XUV Optics

Activities

Activities per year 2010 2012 2017 2018 2023 2024

• 94 Oral presentation
• 18 Invited talk
• 1 Organising a conference, workshop, ...

Activities per year

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• The effect of W thickness on the interface Si-on-W, a LEIS and TEM study

  Valpreda, A. (Speaker)

  4 Jun 2024

  Activity: Talk or presentation › Oral presentation

• Work-Function-Dependent Reduction of Transition Metal Nitrides/Oxides (TMNs/TMOs) in Hydrogen Radicals (H*)

  Rehman, A. (Speaker)

  17 Jun 2024

  Activity: Talk or presentation › Oral presentation

• Grazing Emission and grazing incidence X-ray fluorescence methods for waveguided structures

  Terentev, T. (Speaker)

  24 Jun 2024 → 30 Jun 2024

  Activity: Talk or presentation › Oral presentation

• Infrared emissivity of MoxSiy thin films

  Baskakov, A. (Speaker), van de Kruijs, R. W. E. (Contributor), Golsanamlou, Z. (Contributor), Bokdam, M. (Contributor), Sturm, M. (Contributor) & Ackermann, M. D. (Contributor)

  24 Jan 2024

  Activity: Talk or presentation › Oral presentation

• Thermally stable MoNx/Si1-xNx multilayer as a substrate for XSW study of SMSI

  Tiwari, A. (Speaker), Monai, M. (Contributor), Matveevskii, K. (Contributor), Yakunin, S. N. (Contributor), Ackermann, M. D. (Contributor), Mandemaker, L. D. B. (Contributor), Meirer, F. (Contributor) & Makhotkin, I. A. (Contributor)

  12 Oct 2023

  Activity: Talk or presentation › Oral presentation

• Characterization of strong metal–support interaction (SMSI) using X-ray standing waves (XSW)

  Tiwari, A. (Speaker), Monai, M. (Contributor), Matveevskii, K. (Contributor), Yakunin, S. N. (Contributor), Ackermann, M. D. (Contributor), Meirer, F. (Contributor) & Makhotkin, I. A. (Contributor)

  3 Apr 2023 → 5 Apr 2023

  Activity: Talk or presentation › Oral presentation

• Laser-induced heating and surface modification in ruthenium thin films

  Akhmetov, F. (Speaker)

  25 Apr 2023

  Activity: Talk or presentation › Oral presentation

• Development of thin film fracture testing technique

  Shafikov, A. (Speaker)

  25 Sept 2023

  Activity: Talk or presentation › Oral presentation

• The interface study of photoresist/underlayer using hybrid x-ray reflectivity and x-ray standing wave approach

  Tiwari, A. (Speaker), Fallica, R. (Contributor), Ackermann, M. D. (Contributor) & Makhotkin, I. A. (Contributor)

  15 Nov 2023

  Activity: Talk or presentation › Oral presentation

• Can we resolve buried interfaces by Low Energy Ion Scattering?

  Valpreda, A. (Speaker)

  5 Apr 2023

  Activity: Talk or presentation › Oral presentation

• Can we resolve buried interfaces by LEIS?

  Valpreda, A. (Speaker)

  4 May 2023

  Activity: Talk or presentation › Oral presentation

• Characterization of Strong Metal-Support Interaction (SMSI) Using X-ray Standing Wave

  Tiwari, A. (Speaker), Monai, M. (Contributor), Matveevskii, K. (Contributor), Yakunin, S. N. (Contributor), Ackermann, M. D. (Contributor), Mandemaker, L. D. B. (Contributor), Meirer, F. (Contributor) & Makhotkin, I. A. (Contributor)

  7 Sept 2023

  Activity: Talk or presentation › Oral presentation

• Fracture testing of free-standing thin films: drawbridge technique

  Shafikov, A. (Speaker)

  13 Jun 2022

  Activity: Talk or presentation › Oral presentation

• Low Energy Ion Interactions with Transition Metal Films: ballistic and Diffusive Transport Processes

  Phadke, P. (Speaker), Sturm, M. (Contributor), van de Kruijs, R. W. E. (Contributor), Bijkerk, F. (Contributor) & Ackermann, M. D. (Contributor)

  11 Jul 2022

  Activity: Talk or presentation › Oral presentation

• Charge exchange between He ions and solid targets: the dependence on target electronic structure revisited

  Sturm, M. (Speaker), Zameshin, A. (Contributor), Lokhorst, N. (Contributor) & Ackermann, M. D. (Contributor)

  19 May 2022

  Activity: Talk or presentation › Oral presentation

• Full spectrum [ranging 5-265nm] of a tin microdroplet laser-produced plasma light source

  Bouza, Z. (Speaker), Scheers, J. (Contributor), Schupp, R. (Contributor), Behnke, L. (Contributor), Mostafa, Y. (Contributor), Mazzotta, Z. (Contributor), Sheil, J. (Contributor), Byers, J. (Contributor), Ubachs, W. (Contributor), Hoekstra, R. (Contributor), Bayraktar, M. (Contributor) & Versolato, O. (Contributor)

  26 Jan 2022

  Activity: Talk or presentation › Oral presentation

• LEIS characterization of Si/Transition Metal structures by simulation of LEIS tails

  Valpreda, A. (Speaker), Sturm, M. (Contributor), Yakshin, A. (Contributor) & Ackermann, M. (Contributor)

  19 May 2022

  Activity: Talk or presentation › Oral presentation

• Drawbridge technique for fracture testing of freestanding ultrathin films

  Shafikov, A. (Speaker)

  26 Jan 2022

  Activity: Talk or presentation › Oral presentation

• Extreme ultraviolet light from tin plasma driven by 2-μm-wavelength laser light

  Behnke, L. (Speaker), Schupp, R. (Contributor), Lassise, A. (Contributor), Bouza, Z. (Contributor), Mazzotta, Z. (Contributor), Sheil, J. (Contributor), Bayraktar, M. (Contributor), Hoekstra, R. (Contributor), Ubachs, W. (Contributor) & Versolato, O. (Contributor)

  20 Jan 2021

  Activity: Talk or presentation › Oral presentation

• Fully-calibrated Sn LPP EUV Source Spectrum from 5.5 nm – 265 nm

  Byers, J. (Speaker), Bayraktar, M. (Contributor), Bouza, Z. (Speaker), Scheers, J. (Speaker), Schupp, R. (Speaker), Mostafa, Y. (Speaker), Behnke, L. (Speaker), Mazzotta, Z. (Speaker), Sheil, J. (Speaker), Ubachs, W. (Speaker), Hoekstra, R. (Speaker) & Versolato, O. (Speaker)

  25 Oct 2021

  Activity: Talk or presentation › Oral presentation

• Thin films and nano-gratings study using X-ray standing waves excited by an in-lab X-ray source

  Matveevskii, K. (Speaker), Nikolaev, K. (Contributor), Yakunin, S. N. (Contributor), Fallica, R. (Contributor), Ackermann, M. D. (Contributor) & Makhotkin, I. A. (Contributor)

  19 Oct 2021

  Activity: Talk or presentation › Oral presentation

• Sputtering and ion transport of low energy reactive ions interacting with transition metal surfaces

  Phadke, P. (Speaker)

  19 Jan 2021

  Activity: Talk or presentation › Oral presentation

• Dynamics of ultrafast melting in laser-irradiated ruthenium thin films

  Akhmetov, F. (Speaker), Milov, I. (Contributor), Medvedev, N. (Contributor), Semin, S. (Contributor), Formisano, F. (Contributor), Kimel, A. (Contributor), Makhotkin, I. A. (Contributor) & Ackermann, M. D. (Contributor)

  4 Oct 2021

  Activity: Talk or presentation › Oral presentation

• Similarity in Ru damage induced by photons with different energy: From visible light to hard X-rays

  Milov, I. (Speaker), Lipp, V. (Contributor), Ilnitsky, D. (Contributor), Medvedev, N. (Contributor), Migdal, K. (Contributor), Zhakhovsky, V. (Contributor), Khokhlov, V. (Contributor), Petrov, Y. (Contributor), Inogamov, N. (Contributor), Semin, S. (Contributor), Kimel, A. (Contributor), Ziaja, B. (Contributor), Medvedev, V. (Contributor), Makhotkin, I. A. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  21 Jan 2020 → 22 Jan 2020

  Activity: Talk or presentation › Oral presentation

• Adaptive piezoelectric actuators for XUV wavelengths and scaling of hysteresis

  Lucke, P. (Speaker), Bayraktar, M. (Contributor), Nematollahi, M. (Contributor), Houwman, E. (Contributor), Birkhölzer, Y. A. (Contributor), Yakshin, A. (Contributor), Rijnders, G. (Contributor) & Bijkerk, F. (Contributor)

  22 Jan 2020

  Activity: Talk or presentation › Oral presentation

• Characterization of Tin Plasma Driven by High Energy, 2-μm-wavelength Light

  Behnke, L. (Speaker), Schupp, R. (Contributor), Lassise, A. (Contributor), Bouza, Z. (Contributor), Sheil, J. (Contributor), Bayraktar, M. (Contributor), Hoekstra, R. (Contributor), Ubachs, W. (Contributor) & Versolato, O. (Contributor)

  5 Nov 2020

  Activity: Talk or presentation › Oral presentation

• Structural analysis of ion polished W/Si soft X-ray multilayer reflectors

  Medvedev, R. (Contributor), Nikolaev, K. (Contributor), Zameshin, A. (Contributor), IJpes, D. (Contributor), Makhotkin, I. A. (Contributor), Yakunin, S. N. (Contributor), Yakshin, A. (Speaker) & Bijkerk, F. (Contributor)

  21 Oct 2019 → 23 Oct 2019

  Activity: Talk or presentation › Oral presentation

• Active Piezoelectric Photonic Integrated Circuits (APPICs)

  Bayraktar, M. (Speaker)

  5 Jun 2019

  Activity: Talk or presentation › Oral presentation

• Damage processes in ruthenium thin films induced by femtosecond laser pulses with varying incident photon energy

  Milov, I. (Contributor), Makhotkin, I. A. (Speaker), Medvedev, N. (Contributor), lipp, V. (Contributor), Ziaja, B. (Contributor), Khokhlov, V. (Contributor), Zhakhovsky, V. (Contributor), Petrov, Y. (Contributor), Shepelev, V. (Contributor), Ilnitsky, D. (Contributor), Migdal, K. (Contributor), Inogamov, N. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  27 May 2019

  Activity: Talk or presentation › Oral presentation

• Lithography machine in-line broadband spectrum metrology and feedback control system

  Liu, F. (Speaker), Smeets, D. (Contributor), Huang, S. (Contributor), Yakunin, A. (Contributor), Havermans, P. (Contributor), Oesterholt, R. (Contributor), Bayraktar, M. (Contributor) & Bijkerk, F. (Contributor)

  10 Jun 2019 → 13 Jun 2019

  Activity: Talk or presentation › Oral presentation

• Research at the Industrial Focus Group XUV Optics

  Bayraktar, M. (Speaker)

  10 Apr 2019

  Activity: Talk or presentation › Oral presentation

• Unexpectedly Large Radiative Emission between Highly-excited States in Sn Laser-produced Plasma

  Colgan, J. (Invited speaker), Neukirch, A. (Contributor), Torretti, F. (Contributor), Sheil, J. (Contributor), Schupp, R. (Contributor), Basko, M. M. (Contributor), Bayraktar, M. (Contributor), Meijer, R. (Contributor), Witte, S. (Contributor), Ubachs, W. (Contributor), Hoekstra, R. (Contributor) & Versolato, O. (Contributor)

  4 Nov 2019

  Activity: Talk or presentation › Oral presentation

• Damage processes in ruthenium thin films induced by femtosecond laser pulses for a wide range of incident photon energy

  Milov, I. (Contributor), Makhotkin, I. A. (Speaker), Medvedev, N. (Contributor), lipp, V. (Contributor), Ziaja, B. (Contributor), Khokhlov, V. (Contributor), Zhakhovsky, V. (Contributor), Petrov, Y. (Contributor), Shepelev, V. (Contributor), Ilnitsky, D. (Contributor), Migdal, K. (Contributor), Inogamov, N. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  21 Oct 2019

  Activity: Talk or presentation › Oral presentation

• Single-shot ablation of Ru thin films induced by fs EUV Free-Electron Laser

  Milov, I. (Speaker), Makhotkin, I. A. (Contributor), Sobierajski, R. (Contributor), Medvedev, N. (Contributor), Lipp, V. (Speaker), Inogamov, N. (Contributor), Zhakhovsky, V. (Contributor), Khokhlov, V. (Contributor), Medvedev, V. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  19 Jun 2018

  Activity: Talk or presentation › Oral presentation

• Advancing thin film X-ray reflectivity data analysis

  Makhotkin, I. A. (Speaker), Yakunin, S. N. (Contributor), Woitok, J. F. (Contributor), van de Kruijs, R. W. E. (Contributor) & Bijkerk, F. (Contributor)

  12 Dec 2018

  Activity: Talk or presentation › Oral presentation

• Simulations of Damage of Ru Thin Films Induced by Single-Shot fs EUV FEL Pulses

  Milov, I. (Speaker), Makhotkin, I. A. (Contributor), Sobierajski, R. (Contributor), Medvedev, N. (Contributor), lipp, V. (Contributor), Inogamov, N. (Contributor), Zhakhovsky, V. (Contributor), Medvedev, V. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  27 Mar 2018

  Activity: Talk or presentation › Oral presentation

• Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold

  Makhotkin, I. A. (Speaker), Enkisch, H. (Contributor), Sobierajski, R. (Contributor), Chalupský, J. (Contributor), Tiedtke, K. (Contributor), de Vries, G. (Contributor), Störmer, M. (Contributor), Scholze, F. (Contributor), Siewert, F. (Contributor), van de Kruijs, R. W. E. (Contributor), Milov, I. (Contributor), Louis, E. (Contributor), Yatsyna, I. (Contributor), Jurek, M. (Contributor), Juha, L. (Contributor), Hájková, V. (Contributor), Vozda, V. (Contributor), Burian, T. (Contributor), Saksl, K. (Contributor), Faatz, B. (Contributor), Keitel, B. (Contributor), Ploenjes, E. (Contributor), Schreiber, S. (Contributor), Toleikis, S. (Contributor), Loch, R. A. (Contributor), Hermann, M. (Contributor), Strobel, S. (Contributor) & Nienhuys, H. K. (Contributor)

  26 Mar 2018

  Activity: Talk or presentation › Oral presentation

• Adaptive multilayer mirrors based on piezoelectric actuators for XUV lithography

  Nematollahi, M. (Speaker), Lucke, P. (Contributor), Bayraktar, M. (Contributor), Hild, K. (Contributor), Gruner, T. (Contributor), Yakshin, A. (Contributor), Rijnders, A. J. H. M. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  12 Dec 2018

  Activity: Talk or presentation › Oral presentation

• Stress development of thin films monitored in-situ by cantilever laser deflection and low energy ion scattering

  van de Kruijs, R. W. E. (Speaker), Reinink, J. (Contributor) & Bijkerk, F. (Contributor)

  11 Dec 2018

  Activity: Talk or presentation › Oral presentation

• Correlated lateral density fluctuations in the Si layers of a W/Si multilayer revealed by GISAXS

  Nikolaev, K. (Contributor), Yakunin, S. N. (Contributor), Makhotkin, I. A. (Speaker), de la Rie, J. (Contributor), Medvedev, R. (Contributor), Rogachev, A. V. (Contributor), Hendrikx, C. P. (Contributor), Gateshki, M. (Contributor), van de Kruijs, R. W. E. (Contributor), Yakshin, A. (Contributor) & Bijkerk, F. (Contributor)

  8 Nov 2018

  Activity: Talk or presentation › Oral presentation

• Photon-induced damage processes in Ruthenium thin films developed for Free Electron Laser Optics

  Milov, I. (Contributor), Makhotkin, I. A. (Contributor), Sobierajski, R. (Contributor), Medvedev, N. (Contributor), lipp, V. (Contributor), Ziaja, B. (Contributor), Khokhlov, V. (Contributor), Zhakhovsky, V. (Contributor), Petrov, Y. (Contributor), Shepelev, V. (Contributor), Ilnitsky, D. (Contributor), Migdal, K. (Contributor), Inogamov, N. (Contributor), Medvedev , V. V. (Contributor), Louis, E. (Speaker) & Bijkerk, F. (Contributor)

  9 Nov 2018

  Activity: Talk or presentation › Oral presentation

• Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold

  Makhotkin, I. A. (Speaker), Enkisch, H. (Contributor), Sobierajski, R. (Contributor), Chalupský, J. (Contributor), Tiedtke, K. (Contributor), de Vries, G. (Contributor), Störmer, M. (Contributor), Scholze, F. (Contributor), Siewert, F. (Contributor), van de Kruijs, R. W. E. (Contributor), Milov, I. (Contributor), Louis, E. (Contributor), Yatsyna, I. (Contributor), Jurek, M. (Contributor), Juha, L. (Contributor), Hájková, V. (Contributor), Vozda, V. (Contributor), Burian, T. (Contributor), Saksl, K. (Contributor), Faatz, B. (Contributor), Keitel, B. (Contributor), Ploenjes, E. (Contributor), Schreiber, S. (Contributor), Toleikis, S. (Contributor), Loch, R. A. (Contributor), Hermann, M. (Contributor), Strobel, S. (Contributor) & Nienhuys, H. K. (Contributor)

  6 Feb 2018

  Activity: Talk or presentation › Oral presentation

• Unraveling extreme ultraviolet (EUV) light source spectra

  Bayraktar, M. (Speaker), Bruineman, C. (Contributor), Vratzov, B. (Contributor), Bastiaens, H. M. J. (Contributor) & Bijkerk, F. (Contributor)

  24 Sept 2018

  Activity: Talk or presentation › Oral presentation

• Nanometer scale oxidation and oxygen diffusion at low temperature: Static and Isotope Exchange Depth Profile

  Stilhano Vilas Boas, C. R. (Speaker), Sturm, J. M. (Contributor) & Bijkerk, F. (Contributor)

  31 May 2018

  Activity: Talk or presentation › Oral presentation

• Atomic oxygen diffusion in ultrathin transition metal oxide films at room temperature

  Stilhano Vilas Boas, C. R. (Speaker), Sturm, J. M. (Contributor) & Bijkerk, F. (Contributor)

  7 Nov 2018 → 9 Nov 2018

  Activity: Talk or presentation › Oral presentation

• Matrix effects involving quasiresonant neutralization from valence band in Low Energy Ion Scattering

  Zameshin, A. (Contributor), Yakshin, A. (Contributor), Sturm, J. M. (Contributor), Stilhano Vilas Boas, C. R. (Contributor) & Bijkerk, F. (Contributor)

  1 Jul 2018 → 6 Jul 2018

  Activity: Talk or presentation › Oral presentation

• Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems

  Nematollahi, M. (Speaker), Lucke, P. (Contributor), Bayraktar, M. (Contributor), Hild, K. (Contributor), Gruner, T. (Contributor), Yakshin, A. (Contributor), Rijnders, A. J. H. M. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  7 Nov 2018

  Activity: Talk or presentation › Oral presentation

• Model independent approach for the analysis of GIXR data from thin films

  Makhotkin, I. A. (Contributor), Yakunin, S. N. (Speaker), Woitok, J. F. (Contributor), van de Kruijs, R. W. E. (Contributor), Reuvekamp, E. (Contributor) & Bijkerk, F. (Contributor)

  23 May 2017

  Activity: Talk or presentation › Oral presentation

• Capabilities of model free X-ray standing wave analysis of periodic multilayer structures

  Makhotkin, I. A. (Speaker), Yakunin, S. N. (Contributor), Hendrikx, C. P. (Contributor), Chandrasekaran, A. (Contributor), Zameshin, A. (Contributor), Zarkadas, A. (Contributor), Gateshki, M. (Contributor), van de Kruijs, R. W. E. (Contributor), Reuvekamp, E. (Contributor) & Bijkerk, F. (Contributor)

  22 May 2017

  Activity: Talk or presentation › Oral presentation

• X-ray Standing Wave Measurements at the Free-Electron Laser FLASH

  Mercurio, G. (Contributor), Makhotkin, I. A. (Contributor), Milov, I. (Contributor), Kim, Y.-Y. (Contributor), Zaluzhnyy, I. (Contributor), Dziarzhytski, S. (Speaker), Wenthaus, L. (Contributor), Bijkerk, F. (Contributor), Vartaniants, I. (Speaker) & Wurth, W. (Contributor)

  15 Sept 2017 → 17 Sept 2017

  Activity: Talk or presentation › Oral presentation