Activities 2010 2019

  • 68 Oral presentation
  • 8 Invited talk
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Oral presentation

Atomic oxygen diffusion in ultrathin transition metal oxide films at room temperature

Cristiane Regina Stilhano Vilas Boas (Speaker), J.M. Sturm (Contributor), F. Bijkerk (Contributor)
7 Nov 20189 Nov 2018

Activity: Talk or presentationOral presentation

Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems

Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
7 Nov 2018

Activity: Talk or presentationOral presentation

Photon-induced damage processes in Ruthenium thin films developed for Free Electron Laser Optics

Igor Milov (Contributor), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), V.V. Medvedev (Contributor), Eric Louis (Speaker), F. Bijkerk (Contributor)
9 Nov 2018

Activity: Talk or presentationOral presentation

Matrix effects involving quasiresonant neutralization from valence band in Low Energy Ion Scattering

Andrey Zameshin (Contributor), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Cristiane Regina Stilhano Vilas Boas (Contributor), F. Bijkerk (Contributor)
1 Jul 20186 Jul 2018

Activity: Talk or presentationOral presentation

Unraveling extreme ultraviolet (EUV) light source spectra

Muharrem Bayraktar (Speaker), Caspar Bruineman (Contributor), Boris Vratzov (Contributor), Hubertus M.J. Bastiaens (Contributor), F. Bijkerk (Contributor)
24 Sep 2018

Activity: Talk or presentationOral presentation

Advancing thin film X-ray reflectivity data analysis

Igor A. Makhotkin (Speaker), Sergey N. Yakunin (Contributor), J.F. Woitok (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), F. Bijkerk (Contributor)
12 Dec 2018

Activity: Talk or presentationOral presentation

Correlated lateral density fluctuations in the Si layers of a W/Si multilayer revealed by GISAXS

Konstantin Nikolaev (Contributor), Sergey N. Yakunin (Contributor), Igor A. Makhotkin (Speaker), Joris de la Rie (Contributor), Roman Medvedev (Contributor), A.V. Rogachev (Contributor), C.P. Hendrikx (Contributor), M. Gateshki (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), F. Bijkerk (Contributor)
8 Nov 2018

Activity: Talk or presentationOral presentation

Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold

Igor A. Makhotkin (Speaker), Hartmut Enkisch (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Gosse de Vries (Contributor), Michael Störmer (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), Marek Jurek (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), E. Ploenjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor)
6 Feb 2018

Activity: Talk or presentationOral presentation

Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold

Igor A. Makhotkin (Speaker), Hartmut Enkisch (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Gosse de Vries (Contributor), Michael Störmer (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), Marek Jurek (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), E. Ploenjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor)
26 Mar 2018

Activity: Talk or presentationOral presentation

Simulations of Damage of Ru Thin Films Induced by Single-Shot fs EUV FEL Pulses

Igor Milov (Speaker), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), N. Inogamov (Contributor), V. Zhakhovsky (Contributor), Viacheslav Medvedev (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
27 Mar 2018

Activity: Talk or presentationOral presentation

Damage processes in ruthenium thin films induced by femtosecond laser pulses for a wide range of incident photon energy

Igor Milov (Contributor), Igor A. Makhotkin (Speaker), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
21 Oct 2019

Activity: Talk or presentationOral presentation

Damage processes in ruthenium thin films induced by femtosecond laser pulses with varying incident photon energy

Igor Milov (Contributor), Igor A. Makhotkin (Speaker), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
27 May 2019

Activity: Talk or presentationOral presentation

Structural analysis of ion polished W/Si soft X-ray multilayer reflectors

Roman Medvedev (Contributor), Konstantin Nikolaev (Contributor), Andrey Zameshin (Contributor), Dennis IJpes (Contributor), Igor A. Makhotkin (Contributor), Sergey N. Yakunin (Contributor), Andrey Yakshin (Speaker), Fred Bijkerk (Contributor)
21 Oct 201923 Oct 2019

Activity: Talk or presentationOral presentation

Lithography machine in-line broadband spectrum metrology and feedback control system

Fei Liu (Speaker), Dries Smeets (Contributor), Sjoerd Huang (Contributor), Andrei Yakunin (Contributor), Peter Havermans (Contributor), Rene Oesterholt (Contributor), Muharrem Bayraktar (Contributor), Fred Bijkerk (Contributor)
10 Jun 201913 Jun 2019

Activity: Talk or presentationOral presentation

Research at the Industrial Focus Group XUV Optics

Muharrem Bayraktar (Speaker)
10 Apr 2019

Activity: Talk or presentationOral presentation

Active Piezoelectric Photonic Integrated Circuits (APPICs)

Muharrem Bayraktar (Speaker)
5 Jun 2019

Activity: Talk or presentationOral presentation

Unexpectedly Large Radiative Emission between Highly-excited States in Sn Laser-produced Plasma

James Colgan (Invited speaker), Amanda Neukirch (Contributor), Francesco Torretti (Contributor), J. Sheil (Contributor), Ruben Schupp (Contributor), M M Basko (Contributor), Muharrem Bayraktar (Contributor), Randy Meijer (Contributor), S. Witte (Contributor), Wim Ubachs (Contributor), Ronnie Hoekstra (Contributor), Oscar Versolato (Contributor)
4 Nov 2019

Activity: Talk or presentationOral presentation