XUV Optics

Damage processes in ruthenium thin films induced by femtosecond laser pulses for a wide range of incident photon energy

Igor Milov (Contributor), Igor A. Makhotkin (Speaker), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)

21 Oct 2019

Activity: Talk or presentation › Oral presentation

Damage processes in ruthenium thin films induced by femtosecond laser pulses with varying incident photon energy

Igor Milov (Contributor), Igor A. Makhotkin (Speaker), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)

27 May 2019

Activity: Talk or presentation › Oral presentation

Structural analysis of ion polished W/Si soft X-ray multilayer reflectors

Roman Medvedev (Contributor), Konstantin Nikolaev (Contributor), Andrey Zameshin (Contributor), Dennis IJpes (Contributor), Igor A. Makhotkin (Contributor), Sergey N. Yakunin (Contributor), Andrey Yakshin (Speaker), Fred Bijkerk (Contributor)

21 Oct 2019 → 23 Oct 2019

Activity: Talk or presentation › Oral presentation

Lithography machine in-line broadband spectrum metrology and feedback control system

Fei Liu (Speaker), Dries Smeets (Contributor), Sjoerd Huang (Contributor), Andrei Yakunin (Contributor), Peter Havermans (Contributor), Rene Oesterholt (Contributor), Muharrem Bayraktar (Contributor), Fred Bijkerk (Contributor)

10 Jun 2019 → 13 Jun 2019

Activity: Talk or presentation › Oral presentation

Research at the Industrial Focus Group XUV Optics

Muharrem Bayraktar (Speaker)

10 Apr 2019

Activity: Talk or presentation › Oral presentation

Multiscale modeling of damage processes in Ru thin films induced by femtosecond laser pulses

Igor Milov (Contributor), Igor A. Makhotkin (Speaker), Nikita Medvedev (Contributor), Vladimir Lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)

30 Oct 2019

Activity: Talk or presentation › Oral presentation

Unexpectedly Large Radiative Emission between Highly-excited States in Sn Laser-produced Plasma

James Colgan (Invited speaker), Amanda Neukirch (Contributor), Francesco Torretti (Contributor), J. Sheil (Contributor), Ruben Schupp (Contributor), M M Basko (Contributor), Muharrem Bayraktar (Contributor), Randy Meijer (Contributor), S. Witte (Contributor), Wim Ubachs (Contributor), Ronnie Hoekstra (Contributor), Oscar Versolato (Contributor)

4 Nov 2019

Activity: Talk or presentation › Oral presentation

Stress development of thin films monitored in-situ by cantilever laser deflection and low energy ion scattering

Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), Johan Reinink (Contributor), F. Bijkerk (Contributor)

11 Dec 2018

Activity: Talk or presentation › Oral presentation

Adaptive multilayer mirrors based on piezoelectric actuators for XUV lithography

Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)

12 Dec 2018

Activity: Talk or presentation › Oral presentation

Single-shot ablation of Ru thin films induced by fs EUV Free-Electron Laser

Igor Milov (Speaker), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), Vladimir Lipp (Speaker), N. Inogamov (Contributor), V. Zhakhovsky (Contributor), V. Khokhlov (Contributor), Viacheslav Medvedev (Contributor), Eric Louis (Contributor), Fred Bijkerk (Contributor)

19 Jun 2018

Activity: Talk or presentation › Oral presentation

Atomic oxygen diffusion in ultrathin transition metal oxide films at room temperature

Cristiane Regina Stilhano Vilas Boas (Speaker), J.M. Sturm (Contributor), F. Bijkerk (Contributor)

7 Nov 2018 → 9 Nov 2018

Activity: Talk or presentation › Oral presentation

Matrix effects involving quasiresonant neutralization from valence band in Low Energy Ion Scattering

Andrey Zameshin (Contributor), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Cristiane Regina Stilhano Vilas Boas (Contributor), F. Bijkerk (Contributor)

1 Jul 2018 → 6 Jul 2018

Activity: Talk or presentation › Oral presentation

Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems

Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)

7 Nov 2018

Activity: Talk or presentation › Oral presentation

Photon-induced damage processes in Ruthenium thin films developed for Free Electron Laser Optics

Igor Milov (Contributor), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), V.V. Medvedev (Contributor), Eric Louis (Speaker), F. Bijkerk (Contributor)

9 Nov 2018

Activity: Talk or presentation › Oral presentation

Nanometer scale oxidation and oxygen diffusion at low temperature: Static and Isotope Exchange Depth Profile

Cristiane Regina Stilhano Vilas Boas (Speaker), J.M. Sturm (Contributor), F. Bijkerk (Contributor)

31 May 2018

Activity: Talk or presentation › Oral presentation

Unraveling extreme ultraviolet (EUV) light source spectra

Muharrem Bayraktar (Speaker), Caspar Bruineman (Contributor), Boris Vratzov (Contributor), Hubertus M.J. Bastiaens (Contributor), F. Bijkerk (Contributor)

24 Sep 2018

Activity: Talk or presentation › Oral presentation

Correlated lateral density fluctuations in the Si layers of a W/Si multilayer revealed by GISAXS

Konstantin Nikolaev (Contributor), Sergey N. Yakunin (Contributor), Igor A. Makhotkin (Speaker), Joris de la Rie (Contributor), Roman Medvedev (Contributor), A.V. Rogachev (Contributor), C.P. Hendrikx (Contributor), M. Gateshki (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), F. Bijkerk (Contributor)

8 Nov 2018

Activity: Talk or presentation › Oral presentation

Advancing thin film X-ray reflectivity data analysis

Igor A. Makhotkin (Speaker), Sergey N. Yakunin (Contributor), J.F. Woitok (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), F. Bijkerk (Contributor)

12 Dec 2018

Activity: Talk or presentation › Oral presentation

Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold

Igor A. Makhotkin (Speaker), Hartmut Enkisch (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Gosse de Vries (Contributor), Michael Störmer (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), Marek Jurek (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), E. Ploenjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor)

6 Feb 2018

Activity: Talk or presentation › Oral presentation

Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold

Igor A. Makhotkin (Speaker), Hartmut Enkisch (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Gosse de Vries (Contributor), Michael Störmer (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), Marek Jurek (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), E. Ploenjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor)

26 Mar 2018

Activity: Talk or presentation › Oral presentation

Simulations of Damage of Ru Thin Films Induced by Single-Shot fs EUV FEL Pulses

Igor Milov (Speaker), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), N. Inogamov (Contributor), V. Zhakhovsky (Contributor), Viacheslav Medvedev (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)

27 Mar 2018

Activity: Talk or presentation › Oral presentation

Tailoring the spectral properties of extreme UV multilayer optics

V.V. Medvedev (Speaker), Andrey Yakshin (Contributor), F. Bijkerk (Contributor)

17 Jan 2017

Activity: Talk or presentation › Oral presentation

Ruthenium growth on B, C and B4C studied by LEIS

Andrey Zameshin (Speaker), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Frederik Bijkerk (Contributor)

8 Aug 2017

Activity: Talk or presentation › Oral presentation

X-ray Standing Wave Measurements at the Free-Electron Laser FLASH

G. Mercurio (Contributor), Igor Alexandrovich Makhotkin (Contributor), Igor Milov (Contributor), Y-Y. Kim (Contributor), I. Zaluzhnyy (Contributor), S. Dziarzhytski (Speaker), L. Wenthaus (Contributor), Frederik Bijkerk (Contributor), Ivan Vartaniants (Speaker), W. Wurth (Contributor)

15 Sep 2017 → 17 Sep 2017

Activity: Talk or presentation › Oral presentation

Model independent approach for the analysis of GIXR data from thin films

Igor Alexandrovich Makhotkin (Speaker), Sergey N. Yakunin (Contributor), J.F. Woitok (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), E.J. Reuvekamp (Contributor), Frederik Bijkerk (Contributor)

13 Dec 2017

Activity: Talk or presentation › Oral presentation

Capabilities of model free X-ray standing wave analysis of periodic multilayer structures

I.A. Makhotkin (Speaker), S.N. Yakunin (Contributor), C.P. Hendrikx (Contributor), A. Chandrasekaran (Contributor), Andrey Zameshin (Contributor), A. Zarkadas (Contributor), M. Gateshki (Contributor), R.W.E. van de Kruijs (Contributor), E. Reuvekamp (Contributor), F. Bijkerk (Contributor)

22 May 2017

Activity: Talk or presentation › Oral presentation

Broadband spectroscopy of EUV light sources using a transmission grating spectrometer

Muharrem Bayraktar (Speaker), Francesco Torretti (Contributor), Ruben Schupp (Contributor), Oscar Versolato (Contributor), Fei Liu (Contributor), Caspar Bruineman (Contributor), Boris Vratzov (Contributor), Hubertus M.J. Bastiaens (Contributor), F. Bijkerk (Contributor)

6 Nov 2017 → 8 Nov 2017

Activity: Talk or presentation › Oral presentation

EUVL optics for Free Electron Laser sources: damage threshold studies and the use of adjusted wavelengths

Eric Louis (Speaker), Andrey Zameshin (Contributor), Andrey Yakshin (Contributor), Igor Alexandrovich Makhotkin (Contributor), Frederik Bijkerk (Contributor)

7 Nov 2017

Activity: Talk or presentation › Oral presentation

Status of multilayer reflective optics

Eric Louis (Speaker), H. Enkisch (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Igor A. Makhotkin (Contributor), Christopher James Lee (Contributor), Stephan Müllender (Contributor), F. Bijkerk (Contributor)

28 Feb 2017

Activity: Talk or presentation › Oral presentation

Ruthenium growth on B, C and B4C studied by LEIS

Andrey Zameshin (Speaker), Andrey E. Yakshin (Contributor), Marko Sturm (Contributor), Fred Bijkerk (Contributor)

23 May 2017

Activity: Talk or presentation › Oral presentation

Ruthenium growth on B, C and B4C: combining surface and in-depth information from LEIS

Andrey Zameshin (Speaker), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Frederik Bijkerk (Contributor)

11 May 2017

Activity: Talk or presentation › Oral presentation

In vacuo low-energy ions scattering studies of ZrO2 growth by magnetron sputtering

J.M. Sturm (Speaker), Roger Coloma Ribera (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), Frederik Bijkerk (Contributor)

30 Oct 2017 → 3 Nov 2017

Activity: Talk or presentation › Oral presentation

Model independent approach for the analysis of GIXR data from thin films

I.A. Makhotkin (Contributor), S.N. Yakunin (Speaker), J.F. Woitok (Contributor), R.W.E. van de Kruijs (Contributor), E. Reuvekamp (Contributor), F. Bijkerk (Contributor)

23 May 2017

Activity: Talk or presentation › Oral presentation

Single-shot damage of Ru thin film induced by XUV FEL fs pulses

Igor Milov (Speaker), Igor Alexandrovich Makhotkin (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), R. Keim (Contributor), H.A.G.M. van Wolferen (Contributor), Eric Louis (Contributor), Frederik Bijkerk (Contributor)

25 Sep 2017

Activity: Talk or presentation › Oral presentation

Insitu Stress Measurement of Thin Film and Multilayer Deposition

Johan Reinink (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Frederik Bijkerk (Contributor)

3 Oct 2016

Activity: Talk or presentation › Oral presentation

Basic principles of single-order soft x-ray multilayer diffraction gratings

I.V. Kozhevnikov (Speaker), X. Yang (Speaker), R. van der Meer (Speaker), Qingxu Huang (Speaker), Klaus J. Boller (Speaker), Hubertus M.J. Bastiaens (Speaker), Frederik Bijkerk (Speaker), Zhouhong Wang (Speaker)

15 Oct 2016

Activity: Talk or presentation › Oral presentation

High efficiency multilayer coated blazed grating for tender X-rays

A. Sokolov (Speaker), F. Senf (Speaker), Frederik Bijkerk (Speaker), F. Eggenstein (Speaker), G. Gwalt (Speaker), Qiushi Huang (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), O. Kutz (Speaker), S. Lemke (Speaker), Eric Louis (Speaker), M. Mertin (Speaker), I. Packe (Speaker), I. Rudolph (Speaker), F. Schafers (Speaker), F. Siewert (Speaker), Jacobus Marinus Sturm (Speaker), C. Waberski (Speaker), Z. Wang (Speaker), J. Wolf (Speaker), T. Zeschke (Speaker), A. Erko (Speaker)

10 Nov 2016

Activity: Talk or presentation › Oral presentation

Ultra-broadband Supercontinuum Generation at Telecommunication Wavelengths in Dispersion Engineered Stoichiometric Si3N4 Waveguides

F. Schepers (Speaker), M.A. Porcel (Speaker), J.P. Epping (Speaker), T. Hellwig (Speaker), M. Hoekman (Speaker), R. Mateman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), A. van Rees (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), R. Schmidt (Speaker), R. Bratschitsch (Speaker), Klaus J. Boller (Speaker), Carsten Fallnich (Speaker)

5 Jun 2016

Activity: Talk or presentation › Oral presentation

Ultra-wide super continuum generation in Si3N4/SiO2 waveguides

Petrus J.M. van der Slot (Speaker), J.P. Epping (Speaker), Christopher James Lee (Speaker), Klaus J. Boller (Speaker), T. Hellwig (Speaker), Carsten Fallnich (Speaker), Rene Heideman (Speaker), Arne Leinse (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker)

25 Apr 2016

Activity: Talk or presentation › Oral presentation

Narrow-band Zr-coated Ni/Si multilayer Borrmann filter for 13.5 nm monitoring

J.L.P. Barreaux (Speaker), I.V. Kozhevnikov (Speaker), Hubertus M.J. Bastiaens (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), Frederik Bijkerk (Speaker), Klaus J. Boller (Speaker)

13 Oct 2015

Activity: Talk or presentation › Oral presentation

Adaptive optics at the angstrom scale: from discrete to continuous surface manipulation

Benjamin Wylie- Van Eerd (Speaker), B. Krijnen (Speaker), Frederik Bijkerk (Speaker), Augustinus J.H.M. Rijnders (Speaker), Eric Louis (Speaker)

11 Aug 2015

Activity: Talk or presentation › Oral presentation

Supercontinuum Generation in Si3N4 Waveguides

Youwen Fan (Speaker), J.P. Epping (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Klaus J. Boller (Speaker)

19 Jun 2015

Activity: Talk or presentation › Oral presentation

Simultaneous supercontinuum and third harmonic generation in Si3N4 waveguides

J.P. Epping (Speaker), T. Hellwig (Speaker), R. Mateman (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Carsten Fallnich (Speaker), Klaus J. Boller (Speaker)

21 Jun 2015

Activity: Talk or presentation › Oral presentation

Large-Alphabet Quantum Key Distribution Using Spatially Encoded Light

Tristan Tentrup (Speaker), Peter Hooijschuur (Contributor), Reinier van der Meer (Contributor), Georgios Ctistis (Contributor), Pepijn Pinkse (Contributor)

27 Mar 2015

Activity: Talk or presentation › Oral presentation

Enabling supercontinuum generation in Si3N4 waveguides

J.P. Epping (Speaker), T. Hellwig (Speaker), R. Mateman (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Carsten Fallnich (Speaker), Klaus J. Boller (Speaker)

7 Oct 2014

Activity: Talk or presentation › Oral presentation

Nonlinear optics in silicon nitride waveguides

J.P. Epping (Speaker), T. Hellwig (Speaker), R. Mateman (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Carsten Fallnich (Speaker), Klaus J. Boller (Speaker)

22 Sep 2014

Activity: Talk or presentation › Oral presentation

Supercontinuum generation in thick silicon nitride waveguides

J.P. Epping (Speaker), T. Hellwig (Speaker), R. Mateman (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Carsten Fallnich (Speaker), Klaus J. Boller (Speaker)

24 Aug 2014

Activity: Talk or presentation › Oral presentation

Integrated Four-Wave Mixing Source for Coherent anti-Stokes Raman Scattering Based on Silicon Nitride

J.P. Epping (Speaker), M. Kues (Speaker), P.J.M. van der Slot (Speaker), C.J. Lee (Speaker), C. Fallnich (Speaker), K.-J. Boller (Speaker)

12 May 2013

Activity: Talk or presentation › Oral presentation

Collector mirror design to separate the stray 10.6 μm CO2 laser light from the EUV light at the intermediate focus,

Muharrem Bayraktar (Speaker), F.A. van Goor (Speaker), Klaus J. Boller (Speaker), Frederik Bijkerk (Speaker)

6 Oct 2013

Activity: Talk or presentation › Oral presentation

IR refocusing: collector mirror design

Muharrem Bayraktar (Speaker), F.A. van Goor (Speaker), Eric Louis (Speaker), Klaus J. Boller (Speaker), Frederik Bijkerk (Speaker)

7 Oct 2013

Activity: Talk or presentation › Oral presentation