Activities per year
Activities
Damage processes in ruthenium thin films induced by femtosecond laser pulses for a wide range of incident photon energy
Igor Milov (Contributor), Igor A. Makhotkin (Speaker), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)21 Oct 2019
Activity: Talk or presentation › Oral presentation
Structural analysis of ion polished W/Si soft X-ray multilayer reflectors
Roman Medvedev (Contributor), Konstantin Nikolaev (Contributor), Andrey Zameshin (Contributor), Dennis IJpes (Contributor), Igor A. Makhotkin (Contributor), Sergey N. Yakunin (Contributor), Andrey Yakshin (Speaker), Fred Bijkerk (Contributor)21 Oct 2019 → 23 Oct 2019
Activity: Talk or presentation › Oral presentation
Damage processes in ruthenium thin films induced by femtosecond laser pulses with varying incident photon energy
Igor Milov (Contributor), Igor A. Makhotkin (Speaker), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)27 May 2019
Activity: Talk or presentation › Oral presentation
Lithography machine in-line broadband spectrum metrology and feedback control system
Fei Liu (Speaker), Dries Smeets (Contributor), Sjoerd Huang (Contributor), Andrei Yakunin (Contributor), Peter Havermans (Contributor), Rene Oesterholt (Contributor), Muharrem Bayraktar (Contributor), Fred Bijkerk (Contributor)10 Jun 2019 → 13 Jun 2019
Activity: Talk or presentation › Oral presentation
Research at the Industrial Focus Group XUV Optics
Muharrem Bayraktar (Speaker)10 Apr 2019
Activity: Talk or presentation › Oral presentation
Active Piezoelectric Photonic Integrated Circuits (APPICs)
Muharrem Bayraktar (Speaker)5 Jun 2019
Activity: Talk or presentation › Oral presentation
Unexpectedly Large Radiative Emission between Highly-excited States in Sn Laser-produced Plasma
James Colgan (Invited speaker), Amanda Neukirch (Contributor), Francesco Torretti (Contributor), J. Sheil (Contributor), Ruben Schupp (Contributor), M M Basko (Contributor), Muharrem Bayraktar (Contributor), Randy Meijer (Contributor), S. Witte (Contributor), Wim Ubachs (Contributor), Ronnie Hoekstra (Contributor), Oscar Versolato (Contributor)4 Nov 2019
Activity: Talk or presentation › Oral presentation
Stress development of thin films monitored in-situ by cantilever laser deflection and low energy ion scattering
Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), Johan Reinink (Contributor), F. Bijkerk (Contributor)11 Dec 2018
Activity: Talk or presentation › Oral presentation
Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold
Igor A. Makhotkin (Speaker), Hartmut Enkisch (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Gosse de Vries (Contributor), Michael Störmer (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), Marek Jurek (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), E. Ploenjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor)6 Feb 2018
Activity: Talk or presentation › Oral presentation
Photon-induced damage processes in Ruthenium thin films developed for Free Electron Laser Optics
Igor Milov (Contributor), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), V.V. Medvedev (Contributor), Eric Louis (Speaker), F. Bijkerk (Contributor)9 Nov 2018
Activity: Talk or presentation › Oral presentation
Correlated lateral density fluctuations in the Si layers of a W/Si multilayer revealed by GISAXS
Konstantin Nikolaev (Contributor), Sergey N. Yakunin (Contributor), Igor A. Makhotkin (Speaker), Joris de la Rie (Contributor), Roman Medvedev (Contributor), A.V. Rogachev (Contributor), C.P. Hendrikx (Contributor), M. Gateshki (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), F. Bijkerk (Contributor)8 Nov 2018
Activity: Talk or presentation › Oral presentation
Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems
Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)7 Nov 2018
Activity: Talk or presentation › Oral presentation
Single-shot ablation of Ru thin films induced by fs EUV Free-Electron Laser
Igor Milov (Speaker), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), Vladimir Lipp (Speaker), N. Inogamov (Contributor), V. Zhakhovsky (Contributor), V. Khokhlov (Contributor), Viacheslav Medvedev (Contributor), Eric Louis (Contributor), Fred Bijkerk (Contributor)19 Jun 2018
Activity: Talk or presentation › Oral presentation
Advancing thin film X-ray reflectivity data analysis
Igor A. Makhotkin (Speaker), Sergey N. Yakunin (Contributor), J.F. Woitok (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), F. Bijkerk (Contributor)12 Dec 2018
Activity: Talk or presentation › Oral presentation
Atomic oxygen diffusion in ultrathin transition metal oxide films at room temperature
Cristiane Regina Stilhano Vilas Boas (Speaker), J.M. Sturm (Contributor), F. Bijkerk (Contributor)7 Nov 2018 → 9 Nov 2018
Activity: Talk or presentation › Oral presentation
Nanometer scale oxidation and oxygen diffusion at low temperature: Static and Isotope Exchange Depth Profile
Cristiane Regina Stilhano Vilas Boas (Speaker), J.M. Sturm (Contributor), F. Bijkerk (Contributor)31 May 2018
Activity: Talk or presentation › Oral presentation
Unraveling extreme ultraviolet (EUV) light source spectra
Muharrem Bayraktar (Speaker), Caspar Bruineman (Contributor), Boris Vratzov (Contributor), Hubertus M.J. Bastiaens (Contributor), F. Bijkerk (Contributor)24 Sep 2018
Activity: Talk or presentation › Oral presentation
Adaptive multilayer mirrors based on piezoelectric actuators for XUV lithography
Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)12 Dec 2018
Activity: Talk or presentation › Oral presentation
Simulations of Damage of Ru Thin Films Induced by Single-Shot fs EUV FEL Pulses
Igor Milov (Speaker), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), N. Inogamov (Contributor), V. Zhakhovsky (Contributor), Viacheslav Medvedev (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)27 Mar 2018
Activity: Talk or presentation › Oral presentation
Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold
Igor A. Makhotkin (Speaker), Hartmut Enkisch (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Gosse de Vries (Contributor), Michael Störmer (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), Marek Jurek (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), E. Ploenjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor)26 Mar 2018
Activity: Talk or presentation › Oral presentation
Matrix effects involving quasiresonant neutralization from valence band in Low Energy Ion Scattering
Andrey Zameshin (Contributor), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Cristiane Regina Stilhano Vilas Boas (Contributor), F. Bijkerk (Contributor)1 Jul 2018 → 6 Jul 2018
Activity: Talk or presentation › Oral presentation
Tailoring the spectral properties of extreme UV multilayer optics
V.V. Medvedev (Speaker), Andrey Yakshin (Contributor), F. Bijkerk (Contributor)17 Jan 2017
Activity: Talk or presentation › Oral presentation
Broadband spectroscopy of EUV light sources using a transmission grating spectrometer
Muharrem Bayraktar (Speaker), Francesco Torretti (Contributor), Ruben Schupp (Contributor), Oscar Versolato (Contributor), Fei Liu (Contributor), Caspar Bruineman (Contributor), Boris Vratzov (Contributor), Hubertus M.J. Bastiaens (Contributor), F. Bijkerk (Contributor)6 Nov 2017 → 8 Nov 2017
Activity: Talk or presentation › Oral presentation
Ruthenium growth on B, C and B4C studied by LEIS
Andrey Zameshin (Speaker), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Frederik Bijkerk (Contributor)8 Aug 2017
Activity: Talk or presentation › Oral presentation
In vacuo low-energy ions scattering studies of ZrO2 growth by magnetron sputtering
J.M. Sturm (Speaker), Roger Coloma Ribera (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), Frederik Bijkerk (Contributor)30 Oct 2017 → 3 Nov 2017
Activity: Talk or presentation › Oral presentation
Status of multilayer reflective optics
Eric Louis (Speaker), H. Enkisch (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Igor A. Makhotkin (Contributor), Christopher James Lee (Contributor), Stephan Müllender (Contributor), F. Bijkerk (Contributor)28 Feb 2017
Activity: Talk or presentation › Oral presentation
Ruthenium growth on B, C and B4C: combining surface and in-depth information from LEIS
Andrey Zameshin (Speaker), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Frederik Bijkerk (Contributor)11 May 2017
Activity: Talk or presentation › Oral presentation
Model independent approach for the analysis of GIXR data from thin films
Igor Alexandrovich Makhotkin (Speaker), Sergey N. Yakunin (Contributor), J.F. Woitok (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), E.J. Reuvekamp (Contributor), Frederik Bijkerk (Contributor)13 Dec 2017
Activity: Talk or presentation › Oral presentation
Capabilities of model free X-ray standing wave analysis of periodic multilayer structures
I.A. Makhotkin (Speaker), S.N. Yakunin (Contributor), C.P. Hendrikx (Contributor), A. Chandrasekaran (Contributor), Andrey Zameshin (Contributor), A. Zarkadas (Contributor), M. Gateshki (Contributor), R.W.E. van de Kruijs (Contributor), E. Reuvekamp (Contributor), F. Bijkerk (Contributor)22 May 2017
Activity: Talk or presentation › Oral presentation
Ruthenium growth on B, C and B4C studied by LEIS
Andrey Zameshin (Speaker), Andrey E. Yakshin (Contributor), Marko Sturm (Contributor), Fred Bijkerk (Contributor)23 May 2017
Activity: Talk or presentation › Oral presentation
X-ray Standing Wave Measurements at the Free-Electron Laser FLASH
G. Mercurio (Contributor), Igor Alexandrovich Makhotkin (Contributor), Igor Milov (Contributor), Y-Y. Kim (Contributor), I. Zaluzhnyy (Contributor), S. Dziarzhytski (Speaker), L. Wenthaus (Contributor), Frederik Bijkerk (Contributor), Ivan Vartaniants (Speaker), W. Wurth (Contributor)15 Sep 2017 → 17 Sep 2017
Activity: Talk or presentation › Oral presentation
EUVL optics for Free Electron Laser sources: damage threshold studies and the use of adjusted wavelengths
Eric Louis (Speaker), Andrey Zameshin (Contributor), Andrey Yakshin (Contributor), Igor Alexandrovich Makhotkin (Contributor), Frederik Bijkerk (Contributor)7 Nov 2017
Activity: Talk or presentation › Oral presentation
Single-shot damage of Ru thin film induced by XUV FEL fs pulses
Igor Milov (Speaker), Igor Alexandrovich Makhotkin (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), R. Keim (Contributor), H.A.G.M. van Wolferen (Contributor), Eric Louis (Contributor), Frederik Bijkerk (Contributor)25 Sep 2017
Activity: Talk or presentation › Oral presentation
Model independent approach for the analysis of GIXR data from thin films
I.A. Makhotkin (Contributor), S.N. Yakunin (Speaker), J.F. Woitok (Contributor), R.W.E. van de Kruijs (Contributor), E. Reuvekamp (Contributor), F. Bijkerk (Contributor)23 May 2017
Activity: Talk or presentation › Oral presentation
High efficiency multilayer coated blazed grating for tender X-rays
A. Sokolov (Speaker), F. Senf (Speaker), Frederik Bijkerk (Speaker), F. Eggenstein (Speaker), G. Gwalt (Speaker), Qiushi Huang (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), O. Kutz (Speaker), S. Lemke (Speaker), Eric Louis (Speaker), M. Mertin (Speaker), I. Packe (Speaker), I. Rudolph (Speaker), F. Schafers (Speaker), F. Siewert (Speaker), Jacobus Marinus Sturm (Speaker), C. Waberski (Speaker), Z. Wang (Speaker), J. Wolf (Speaker), T. Zeschke (Speaker), A. Erko (Speaker)10 Nov 2016
Activity: Talk or presentation › Oral presentation
XUV Spectrometer for broadband spectral measurements
Muharrem Bayraktar (Speaker), C. Bruineman (Speaker), B. Vratzov (Speaker), Hubertus M.J. Bastiaens (Speaker), Frederik Bijkerk (Speaker)4 May 2016
Activity: Talk or presentation › Oral presentation
Ultra-wide super continuum generation in Si3N4/SiO2 waveguides
Petrus J.M. van der Slot (Speaker), J.P. Epping (Speaker), Christopher James Lee (Speaker), Klaus J. Boller (Speaker), T. Hellwig (Speaker), Carsten Fallnich (Speaker), Rene Heideman (Speaker), Arne Leinse (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker)25 Apr 2016
Activity: Talk or presentation › Oral presentation
Insitu Stress Measurement of Thin Film and Multilayer Deposition
Johan Reinink (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Frederik Bijkerk (Contributor)3 Oct 2016
Activity: Talk or presentation › Oral presentation
Basic principles of single-order soft x-ray multilayer diffraction gratings
I.V. Kozhevnikov (Speaker), X. Yang (Speaker), R. van der Meer (Speaker), Qingxu Huang (Speaker), Klaus J. Boller (Speaker), Hubertus M.J. Bastiaens (Speaker), Frederik Bijkerk (Speaker), Zhouhong Wang (Speaker)15 Oct 2016
Activity: Talk or presentation › Oral presentation
Ultra-broadband Supercontinuum Generation at Telecommunication Wavelengths in Dispersion Engineered Stoichiometric Si3N4 Waveguides
F. Schepers (Speaker), M.A. Porcel (Speaker), J.P. Epping (Speaker), T. Hellwig (Speaker), M. Hoekman (Speaker), R. Mateman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), A. van Rees (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), R. Schmidt (Speaker), R. Bratschitsch (Speaker), Klaus J. Boller (Speaker), Carsten Fallnich (Speaker)5 Jun 2016
Activity: Talk or presentation › Oral presentation
Narrow-band Zr-coated Ni/Si multilayer Borrmann filter for 13.5 nm monitoring
J.L.P. Barreaux (Speaker), I.V. Kozhevnikov (Speaker), Hubertus M.J. Bastiaens (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), Frederik Bijkerk (Speaker), Klaus J. Boller (Speaker)13 Oct 2015
Activity: Talk or presentation › Oral presentation
Adaptive optics at the angstrom scale: from discrete to continuous surface manipulation
Benjamin Wylie- Van Eerd (Speaker), B. Krijnen (Speaker), Frederik Bijkerk (Speaker), Augustinus J.H.M. Rijnders (Speaker), Eric Louis (Speaker)11 Aug 2015
Activity: Talk or presentation › Oral presentation
Simultaneous supercontinuum and third harmonic generation in Si3N4 waveguides
J.P. Epping (Speaker), T. Hellwig (Speaker), R. Mateman (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Carsten Fallnich (Speaker), Klaus J. Boller (Speaker)21 Jun 2015
Activity: Talk or presentation › Oral presentation
Supercontinuum Generation in Si3N4 Waveguides
Youwen Fan (Speaker), J.P. Epping (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Klaus J. Boller (Speaker)19 Jun 2015
Activity: Talk or presentation › Oral presentation
Large-Alphabet Quantum Key Distribution Using Spatially Encoded Light
Tristan Tentrup (Speaker), Peter Hooijschuur (Contributor), Reinier van der Meer (Contributor), Georgios Ctistis (Contributor), Pepijn Pinkse (Contributor)27 Mar 2015
Activity: Talk or presentation › Oral presentation
Supercontinuum generation in thick silicon nitride waveguides
J.P. Epping (Speaker), T. Hellwig (Speaker), R. Mateman (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Carsten Fallnich (Speaker), Klaus J. Boller (Speaker)24 Aug 2014
Activity: Talk or presentation › Oral presentation
Enabling supercontinuum generation in Si3N4 waveguides
J.P. Epping (Speaker), T. Hellwig (Speaker), R. Mateman (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Carsten Fallnich (Speaker), Klaus J. Boller (Speaker)7 Oct 2014
Activity: Talk or presentation › Oral presentation
Nonlinear optics in silicon nitride waveguides
J.P. Epping (Speaker), T. Hellwig (Speaker), R. Mateman (Speaker), A. van Rees (Speaker), M. Hoekman (Speaker), Arne Leinse (Speaker), Rene Heideman (Speaker), Petrus J.M. van der Slot (Speaker), Christopher James Lee (Speaker), Carsten Fallnich (Speaker), Klaus J. Boller (Speaker)22 Sep 2014
Activity: Talk or presentation › Oral presentation
Collector mirror design to separate the stray 10.6 μm CO2 laser light from the EUV light at the intermediate focus,
Muharrem Bayraktar (Speaker), F.A. van Goor (Speaker), Klaus J. Boller (Speaker), Frederik Bijkerk (Speaker)6 Oct 2013
Activity: Talk or presentation › Oral presentation
Smart Multilayer Interactive Optics for Lithography at Extreme UV Wavelenghts
F.A. van Goor (Speaker), Frederik Bijkerk (Speaker)30 Oct 2013
Activity: Talk or presentation › Oral presentation