XUV Optics

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Physics & Astronomy

General

mirrors

thin films

grazing incidence

free electron lasers

radiation

gratings

retarding

blisters

energy

damage

interactions

theses

pulses

cleaning

incidence

lasers

metals

standing waves

thermal stability

barrier layers

shot

waveguides

desorption

ellipsometry

passivity

simulation

purity

reticles

thresholds

bombardment

absorbers

absorbers (materials)

masks

metal surfaces

transition metals

x ray lasers

microscopy

beam splitters

infrared suppression

kinetics

x ray optics

molecular dynamics

Physics

reflectance

wavelengths

optics

ions

roughness

plasma jets

atoms

temperature

laser plasmas

laser beams

nitrogen ions

surface waves

hydrogen plasma

electrons

diffraction

photons

Engineering

lithography

x rays

coatings

ion scattering

interlayers

etching

graphene

photolithography

annealing

Bragg reflectors

broadband

contamination

light sources

bandwidth

sputtering

filters

polishing

antireflection coatings

magnetron sputtering

radiation sources

fabrication

pumps

tuning

Chemistry and Materials

laminates

hydrogen

ruthenium

molybdenum

oxidation

tin

carbon

silicon

oxides

silicon nitrides

nitrogen

oxygen

modulus of elasticity

yield point

argon

boron

Aerospace Sciences

extreme ultraviolet radiation

photoelectron spectroscopy

ultraviolet radiation

Engineering & Materials Science

Multilayers

Ions

Hydrogen

Plasmas

Thin films

Boron

Extreme ultraviolet lithography

Radiation

X rays

Wavelength

Ruthenium

Carbon

Substrates

Optics

Graphene

Ultraviolet radiation

Plasma sources

Etching

Coatings

X ray photoelectron spectroscopy

Free electron lasers

Masks

Ion bombardment

Temperature

Annealing

Lasers

Surface roughness

Tin

Laser pulses

Defects

Irradiation

Laser produced plasmas

Transmission electron microscopy

Carrier concentration

Nitridation

Mirrors

Electrons

Contamination

Metals

Ellipsometry

Nitrogen

Silicon

Photons

Lithography

Argon

Photodetectors

Molecular dynamics

Amorphous silicon

Amorphous carbon

Atoms

Light sources

Spectroscopy

Imaging techniques

Sputtering

Transition metals

Optical constants

Scattering

Temperature programmed desorption

Electrodes

Oxides

Crystalline materials

X ray diffraction

Carbon films

Adsorption

Vacancies

Erosion

Infrared spectroscopy

Topography

Oxygen

Ketones

Chemical Compounds