XUV Optics

Optical properties of multilayers for operational wavelengths between 6.6 and 13.5 nm’

Andrey Yakshin (Speaker), Andrey Zameshin (Contributor), Dmitry Kuznetsov (Contributor), Igor Milov (Contributor), Igor A. Makhotkin (Contributor), Eric Louis (Contributor), Fred Bijkerk (Contributor)

Activity: Talk or presentation › Invited talk

Metal-on-metal interface formation laws of nanoscale thin films

Anirudhan Chandrasekaran (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), J.M. Sturm (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Invited talk

Damage processes in thin Ru films induced by single and multiple ultra-short XUV pulses

Igor A. Makhotkin (Speaker), Igor Milov (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), Frank Scholze (Contributor), V. Zhakhovsky (Contributor), N. Inogamov (Contributor), Hartmut Enkisch (Contributor), Gosse de Vries (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), J.M. Sturm (Contributor), Konstantin Nikolaev (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Eric Louis (Contributor), Iwanna Jacyna (Contributor), Marek Jurek (Contributor), Dorota Klinger (Contributor), Laurent Nittler (Contributor), Yevgen Syryanyy (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), Elke Plönjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor), Rilpho Dunker (Contributor), Grzegorz Gwalt (Contributor), Tobias Mey (Contributor), Mark A. Smithers (Contributor), Hendricus A.G.M. van Wolferen (Contributor), Enrico G. Keim (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Invited talk

Damage processes in ruthenium thin films induced by XUV and x-ray free electron lasers

Igor Milov (Speaker), Igor A. Makhotkin (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Frank Scholze (Contributor), F. Sievert (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), V. Zhakhovsky (Contributor), N. Inogamov (Contributor), Hartmut Enkisch (Contributor), Gosse de Vries (Contributor), Ryszard Sobierajski (Contributor)

Activity: Talk or presentation › Invited talk

Single-shot damage of Ru thin film induced by XUV FEL fs pulses

Igor Milov (Speaker), Igor Alexandrovich Makhotkin (Contributor), R. Sobierajski (Contributor), H. Enkisch (Contributor), Jaromir Chalupsky (Contributor), K. Tiedtke (Contributor), Gosse de Vries (Contributor), M. Störmer (Contributor), Frank Scholze (Contributor), F. Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), R. Keim (Contributor), H.A.G.M. van Wolferen (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), M. Jurek (Contributor), L. Juha (Contributor), V. Hájková (Contributor), V. Vozda (Contributor), T. Burian (Contributor), K. Saksl (Contributor), B. Faatz (Contributor), B. Keitel (Contributor), E. Ploenjes (Contributor), S. Schreiber (Contributor), S. Toleikis (Contributor), R. Loch (Contributor), M. Hermann (Contributor), S. Strobel (Contributor), H. Nienhuys (Contributor), G. Gwalt (Contributor), Tobias Mey (Contributor), Klaus Man (Contributor)

Activity: Talk or presentation › Invited talk

Broadband spectral characterization of EUV light sources with a transmission grating spectrometer

Muharrem Bayraktar (Speaker), Fei Liu (Contributor), Hubertus M.J. Bastiaens (Contributor), Caspar Bruineman (Contributor), Frederik Bijkerk (Contributor)

Activity: Talk or presentation › Invited talk

Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold

Igor Alexandrovich Makhotkin (Invited speaker), H. Enkisch (Contributor), R. Sobierajski (Contributor), Jaromir Chalupsky (Contributor), K. Tiedtke (Contributor), Gosse de Vries (Contributor), M. Störmer (Contributor), F. Scholze (Contributor), F. Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), M. Jurek (Contributor), L. Juha (Contributor), V. Hájková (Contributor), V. Vozda (Contributor), T. Burian (Contributor), K. Saksl (Contributor), B. Faatz (Contributor), B. Keitel (Contributor), E. Ploenjes (Contributor), S. Schreiber (Contributor), S. Toleikis (Contributor), R.A. Loch (Contributor), M. Hermann (Contributor), S. Strobel (Contributor), H. Nienhuys (Contributor)

Activity: Talk or presentation › Invited talk

Multilayer reflective optics for EUV Lithography

Eric Louis (Invited speaker), H. Enkisch (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Igor Alexandrovich Makhotkin (Contributor), Stephan Müllender (Contributor), Frederik Bijkerk (Contributor)

Activity: Talk or presentation › Invited talk