XUV Optics

Activities

Activities per year

2010 2020

• 70 Oral presentation
• 10 Invited talk

Activities per year

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• Transmission Grating Spectrometer for Broadband Spectroscopy of Sources

  Muharrem Bayraktar (Speaker)

  15 Sep 2020

  Activity: Talk or presentation › Invited talk

• Metal and metal oxide nanofilms exposed to reactive ions and radical species

  Marko Sturm (Speaker)

  3 Nov 2020

  Activity: Talk or presentation › Invited talk

• Optical properties of multilayers for operational wavelengths between 6.6 and 13.5 nm’

  Andrey Yakshin (Speaker), Andrey Zameshin (Contributor), Dmitry Kuznetsov (Contributor), Igor Milov (Contributor), Igor A. Makhotkin (Contributor), Eric Louis (Contributor) & Fred Bijkerk (Contributor)

  4 Nov 2019 → 6 Nov 2019

  Activity: Talk or presentation › Invited talk

• Damage processes in thin Ru films induced by single and multiple ultra-short XUV pulses

  Igor A. Makhotkin (Speaker), Igor Milov (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), Frank Scholze (Contributor), V. Zhakhovsky (Contributor), N. Inogamov (Contributor), Hartmut Enkisch (Contributor), Gosse de Vries (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), J.M. Sturm (Contributor), Konstantin Nikolaev (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Eric Louis (Contributor), Iwanna Jacyna (Contributor), Marek Jurek (Contributor), Dorota Klinger (Contributor), Laurent Nittler (Contributor), Yevgen Syryanyy (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), Elke Plönjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor), Rilpho Dunker (Contributor), Grzegorz Gwalt (Contributor), Tobias Mey (Contributor), Mark A. Smithers (Contributor), Hendricus A.G.M. van Wolferen (Contributor), Enrico G. Keim (Contributor) & F. Bijkerk (Contributor)

  23 Jan 2018

  Activity: Talk or presentation › Invited talk

• Damage processes in ruthenium thin films induced by XUV and x-ray free electron lasers

  Igor Milov (Speaker), Igor A. Makhotkin (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Frank Scholze (Contributor), F. Sievert (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), V. Zhakhovsky (Contributor), N. Inogamov (Contributor), Hartmut Enkisch (Contributor), Gosse de Vries (Contributor) & Ryszard Sobierajski (Contributor)

  22 Nov 2018

  Activity: Talk or presentation › Invited talk

• Metal-on-metal interface formation laws of nanoscale thin films

  Anirudhan Chandrasekaran (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), J.M. Sturm (Contributor) & F. Bijkerk (Contributor)

  7 Nov 2018

  Activity: Talk or presentation › Invited talk

• Multilayer reflective optics for EUV Lithography

  Eric Louis (Invited speaker), H. Enkisch (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Igor Alexandrovich Makhotkin (Contributor), Stephan Müllender (Contributor) & Frederik Bijkerk (Contributor)

  12 Dec 2017

  Activity: Talk or presentation › Invited talk

• Single-shot damage of Ru thin film induced by XUV FEL fs pulses

  Igor Milov (Speaker), Igor Alexandrovich Makhotkin (Contributor), R. Sobierajski (Contributor), H. Enkisch (Contributor), Jaromir Chalupsky (Contributor), K. Tiedtke (Contributor), Gosse de Vries (Contributor), M. Störmer (Contributor), Frank Scholze (Contributor), F. Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), R. Keim (Contributor), H.A.G.M. van Wolferen (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), M. Jurek (Contributor), L. Juha (Contributor), V. Hájková (Contributor), V. Vozda (Contributor), T. Burian (Contributor), K. Saksl (Contributor), B. Faatz (Contributor), B. Keitel (Contributor), E. Ploenjes (Contributor), S. Schreiber (Contributor), S. Toleikis (Contributor), R. Loch (Contributor), M. Hermann (Contributor), S. Strobel (Contributor), H. Nienhuys (Contributor), G. Gwalt (Contributor), Tobias Mey (Contributor) & Klaus Man (Contributor)

  24 Apr 2017

  Activity: Talk or presentation › Invited talk

• Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold

  Igor Alexandrovich Makhotkin (Invited speaker), H. Enkisch (Contributor), R. Sobierajski (Contributor), Jaromir Chalupsky (Contributor), K. Tiedtke (Contributor), Gosse de Vries (Contributor), M. Störmer (Contributor), F. Scholze (Contributor), F. Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), M. Jurek (Contributor), L. Juha (Contributor), V. Hájková (Contributor), V. Vozda (Contributor), T. Burian (Contributor), K. Saksl (Contributor), B. Faatz (Contributor), B. Keitel (Contributor), E. Ploenjes (Contributor), S. Schreiber (Contributor), S. Toleikis (Contributor), R.A. Loch (Contributor), M. Hermann (Contributor), S. Strobel (Contributor) & H. Nienhuys (Contributor)

  24 Apr 2017 → 27 Apr 2017

  Activity: Talk or presentation › Invited talk

• Broadband spectral characterization of EUV light sources with a transmission grating spectrometer

  Muharrem Bayraktar (Speaker), Fei Liu (Contributor), Hubertus M.J. Bastiaens (Contributor), Caspar Bruineman (Contributor) & Frederik Bijkerk (Contributor)

  6 Nov 2017 → 8 Nov 2017

  Activity: Talk or presentation › Invited talk