface and in-depth information from LEIS
Andrey Zameshin (Speaker), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Frederik Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold
Igor Alexandrovich Makhotkin (Invited speaker), H. Enkisch (Contributor), R. Sobierajski (Contributor), Jaromir Chalupsky (Contributor), K. Tiedtke (Contributor), Gosse de Vries (Contributor), M. Störmer (Contributor), F. Scholze (Contributor), F. Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), M. Jurek (Contributor), L. Juha (Contributor), V. Hájková (Contributor), V. Vozda (Contributor), T. Burian (Contributor), K. Saksl (Contributor), B. Faatz (Contributor), B. Keitel (Contributor), E. Ploenjes (Contributor), S. Schreiber (Contributor), S. Toleikis (Contributor), R.A. Loch (Contributor), M. Hermann (Contributor), S. Strobel (Contributor), H. Nienhuys (Contributor)Activity: Talk or presentation › Invited talk
Ruthenium growth on B, C and B4C studied by LEIS
Andrey Zameshin (Speaker), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Frederik Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
Broadband spectroscopy of EUV light sources using a transmission grating spectrometer
Muharrem Bayraktar (Speaker), Francesco Torretti (Contributor), Ruben Schupp (Contributor), Oscar Versolato (Contributor), Fei Liu (Contributor), Caspar Bruineman (Contributor), Boris Vratzov (Contributor), Hubertus M.J. Bastiaens (Contributor), F. Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
Model independent approach for the analysis of GIXR data from thin films
Igor Alexandrovich Makhotkin (Speaker), Sergey N. Yakunin (Contributor), J.F. Woitok (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), E.J. Reuvekamp (Contributor), Frederik Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
X-ray Standing Wave Measurements at the Free-Electron Laser FLASH
G. Mercurio (Contributor), Igor Alexandrovich Makhotkin (Contributor), Igor Milov (Contributor), Y-Y. Kim (Contributor), I. Zaluzhnyy (Contributor), S. Dziarzhytski (Speaker), L. Wenthaus (Contributor), Frederik Bijkerk (Contributor), Ivan Vartaniants (Speaker), W. Wurth (Contributor)Activity: Talk or presentation › Oral presentation
Single-shot damage of Ru thin film induced by XUV FEL fs pulses
Igor Milov (Speaker), Igor Alexandrovich Makhotkin (Contributor), R. Sobierajski (Contributor), H. Enkisch (Contributor), Jaromir Chalupsky (Contributor), K. Tiedtke (Contributor), Gosse de Vries (Contributor), M. Störmer (Contributor), Frank Scholze (Contributor), F. Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), R. Keim (Contributor), H.A.G.M. van Wolferen (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), M. Jurek (Contributor), L. Juha (Contributor), V. Hájková (Contributor), V. Vozda (Contributor), T. Burian (Contributor), K. Saksl (Contributor), B. Faatz (Contributor), B. Keitel (Contributor), E. Ploenjes (Contributor), S. Schreiber (Contributor), S. Toleikis (Contributor), R. Loch (Contributor), M. Hermann (Contributor), S. Strobel (Contributor), H. Nienhuys (Contributor), G. Gwalt (Contributor), Tobias Mey (Contributor), Klaus Man (Contributor)Activity: Talk or presentation › Invited talk
Tailoring the spectral properties of extreme UV multilayer optics
V.V. Medvedev (Speaker), Andrey Yakshin (Contributor), F. Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
Status of multilayer reflective optics
Eric Louis (Speaker), H. Enkisch (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Igor A. Makhotkin (Contributor), Christopher James Lee (Contributor), Stephan Müllender (Contributor), F. Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
Single-shot damage of Ru thin film induced by XUV FEL fs pulses
Igor Milov (Speaker), Igor Alexandrovich Makhotkin (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), R. Keim (Contributor), H.A.G.M. van Wolferen (Contributor), Eric Louis (Contributor), Frederik Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
In vacuo low-energy ions scattering studies of ZrO2 growth by magnetron sputtering
J.M. Sturm (Speaker), Roger Coloma Ribera (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), Frederik Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
Multilayer reflective optics for EUV Lithography
Eric Louis (Invited speaker), H. Enkisch (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Igor Alexandrovich Makhotkin (Contributor), Stephan Müllender (Contributor), Frederik Bijkerk (Contributor)Activity: Talk or presentation › Invited talk
Model independent approach for the analysis of GIXR data from thin films
I.A. Makhotkin (Contributor), S.N. Yakunin (Speaker), J.F. Woitok (Contributor), R.W.E. van de Kruijs (Contributor), E. Reuvekamp (Contributor), F. Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
EUVL optics for Free Electron Laser sources: damage threshold studies and the use of adjusted wavelengths
Eric Louis (Speaker), Andrey Zameshin (Contributor), Andrey Yakshin (Contributor), Igor Alexandrovich Makhotkin (Contributor), Frederik Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
Insitu Stress Measurement of Thin Film and Multilayer Deposition
Johan Reinink (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Frederik Bijkerk (Contributor)Activity: Talk or presentation › Oral presentation
Basic principles of single-order soft x-ray multilayer diffraction gratings
I.V. Kozhevnikov (Speaker), X. Yang (Speaker), R. van der Meer (Speaker), Qingxu Huang (Speaker), Klaus J. Boller (Speaker), Hubertus M.J. Bastiaens (Speaker), Frederik Bijkerk (Speaker), Zhouhong Wang (Speaker)Activity: Talk or presentation › Oral presentation
Ultra-broadband Supercontinuum Generation at Telecommunication Wavelengths in Dispersion Engineered Stoichiometric Si3N4 Waveguides
F. Schepers (Speaker), M.A. Porcel (Speaker), J.P. Epping (Speaker), T. Hellwig (Speaker), M. Hoekman (Speaker), R. Mateman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), A. van Rees (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), R. Schmidt (Speaker), R. Bratschitsch (Speaker), Klaus J. Boller (Speaker), Carsten Fallnich (Speaker)Activity: Talk or presentation › Oral presentation
High efficiency multilayer coated blazed grating for tender X-rays
A. Sokolov (Speaker), F. Senf (Speaker), Frederik Bijkerk (Speaker), F. Eggenstein (Speaker), G. Gwalt (Speaker), Qiushi Huang (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), O. Kutz (Speaker), S. Lemke (Speaker), Eric Louis (Speaker), M. Mertin (Speaker), I. Packe (Speaker), I. Rudolph (Speaker), F. Schafers (Speaker), F. Siewert (Speaker), Jacobus Marinus Sturm (Speaker), C. Waberski (Speaker), Z. Wang (Speaker), J. Wolf (Speaker), T. Zeschke (Speaker), A. Erko (Speaker)Activity: Talk or presentation › Oral presentation
Ultra-wide super continuum generation in Si3N4/SiO2 waveguides
Petrus J.M. van der Slot (Speaker), J.P. Epping (Speaker), Christopher James Lee (Speaker), Klaus J. Boller (Speaker), T. Hellwig (Speaker), Carsten Fallnich (Speaker), Rene Heideman (Speaker), Arne Leinse (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker)Activity: Talk or presentation › Oral presentation
Supercontinuum Generation in Si3N4 Waveguides
Youwen Fan (Speaker), J.P. Epping (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Klaus J. Boller (Speaker)Activity: Talk or presentation › Oral presentation
Large-Alphabet Quantum Key Distribution Using Spatially Encoded Light
Tristan Tentrup (Speaker), Peter Hooijschuur (Contributor), Reinier van der Meer (Contributor), Georgios Ctistis (Contributor), Pepijn Pinkse (Contributor)Activity: Talk or presentation › Oral presentation
Narrow-band Zr-coated Ni/Si multilayer Borrmann filter for 13.5 nm monitoring
J.L.P. Barreaux (Speaker), I.V. Kozhevnikov (Speaker), Hubertus M.J. Bastiaens (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), Frederik Bijkerk (Speaker), Klaus J. Boller (Speaker)Activity: Talk or presentation › Oral presentation
Simultaneous supercontinuum and third harmonic generation in Si3N4 waveguides
J.P. Epping (Speaker), T. Hellwig (Speaker), R. Mateman (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Carsten Fallnich (Speaker), Klaus J. Boller (Speaker)Activity: Talk or presentation › Oral presentation
Adaptive optics at the angstrom scale: from discrete to continuous surface manipulation
Benjamin Wylie- Van Eerd (Speaker), B. Krijnen (Speaker), Frederik Bijkerk (Speaker), Augustinus J.H.M. Rijnders (Speaker), Eric Louis (Speaker)Activity: Talk or presentation › Oral presentation
Enabling supercontinuum generation in Si3N4 waveguides
J.P. Epping (Speaker), T. Hellwig (Speaker), R. Mateman (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Carsten Fallnich (Speaker), Klaus J. Boller (Speaker)Activity: Talk or presentation › Oral presentation
Supercontinuum generation in thick silicon nitride waveguides
J.P. Epping (Speaker), T. Hellwig (Speaker), R. Mateman (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Carsten Fallnich (Speaker), Klaus J. Boller (Speaker)Activity: Talk or presentation › Oral presentation
Nonlinear optics in silicon nitride waveguides
J.P. Epping (Speaker), T. Hellwig (Speaker), R. Mateman (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Carsten Fallnich (Speaker), Klaus J. Boller (Speaker)Activity: Talk or presentation › Oral presentation
Collector mirror design to separate the stray 10.6 μm CO2 laser light from the EUV light at the intermediate focus,
Muharrem Bayraktar (Speaker), F.A. van Goor (Speaker), Klaus J. Boller (Speaker), Frederik Bijkerk (Speaker)Activity: Talk or presentation › Oral presentation
Smart Multilayer Interactive Optics for Lithography at Extreme UV Wavelenghts
F.A. van Goor (Speaker), Frederik Bijkerk (Speaker)Activity: Talk or presentation › Oral presentation
Multiple pulse damage in Mo/Si multilayer optics irradiated by intense short-wavelength FELs
R. Sobierajski (Speaker), R.A. Loch (Speaker), Eric Louis (Speaker), D. Klinger (Speaker), P. Dluzewski (Speaker), M. Klepka (Speaker), Frederik Bijkerk (Speaker), T. Burian (Speaker), J. Chalupsky (Speaker), N. Coppola (Speaker), S. Dastjani Farahani (Speaker), G. Galasso (Speaker), V. Hajkova (Speaker), M. Harmand (Speaker), J. Krzywinski (Speaker), L. Juha (Speaker), M. Jurek (Speaker), S. Möller (Speaker), M. Nagasono (Speaker), C. Ozkan (Speaker), J.B. Pelka (Speaker), K. Saskl (Speaker), J. Schultz (Speaker), P. Sovak (Speaker), S. Toleikis (Speaker), K. Tiedtke (Speaker), L. Vysin (Speaker), A. Wawro (Speaker), J. Gaudin (Speaker)Activity: Talk or presentation › Oral presentation
IR refocusing: collector mirror design
Muharrem Bayraktar (Speaker), F.A. van Goor (Speaker), Eric Louis (Speaker), Klaus J. Boller (Speaker), Frederik Bijkerk (Speaker)Activity: Talk or presentation › Oral presentation