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Physics & Astronomy

General

mirrors
thin films
grazing incidence
free electron lasers
radiation
gratings
retarding
blisters
energy
damage
interactions
theses
pulses
cleaning
incidence
lasers
metals
standing waves
thermal stability
barrier layers
shot
waveguides
desorption
ellipsometry
passivity
simulation
purity
reticles
thresholds
bombardment
absorbers
absorbers (materials)
masks
metal surfaces
transition metals
x ray lasers
microscopy
beam splitters
infrared suppression
kinetics
x ray optics
molecular dynamics

Physics

reflectance
wavelengths
optics
ions
roughness
plasma jets
atoms
temperature
laser plasmas
laser beams
nitrogen ions
surface waves
hydrogen plasma
electrons
diffraction
photons

Engineering

lithography
x rays
coatings
ion scattering
interlayers
etching
graphene
photolithography
annealing
Bragg reflectors
broadband
contamination
light sources
bandwidth
sputtering
filters
polishing
antireflection coatings
magnetron sputtering
radiation sources
fabrication
pumps
tuning

Chemistry and Materials

laminates
hydrogen
ruthenium
molybdenum
oxidation
tin
carbon
silicon
oxides
silicon nitrides
nitrogen
oxygen
modulus of elasticity
yield point
argon
boron

Aerospace Sciences

extreme ultraviolet radiation
photoelectron spectroscopy
ultraviolet radiation

Engineering & Materials Science

Multilayers
Ions
Hydrogen
Plasmas
Thin films
Boron
Extreme ultraviolet lithography
Radiation
X rays
Wavelength
Ruthenium
Carbon
Substrates
Optics
Graphene
Ultraviolet radiation
Plasma sources
Etching
Coatings
X ray photoelectron spectroscopy
Free electron lasers
Masks
Ion bombardment
Temperature
Annealing
Lasers
Surface roughness
Tin
Laser pulses
Defects
Irradiation
Laser produced plasmas
Transmission electron microscopy
Carrier concentration
Nitridation
Mirrors
Electrons
Contamination
Metals
Ellipsometry
Nitrogen
Silicon
Photons
Lithography
Argon
Photodetectors
Molecular dynamics
Amorphous silicon
Amorphous carbon
Atoms
Light sources
Spectroscopy
Imaging techniques
Sputtering
Transition metals
Optical constants
Scattering
Temperature programmed desorption
Electrodes
Oxides
Crystalline materials
X ray diffraction
Carbon films
Adsorption
Vacancies
Erosion
Infrared spectroscopy
Topography
Oxygen
Ketones

Chemical Compounds

Multilayers
Hydrogen
Ions
Thin films
Boron
Graphite
X rays
Extreme ultraviolet lithography
Scattering
Carbon Monoxide
Plasmas
Metals
Substrates
Plasma sources
Nitrogen
Wavelength
Masks
Ruthenium
Radiation
Desorption
Nitridation
Argon
Etching
Laser pulses
Carrier concentration
Coatings
X ray photoelectron spectroscopy
Crystals
X ray absorption spectroscopy
Tin
Optics
Transmission electron microscopy
Optical constants
Annealing
Temperature
Lanthanum
Ion bombardment
Electrons
Defects
Laser produced plasmas
Lasers
Silicon
Molecules
Deuterium
Adsorption
Transition metals
Irradiation
Atoms
Lithography
Vacancies
Crystallites
Fluxes
Water
Spectroscopy
Photons
X ray absorption
Free electron lasers
Imaging techniques
Amorphous carbon
Gases
Carbon
Electrodes
Thermodynamic stability
X ray diffraction
Ketones
Oxygen