XUV Optics

Activities

Activities per year

2010 2020

• 70 Oral presentation
• 10 Invited talk

Activities per year

Search results

• Characterization of Tin Plasma Driven by High Energy, 2-μm-wavelength Light

  Lars Behnke (Speaker), Ruben Schupp (Contributor), Adam Lassise (Contributor), Zoi Bouza (Contributor), John Sheil (Contributor), Muharrem Bayraktar (Contributor), Ronnie Hoekstra (Contributor), Wim Ubachs (Contributor) & Oscar Versolato (Contributor)

  5 Nov 2020

  Activity: Talk or presentation › Oral presentation

• Adaptive piezoelectric actuators for XUV wavelengths and scaling of hysteresis

  Philip Lucke (Speaker), Muharrem Bayraktar (Contributor), Mohammadreza Nematollahi (Contributor), Evert Houwman (Contributor), Yorick Alexander Birkhölzer (Contributor), Andrey Yakshin (Contributor), Guus Rijnders (Contributor) & Fred Bijkerk (Contributor)

  22 Jan 2020

  Activity: Talk or presentation › Oral presentation

• Damage processes in ruthenium thin films induced by femtosecond laser pulses with varying incident photon energy

  Igor Milov (Contributor), Igor A. Makhotkin (Speaker), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), Eric Louis (Contributor) & F. Bijkerk (Contributor)

  27 May 2019

  Activity: Talk or presentation › Oral presentation

• Damage processes in ruthenium thin films induced by femtosecond laser pulses for a wide range of incident photon energy

  Igor Milov (Contributor), Igor A. Makhotkin (Speaker), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), Eric Louis (Contributor) & F. Bijkerk (Contributor)

  21 Oct 2019

  Activity: Talk or presentation › Oral presentation

• Research at the Industrial Focus Group XUV Optics

  Muharrem Bayraktar (Speaker)

  10 Apr 2019

  Activity: Talk or presentation › Oral presentation

• Active Piezoelectric Photonic Integrated Circuits (APPICs)

  Muharrem Bayraktar (Speaker)

  5 Jun 2019

  Activity: Talk or presentation › Oral presentation

• Lithography machine in-line broadband spectrum metrology and feedback control system

  Fei Liu (Speaker), Dries Smeets (Contributor), Sjoerd Huang (Contributor), Andrei Yakunin (Contributor), Peter Havermans (Contributor), Rene Oesterholt (Contributor), Muharrem Bayraktar (Contributor) & Fred Bijkerk (Contributor)

  10 Jun 2019 → 13 Jun 2019

  Activity: Talk or presentation › Oral presentation

• Unexpectedly Large Radiative Emission between Highly-excited States in Sn Laser-produced Plasma

  James Colgan (Invited speaker), Amanda Neukirch (Contributor), Francesco Torretti (Contributor), J. Sheil (Contributor), Ruben Schupp (Contributor), M M Basko (Contributor), Muharrem Bayraktar (Contributor), Randy Meijer (Contributor), S. Witte (Contributor), Wim Ubachs (Contributor), Ronnie Hoekstra (Contributor) & Oscar Versolato (Contributor)

  4 Nov 2019

  Activity: Talk or presentation › Oral presentation

• Structural analysis of ion polished W/Si soft X-ray multilayer reflectors

  Roman Medvedev (Contributor), Konstantin Nikolaev (Contributor), Andrey Zameshin (Contributor), Dennis IJpes (Contributor), Igor A. Makhotkin (Contributor), Sergey N. Yakunin (Contributor), Andrey Yakshin (Speaker) & Fred Bijkerk (Contributor)

  21 Oct 2019 → 23 Oct 2019

  Activity: Talk or presentation › Oral presentation

• Matrix effects involving quasiresonant neutralization from valence band in Low Energy Ion Scattering

  Andrey Zameshin (Contributor), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Cristiane Regina Stilhano Vilas Boas (Contributor) & F. Bijkerk (Contributor)

  1 Jul 2018 → 6 Jul 2018

  Activity: Talk or presentation › Oral presentation

• Single-shot ablation of Ru thin films induced by fs EUV Free-Electron Laser

  Igor Milov (Speaker), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), Vladimir Lipp (Speaker), N. Inogamov (Contributor), V. Zhakhovsky (Contributor), V. Khokhlov (Contributor), Viacheslav Medvedev (Contributor), Eric Louis (Contributor) & Fred Bijkerk (Contributor)

  19 Jun 2018

  Activity: Talk or presentation › Oral presentation

• Simulations of Damage of Ru Thin Films Induced by Single-Shot fs EUV FEL Pulses

  Igor Milov (Speaker), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), N. Inogamov (Contributor), V. Zhakhovsky (Contributor), Viacheslav Medvedev (Contributor), Eric Louis (Contributor) & F. Bijkerk (Contributor)

  27 Mar 2018

  Activity: Talk or presentation › Oral presentation

• Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold

  Igor A. Makhotkin (Speaker), Hartmut Enkisch (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Gosse de Vries (Contributor), Michael Störmer (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), Marek Jurek (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), E. Ploenjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor) & Han Kwang Nienhuys (Contributor)

  26 Mar 2018

  Activity: Talk or presentation › Oral presentation

• Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold

  Igor A. Makhotkin (Speaker), Hartmut Enkisch (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Gosse de Vries (Contributor), Michael Störmer (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), Marek Jurek (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), E. Ploenjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor) & Han Kwang Nienhuys (Contributor)

  6 Feb 2018

  Activity: Talk or presentation › Oral presentation

• Nanometer scale oxidation and oxygen diffusion at low temperature: Static and Isotope Exchange Depth Profile

  Cristiane Regina Stilhano Vilas Boas (Speaker), J.M. Sturm (Contributor) & F. Bijkerk (Contributor)

  31 May 2018

  Activity: Talk or presentation › Oral presentation

• Advancing thin film X-ray reflectivity data analysis

  Igor A. Makhotkin (Speaker), Sergey N. Yakunin (Contributor), J.F. Woitok (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor) & F. Bijkerk (Contributor)

  12 Dec 2018

  Activity: Talk or presentation › Oral presentation

• Photon-induced damage processes in Ruthenium thin films developed for Free Electron Laser Optics

  Igor Milov (Contributor), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), V.V. Medvedev (Contributor), Eric Louis (Speaker) & F. Bijkerk (Contributor)

  9 Nov 2018

  Activity: Talk or presentation › Oral presentation

• Unraveling extreme ultraviolet (EUV) light source spectra

  Muharrem Bayraktar (Speaker), Caspar Bruineman (Contributor), Boris Vratzov (Contributor), Hubertus M.J. Bastiaens (Contributor) & F. Bijkerk (Contributor)

  24 Sep 2018

  Activity: Talk or presentation › Oral presentation

• Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems

  Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor) & F. Bijkerk (Contributor)

  7 Nov 2018

  Activity: Talk or presentation › Oral presentation

• Correlated lateral density fluctuations in the Si layers of a W/Si multilayer revealed by GISAXS

  Konstantin Nikolaev (Contributor), Sergey N. Yakunin (Contributor), Igor A. Makhotkin (Speaker), Joris de la Rie (Contributor), Roman Medvedev (Contributor), A.V. Rogachev (Contributor), C.P. Hendrikx (Contributor), M. Gateshki (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor) & F. Bijkerk (Contributor)

  8 Nov 2018

  Activity: Talk or presentation › Oral presentation

• Atomic oxygen diffusion in ultrathin transition metal oxide films at room temperature

  Cristiane Regina Stilhano Vilas Boas (Speaker), J.M. Sturm (Contributor) & F. Bijkerk (Contributor)

  7 Nov 2018 → 9 Nov 2018

  Activity: Talk or presentation › Oral presentation

• Adaptive multilayer mirrors based on piezoelectric actuators for XUV lithography

  Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor) & F. Bijkerk (Contributor)

  12 Dec 2018

  Activity: Talk or presentation › Oral presentation

• Stress development of thin films monitored in-situ by cantilever laser deflection and low energy ion scattering

  Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), Johan Reinink (Contributor) & F. Bijkerk (Contributor)

  11 Dec 2018

  Activity: Talk or presentation › Oral presentation

• Model independent approach for the analysis of GIXR data from thin films

  I.A. Makhotkin (Contributor), S.N. Yakunin (Speaker), J.F. Woitok (Contributor), R.W.E. van de Kruijs (Contributor), E. Reuvekamp (Contributor) & F. Bijkerk (Contributor)

  23 May 2017

  Activity: Talk or presentation › Oral presentation

• Tailoring the spectral properties of extreme UV multilayer optics

  V.V. Medvedev (Speaker), Andrey Yakshin (Contributor) & F. Bijkerk (Contributor)

  17 Jan 2017

  Activity: Talk or presentation › Oral presentation

• Ruthenium growth on B, C and B4C studied by LEIS

  Andrey Zameshin (Speaker), Andrey Yakshin (Contributor), J.M. Sturm (Contributor) & Frederik Bijkerk (Contributor)

  8 Aug 2017

  Activity: Talk or presentation › Oral presentation

• Status of multilayer reflective optics

  Eric Louis (Speaker), H. Enkisch (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Igor A. Makhotkin (Contributor), Christopher James Lee (Contributor), Stephan Müllender (Contributor) & F. Bijkerk (Contributor)

  28 Feb 2017

  Activity: Talk or presentation › Oral presentation

• Ruthenium growth on B, C and B4C studied by LEIS

  Andrey Zameshin (Speaker), Andrey E. Yakshin (Contributor), Marko Sturm (Contributor) & Fred Bijkerk (Contributor)

  23 May 2017

  Activity: Talk or presentation › Oral presentation

• X-ray Standing Wave Measurements at the Free-Electron Laser FLASH

  G. Mercurio (Contributor), Igor Alexandrovich Makhotkin (Contributor), Igor Milov (Contributor), Y-Y. Kim (Contributor), I. Zaluzhnyy (Contributor), S. Dziarzhytski (Speaker), L. Wenthaus (Contributor), Frederik Bijkerk (Contributor), Ivan Vartaniants (Speaker) & W. Wurth (Contributor)

  15 Sep 2017 → 17 Sep 2017

  Activity: Talk or presentation › Oral presentation

• In vacuo low-energy ions scattering studies of ZrO2 growth by magnetron sputtering

  J.M. Sturm (Speaker), Roger Coloma Ribera (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor) & Frederik Bijkerk (Contributor)

  30 Oct 2017 → 3 Nov 2017

  Activity: Talk or presentation › Oral presentation

• EUVL optics for Free Electron Laser sources: damage threshold studies and the use of adjusted wavelengths

  Eric Louis (Speaker), Andrey Zameshin (Contributor), Andrey Yakshin (Contributor), Igor Alexandrovich Makhotkin (Contributor) & Frederik Bijkerk (Contributor)

  7 Nov 2017

  Activity: Talk or presentation › Oral presentation

• Model independent approach for the analysis of GIXR data from thin films

  Igor Alexandrovich Makhotkin (Speaker), Sergey N. Yakunin (Contributor), J.F. Woitok (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), E.J. Reuvekamp (Contributor) & Frederik Bijkerk (Contributor)

  13 Dec 2017

  Activity: Talk or presentation › Oral presentation

• Ruthenium growth on B, C and B4C: combining surface and in-depth information from LEIS

  Andrey Zameshin (Speaker), Andrey Yakshin (Contributor), J.M. Sturm (Contributor) & Frederik Bijkerk (Contributor)

  11 May 2017

  Activity: Talk or presentation › Oral presentation

• Capabilities of model free X-ray standing wave analysis of periodic multilayer structures

  I.A. Makhotkin (Speaker), S.N. Yakunin (Contributor), C.P. Hendrikx (Contributor), A. Chandrasekaran (Contributor), Andrey Zameshin (Contributor), A. Zarkadas (Contributor), M. Gateshki (Contributor), R.W.E. van de Kruijs (Contributor), E. Reuvekamp (Contributor) & F. Bijkerk (Contributor)

  22 May 2017

  Activity: Talk or presentation › Oral presentation

• Broadband spectroscopy of EUV light sources using a transmission grating spectrometer

  Muharrem Bayraktar (Speaker), Francesco Torretti (Contributor), Ruben Schupp (Contributor), Oscar Versolato (Contributor), Fei Liu (Contributor), Caspar Bruineman (Contributor), Boris Vratzov (Contributor), Hubertus M.J. Bastiaens (Contributor) & F. Bijkerk (Contributor)

  6 Nov 2017 → 8 Nov 2017

  Activity: Talk or presentation › Oral presentation

• Single-shot damage of Ru thin film induced by XUV FEL fs pulses

  Igor Milov (Speaker), Igor Alexandrovich Makhotkin (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), R. Keim (Contributor), H.A.G.M. van Wolferen (Contributor), Eric Louis (Contributor) & Frederik Bijkerk (Contributor)

  25 Sep 2017

  Activity: Talk or presentation › Oral presentation

• Insitu Stress Measurement of Thin Film and Multilayer Deposition

  Johan Reinink (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor) & Frederik Bijkerk (Contributor)

  3 Oct 2016

  Activity: Talk or presentation › Oral presentation

• Ultra-wide super continuum generation in Si3N4/SiO2 waveguides

  Petrus J.M. van der Slot (Speaker), J.P. Epping (Speaker), Christopher James Lee (Speaker), Klaus J. Boller (Speaker), T. Hellwig (Speaker), Carsten Fallnich (Speaker), Rene Heideman (Speaker), Arne Leinse (Speaker), A. van Rees (Speaker) & M. Hoekman (Speaker)

  25 Apr 2016

  Activity: Talk or presentation › Oral presentation

• Ultra-broadband Supercontinuum Generation at Telecommunication Wavelengths in Dispersion Engineered Stoichiometric Si3N4 Waveguides

  F. Schepers (Speaker), M.A. Porcel (Speaker), J.P. Epping (Speaker), T. Hellwig (Speaker), M. Hoekman (Speaker), R. Mateman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), A. van Rees (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), R. Schmidt (Speaker), R. Bratschitsch (Speaker), Klaus J. Boller (Speaker) & Carsten Fallnich (Speaker)

  5 Jun 2016

  Activity: Talk or presentation › Oral presentation

• High efficiency multilayer coated blazed grating for tender X-rays

  A. Sokolov (Speaker), F. Senf (Speaker), Frederik Bijkerk (Speaker), F. Eggenstein (Speaker), G. Gwalt (Speaker), Qiushi Huang (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), O. Kutz (Speaker), S. Lemke (Speaker), Eric Louis (Speaker), M. Mertin (Speaker), I. Packe (Speaker), I. Rudolph (Speaker), F. Schafers (Speaker), F. Siewert (Speaker), Jacobus Marinus Sturm (Speaker), C. Waberski (Speaker), Z. Wang (Speaker), J. Wolf (Speaker), T. Zeschke (Speaker) & A. Erko (Speaker)

  10 Nov 2016

  Activity: Talk or presentation › Oral presentation

• XUV Spectrometer for broadband spectral measurements

  Muharrem Bayraktar (Speaker), C. Bruineman (Speaker), B. Vratzov (Speaker), Hubertus M.J. Bastiaens (Speaker) & Frederik Bijkerk (Speaker)

  4 May 2016

  Activity: Talk or presentation › Oral presentation

• Basic principles of single-order soft x-ray multilayer diffraction gratings

  I.V. Kozhevnikov (Speaker), X. Yang (Speaker), R. van der Meer (Speaker), Qingxu Huang (Speaker), Klaus J. Boller (Speaker), Hubertus M.J. Bastiaens (Speaker), Frederik Bijkerk (Speaker) & Zhouhong Wang (Speaker)

  15 Oct 2016

  Activity: Talk or presentation › Oral presentation

• Large-Alphabet Quantum Key Distribution Using Spatially Encoded Light

  Tristan Tentrup (Speaker), Peter Hooijschuur (Contributor), Reinier van der Meer (Contributor), Georgios Ctistis (Contributor) & Pepijn Pinkse (Contributor)

  27 Mar 2015

  Activity: Talk or presentation › Oral presentation

• Narrow-band Zr-coated Ni/Si multilayer Borrmann filter for 13.5 nm monitoring

  J.L.P. Barreaux (Speaker), I.V. Kozhevnikov (Speaker), Hubertus M.J. Bastiaens (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), Frederik Bijkerk (Speaker) & Klaus J. Boller (Speaker)

  13 Oct 2015

  Activity: Talk or presentation › Oral presentation

• Adaptive optics at the angstrom scale: from discrete to continuous surface manipulation

  Benjamin Wylie- Van Eerd (Speaker), B. Krijnen (Speaker), Frederik Bijkerk (Speaker), Augustinus J.H.M. Rijnders (Speaker) & Eric Louis (Speaker)

  11 Aug 2015

  Activity: Talk or presentation › Oral presentation

• Supercontinuum Generation in Si3N4 Waveguides

  Youwen Fan (Speaker), J.P. Epping (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker) & Klaus J. Boller (Speaker)

  19 Jun 2015

  Activity: Talk or presentation › Oral presentation

• Simultaneous supercontinuum and third harmonic generation in Si3N4 waveguides

  J.P. Epping (Speaker), T. Hellwig (Speaker), R. Mateman (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Carsten Fallnich (Speaker) & Klaus J. Boller (Speaker)

  21 Jun 2015

  Activity: Talk or presentation › Oral presentation

• Nonlinear optics in silicon nitride waveguides

  J.P. Epping (Speaker), T. Hellwig (Speaker), R. Mateman (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Carsten Fallnich (Speaker) & Klaus J. Boller (Speaker)

  22 Sep 2014

  Activity: Talk or presentation › Oral presentation

• Enabling supercontinuum generation in Si3N4 waveguides

  J.P. Epping (Speaker), T. Hellwig (Speaker), R. Mateman (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Carsten Fallnich (Speaker) & Klaus J. Boller (Speaker)

  7 Oct 2014

  Activity: Talk or presentation › Oral presentation

• Supercontinuum generation in thick silicon nitride waveguides

  J.P. Epping (Speaker), T. Hellwig (Speaker), R. Mateman (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Carsten Fallnich (Speaker) & Klaus J. Boller (Speaker)

  24 Aug 2014

  Activity: Talk or presentation › Oral presentation