Research Output

2020

A semi-Analytical approach for the characterization of ordered 3D nanostructures using grazing-incidence X-ray fluorescence

Nikolaev, K. V., Soltwisch, V., Honicke, P., Scholze, F., De La Rie, J., Yakunin, S. N., Makhotkin, I. A., Van De Kruijs, R. W. E. & Bijkerk, F., 1 Mar 2020, In : Journal of synchrotron radiation. 27, p. 386-395 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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1 Citation (Scopus)
7 Downloads (Pure)

Etching processes of transferred and non-transferred multi-layer graphene in the presence of extreme UV, H2O and H2

Mund, B. K., Sturm, J. M., van den Beld, W. T. E., Lee, C. J. & Bijkerk, F., 28 Feb 2020, In : Applied surface science. 504, 144485.

Research output: Contribution to journalArticleAcademicpeer-review

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Exploring Voltage Mediated Delamination of Suspended 2D Materials as a Cause of Commonly Observed Breakdown

Loessberg-Zahl, J., De Bruijn, D. S., Van Den Beld, W. T. E., Dollekamp, E., Grady, E., Keerthi, A., Bomer, J., Radha, B., Zandvliet, H. J. W., Bol, A. A., Van Den Berg, A. & Eijkel, J. C. T., 9 Jan 2020, In : Journal of physical chemistry C. 124, 1, p. 430-435

Research output: Contribution to journalArticleAcademicpeer-review

Hydrogen diffusion through Ru thin films

Soroka, O., Sturm, J. M., Lee, C. J., Schreuders, H., Dam, B. & Bijkerk, F., 26 May 2020, In : International journal of hydrogen energy. 45, 29, p. 15003-15010 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Mirror for a microlithographic projection exposure system, and method for operating a deformable mirror

Lippert, J., Gruner, T., Hild, K., Lucke, P. & Nematollahi, M., 30 Jan 2020, IPC No. G03F 7/ 20 A I, Patent No. WO2020020550, Priority date 26 Jul 2018, Priority No. DE201810212508

Research output: Patent

Open Access
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12 Downloads (Pure)

Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography

Torretti, F., Sheil, J., Schupp, R., Basko, M. M., Bayraktar, M., Meijer, R., Witte, S., Ubachs, W., Hoekstra, R., Versolato, O., Neukirch, A. & Colgan, J., 11 May 2020, In : Nature communications. 11, 2334.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access

Reflective aperiodic multilayer filters for metrology at XUV sources

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., Bijkerk, F. & Boller, K. J., 3 Feb 2020, In : Optics express. 28, 3, p. 3331-3351 21 p.

Research output: Contribution to journalArticleAcademicpeer-review

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12 Downloads (Pure)

Ruthenium under ultrafast laser excitation: Model and dataset for equation of state, conductivity, and electron-ion coupling

Petrov, Y., Migdal, K., Inogamov, N., Khokhlov, V., Ilnitsky, D., Milov, I., Medvedev, N., Lipp, V. & Zhakhovsky, V., Feb 2020, In : Data in brief. 28, 104980.

Research output: Contribution to journalArticleAcademicpeer-review

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Similarity in ruthenium damage induced by photons with different energies: From visible light to hard X-rays

Milov, I., Lipp, V., Ilnitsky, D., Medvedev, N., Migdal, K., Zhakhovsky, V., Khokhlov, V., Petrov, Y., Inogamov, N., Semin, S., Kimel, A., Ziaja, B., Makhotkin, I. A., Louis, E. & Bijkerk, F., 31 Jan 2020, In : Applied surface science. 501, 143973.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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1 Citation (Scopus)
11 Downloads (Pure)
Open Access
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1 Citation (Scopus)
7 Downloads (Pure)

Sub-stochiometric MoO3 for intermediate band solar cells

Jorge, M., Brakstad, T., Nematollahi, M., Kildemo, M. & Reenaas, T., 6 Feb 2020, 2019 IEEE 46th Photovoltaic Specialists Conference, PVSC 2019. IEEE, p. 1756-1759 4 p. 8980951

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

The role of pinhole structures in Mo thin films on multi-layer graphene synthesis

Kizir, S., van den Beld, W., Schurink, B., van de Kruijs, R. W. E., Benschop, J. P. H. & Bijkerk, F., 12 Mar 2020, In : Journal of Physics : Materials. 3, 2, 9 p., 025004.

Research output: Contribution to journalArticleAcademicpeer-review

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W/B short period multilayer structures for soft x-rays

Medvedev, R., Zameshin, A., Sturm, J. M., Yakshin, A. & Bijkerk, F., 1 Apr 2020, In : AIP advances. 10, 4, 8 p., 045305.

Research output: Contribution to journalArticleAcademicpeer-review

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5 Downloads (Pure)
2019

Adaptive piezoelectric optics for XUV wavelengths

Bayraktar, M., Lucke, P., Nematollahi, M., Yakshin, A., Louis, E., Rijnders, A. J. H. M. & Bijkerk, F., 13 Jun 2019.

Research output: Contribution to conferencePoster

Open Access
Open Access
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Angular and spectral bandwidth of Extreme UV multilayers near spacer material absorption edges

Zameshin, A., Yakshin, A., Chandrasekaran, A. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 602-608 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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126 Downloads (Pure)

Angular and spectral bandwidth of XUV multilayers near spacer material absorption edges

Zameshin, A., 21 Jan 2019.

Research output: Contribution to conferencePoster

Open Access
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7 Downloads (Pure)

Characterization of nitrogen doped graphene bilayers synthesized by fast, low temperature microwave plasma-enhanced chemical vapour deposition

Stilhano Vilas Boas, C. R., Focassio, B., Marinho Jr., E., G. Larrude, D., Salvadori, M. C., Rocha Leao, C. & dos Santos, D., 23 Sep 2019, In : Scientific reports. 9, 12 p., 13715.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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3 Citations (Scopus)
13 Downloads (Pure)

Comparison of hydrogen transport through thin metal, Si and oxide layers

Soroka, O., Sturm, J. M. & Bijkerk, F., 21 Jan 2019.

Research output: Contribution to conferencePoster

Open Access
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7 Downloads (Pure)
Open Access
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8 Downloads (Pure)

Determining the transmission of thin foil filters for soft X-ray free-electron laser radiation: an ablation imprint approach

Burian, T., Hájková, V., Saksl, K., Vozda, V., Makhotkin, I. A., Louis, E., Schreiber, S., Tiedtke, K., Toleikis, S., Keitel, B., Plönjes, E., Ruiz-Lopez, M. I., Kuhlmann, M., Wodzinski, A., Enkisch, H., Hermann, M., Strobel, S., Loch, R. A., Sobierajski, R., Jacyna, I. & 9 others, Klinger, D., Jurek, M., Pełka, J. B., de Vries, G., Störmer, M., Scholze, F., Siewert, F., Mey, T. & Chalupský, J., 14 May 2019, Optics Damage and Materials Processing by EUV/X-ray Radiation VII. (SPIE conference proceedings; vol. 11035).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Efficient Generation of Extreme Ultraviolet Light From Nd: YAG-Driven Microdroplet-Tin Plasma

Schupp, R., Torretti, F., Meijer, R., Bayraktar, M., Scheers, J., Kurilovich, D., Bayerle, A., Eikema, K. S. E., Witte, S., Ubachs, W., Hoekstra, R. & Versolato, O. O., 8 Jul 2019, In : Physical review applied. 12, 1, 014010.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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6 Citations (Scopus)
43 Downloads (Pure)

EUV full-band spectrum and DUV/EUV ratio dependency on source operating conditions

Liu, F., Bayraktar, M., Lim, J-K., Bijkerk, F., Havermans, P. & Claes, B., 20 Jun 2019.

Research output: Contribution to conferencePoster

EUV Lithography at Threshold of High-Volume Manufacturing∗

Yen, A., Meiling, H. & Benschop, J., 16 Jan 2019, 2018 IEEE International Electron Devices Meeting, IEDM 2018. IEEE, p. 11.6.1-11.6.4 8614502. (Technical Digest - International Electron Devices Meeting, IEDM; vol. 2018-December).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Extreme UV secondary electron yield measurements of Ru, Sn, and Hf oxide thin films

Sturm, J. M., Liu, F., Darlatt, E., Kolbe, M., Aarnink, A. A. I., Lee, C. J. & Bijkerk, F., 1 Jul 2019, In : Journal of Micro/ Nanolithography, MEMS, and MOEMS. 18, 3, 033501.

Research output: Contribution to journalArticleAcademicpeer-review

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118 Downloads (Pure)

Grazing-Incidence La/B-Based Multilayer Mirrors for 6.x nm Wavelength

Kuznetsov, D., Yakshin, A., Sturm, J. M. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 585-592 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

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Grazing-incidence small-angle X-ray scattering study of correlated lateral density fluctuations in W/Si multilayers

Nikolaev, K. V., Yakunin, S. N., Makhotkin, I. A., de la Rie, J., Medvedev, R. V., Rogachev, A. V., Trunckin, I. N., Vasiliev, A. L., Hendrikx, C. P., Gateshki, M., van de Kruijs, R. W. E. & Bijkerk, F., Mar 2019, In : Acta Crystallographica Section A: Foundations and Advances. 75, p. 342-351 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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1 Citation (Scopus)
29 Downloads (Pure)

Hydrogenation dynamics of Ru capped y thin films

Soroka, O., Sturm, J. M., Van De Kruijs, R. W. E., Makhotkin, I. A., Nikolaev, K., Yakunin, S. N., Lee, C. J. & Bijkerk, F., 8 Oct 2019, In : Journal of Applied Physics. 126, 14, 145301.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
1 Citation (Scopus)
Open Access
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6 Downloads (Pure)

In-depth structural analysis of swift heavy ion irradiation in KY(WO4)2 for the fabrication of planar optical waveguides

Frentrop, R., Subbotin, I., Segerink, F., Keim, R., Tormo-marquez, V., Olivares, J., Shcherbachev, K., Yakunin, S., Makhotkin, I. & Garcia-blanco, S. M., 1 Dec 2019, In : Optical materials express. 9, 12, p. 4796-4810 15 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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In-situ stress analytics at sub-nanoscale thin film growth

Reinink, J., 27 Nov 2019, Enschede: University of Twente. 116 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

Open Access
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70 Downloads (Pure)

In-situ studies of silicide formation during growth of molybdenum-silicon interfaces

Reinink, J., Zameshin, A., van de Kruijs, R. W. E. & Bijkerk, F., 7 Oct 2019, In : Journal of Applied Physics. 126, 13, 135304.

Research output: Contribution to journalArticleAcademicpeer-review

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Lithography for now and the future

van de Kerkhof, M. A., Benschop, J. P. H. & Banine, V. Y., May 2019, In : Solid-state electronics. 155, p. 20-26

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

Low-energy ion polishing of Si in W/Si soft X-ray multilayer structures

Medvedev, R. V., Nikolaev, K. V., Zameshin, A. A., Ijpes, D., Makhotkin, I. A., Yakunin, S. N., Yakshin, A. E. & Bijkerk, F., 28 Jul 2019, In : Journal of Applied Physics. 126, 4, 045302.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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2 Citations (Scopus)
8 Downloads (Pure)
Open Access
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2 Downloads (Pure)

Mirror, in particular for a microlithographic projection exposure system

Wylie-Van Eerd, B., Bijkerk, F., Hild, K., Gruner, T., Schulte, S. & Weyler, S., 14 Feb 2019, IPC No. G21K 1/ 06 A I, Patent No. WO2019029990, Priority date 9 Aug 2017, Priority No. DE201710213900

Research output: Patent

Multi-dimensional analysis of nano-scale periodic structures using EUV and X-RAY characterization: theoretical concepts and applications

Nikolaev, K., 4 Jul 2019, Enschede: University of Twente. 130 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

Open Access
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34 Downloads (Pure)

Multilayer filter using the borrmann effect for euv source monitoring

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., van de Kruijs, R. W. E., Bijkerk, F. & Boller, K. J., 1 Jan 2019, Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015. Optical Society of America

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Multiscale modeling of damage processes in Ru thin films induced by femtosecond laser pulses

Milov, I., Lipp, V., Ilnitsky, D., Medvedev, N., Migdal, K., Zhakhovsky, V., Khokhlov, V., Petrov, Y., Inogamov, N., Ziaja, B., Medvedev, V., Makhotkin, I. A., Louis, E. & Bijkerk, F., 30 Oct 2019.

Research output: Contribution to conferencePoster

Multiscale modeling of damage processes in Ru thin films induced by femtosecond laser pulses

Milov, I., Lipp, V., Ilnitsky, D., Medvedev, N., Migdal, K., Zhakhovsky, V., Khokhlov, V., Petrov, Y., Inogamov, N., Ziaja, B., Medvedev, V., Makhotkin, I. A., Louis, E. & Bijkerk, F., 30 Sep 2019.

Research output: Contribution to conferencePoster

Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics

Nematollahi, M., Lucke, P., Bayraktar, M., Yakshin, A., Rijnders, A. J. H. M. & Bijkerk, F., 15 Oct 2019, In : Optics letters. 44, 20, p. 5104-5107 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

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