Research Output 2001 2019

2019
40 Downloads (Pure)

Alternative EUV absorptive materials and novel architectures for EUV reticle in nm node technology scanner

Edrisi, A., 4 Mar 2019, Enschede: University of Twente. 80 p.

Research output: ThesisPd Eng ThesisAcademic

Open Access
File
scanners
silver
reticles
absorbers
nickel
76 Downloads (Pure)

Angular and spectral bandwidth of Extreme UV multilayers near spacer material absorption edges

Zameshin, A., Yakshin, A., Chandrasekaran, A. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 602-608 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
material absorption
Electric Power Supplies
Optical Devices
Synchrotrons
spacers

Atomic H diffusion and C etching in multilayer graphene monitored using a y based optical sensor

Mund, B. K., Soroka, O., Sturm, J. M., Van Den Beld, W. T. E., Lee, C. J. & Bijkerk, F., 29 Jul 2019, In : Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics. 37, 5, 6 p., 051801.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
Graphite
Optical sensors
optical measuring instruments
Graphene
Etching
3 Downloads (Pure)

Efficient Generation of Extreme Ultraviolet Light From Nd: YAG-Driven Microdroplet-Tin Plasma

Schupp, R., Torretti, F., Meijer, R., Bayraktar, M., Scheers, J., Kurilovich, D., Bayerle, A., Eikema, K. S. E., Witte, S., Ubachs, W., Hoekstra, R. & Versolato, O. O., 8 Jul 2019, In : Physical review applied. 12, 1, 014010.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
ultraviolet radiation
yttrium-aluminum garnet
tin
lasers
ion charge

EUV Lithography at Threshold of High-Volume Manufacturing∗

Yen, A., Meiling, H. & Benschop, J., 16 Jan 2019, 2018 IEEE International Electron Devices Meeting, IEDM 2018. IEEE, p. 11.6.1-11.6.4 8614502. (Technical Digest - International Electron Devices Meeting, IEDM; vol. 2018-December).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Extreme ultraviolet lithography
lithography
manufacturing
Throughput
thresholds
1 Downloads (Pure)

Extreme UV secondary electron yield measurements of Ru, Sn, and Hf oxide thin films

Sturm, J. M., Liu, F., Darlatt, E., Kolbe, M., Aarnink, A. A. I., Lee, C. J. & Bijkerk, F., 1 Jul 2019, In : Journal of Micro/ Nanolithography, MEMS, and MOEMS. 18, 3, 033501.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Oxide films
Thin films
oxides
Electrons
thin films
2 Downloads (Pure)

Grazing-Incidence La/B-Based Multilayer Mirrors for 6.x nm Wavelength

Kuznetsov, D., Yakshin, A., Sturm, J. M. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 585-592 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

grazing incidence
Multilayers
Mirrors
mirrors
Wavelength
1 Citation (Scopus)
7 Downloads (Pure)

Grazing-incidence small-angle X-ray scattering study of correlated lateral density fluctuations in W/Si multilayers

Nikolaev, K. V., Yakunin, S. N., Makhotkin, I. A., de la Rie, J., Medvedev, R. V., Rogachev, A. V., Trunckin, I. N., Vasiliev, A. L., Hendrikx, C. P., Gateshki, M., van de Kruijs, R. W. E. & Bijkerk, F., Mar 2019, In : Acta Crystallographica Section A: Foundations and Advances. 75, p. 342-351 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
X ray scattering
grazing incidence
Scanning Transmission Electron Microscopy
Multilayers
X-Rays

In-situ studies of silicide formation during growth of molybdenum-silicon interfaces

Reinink, J., Zameshin, A., van de Kruijs, R. W. E. & Bijkerk, F., 3 Oct 2019, In : Journal of applied physics. 126, 13, 135304.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
molybdenum
ion scattering
silicon
tensile stress
availability

Low-energy ion polishing of Si in W/Si soft X-ray multilayer structures

Medvedev, R. V., Nikolaev, K. V., Zameshin, A. A., Ijpes, D., Makhotkin, I. A., Yakunin, S. N., Yakshin, A. E. & Bijkerk, F., 25 Jul 2019, In : Journal of applied physics. 126, 4, 045302.

Research output: Contribution to journalArticleAcademicpeer-review

polishing
laminates
reflectance
roughness
ions

Multi-dimensional analysis of nano-scale periodic structures using EUV and X-RAY characterization: theoretical concepts and applications

Nikolaev, K., 4 Jul 2019, Enschede: University of Twente. 130 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

dimensional analysis
x rays
theses
reflectance
grazing incidence

Optical and structural characterization of orthorhombic LaLuO3 using extreme ultraviolet reflectometry

Tryus, M., Nikolaev, K. V., Makhotkin, I. A., Schubert, J., Kibkalo, L., Danylyuk, S., Giglia, A., Nicolosi, P. & Juschkin, L., 30 Jun 2019, In : Thin solid films. 680, p. 94-101 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Optical constants
error analysis
Pulsed laser deposition
Stoichiometry
Error analysis

Radiation transport and scaling of optical depth in Nd:YAG laser-produced microdroplet-tin plasma

Schupp, R., Torretti, F., Meijer, R. A., Bayraktar, M., Sheil, J., Scheers, J., Kurilovich, D., Bayerle, A., Schafgans, A. A., Purvis, M., Eikema, K. S. E., Witte, S., Ubachs, W., Hoekstra, R. & Versolato, O. O., 20 Sep 2019, In : Applied physics letters. 115, 124101.

Research output: Contribution to journalArticleAcademicpeer-review

radiation transport
optical thickness
YAG lasers
tin
scaling
10 Downloads (Pure)

Surface structure determination by x-ray standing waves at a free-electron laser

Mercurio, G., Makhotkin, I. A., Milov, I., Kim, Y., Zaluzhnyy, I., Dziarzhytski, S., Wenthaus, L., Vartanyants, I. & Wurth, W., 28 Mar 2019, In : New journal of physics. 21, 3, 13 p., 033031.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
standing waves
free electron lasers
x rays
dynamic structural analysis
temporal resolution
2018
15 Downloads (Pure)

Advancing X-ray standing wave data analysis

Makhotkin, I. A., Yakunin, S. N., Hendrikx, C. P., Chandrasekaran, A., van de Kruijs, R. W. E. & Bijkerk, F., 7 Nov 2018.

Research output: Contribution to conferencePosterAcademic

File
standing waves
x rays
mirrors
reflectance
fluorescence
1 Citation (Scopus)
4 Downloads (Pure)

Aromatic structure degradation of single layer graphene on an amorphous silicon substrate in the presence of water, hydrogen and Extreme Ultraviolet light

Mund, B. K., Sturm, J. M., Lee, C. J. & Bijkerk, F., 1 Jan 2018, In : Applied surface science. 427, Part B, p. 1033-1040 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Graphite
Amorphous silicon
Graphene
Hydrogen
Degradation

Broadband spectrometer development based on high-density free-standing transmission gratings

Bayraktar, M., Liu, F., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 31 Jan 2018.

Research output: Contribution to conferencePosterAcademic

1 Citation (Scopus)
5 Downloads (Pure)

Control of YH3 formation and stability via hydrogen surface adsorption and desorption

Soroka, O., Sturm, J. M., van de Kruijs, R. W. E., Lee, C. J. & Bijkerk, F., 15 Oct 2018, In : Applied surface science. 455, p. 70-74 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Hydrogen
Desorption
Adsorption
Yttrium
Thin films
34 Downloads (Pure)

Damage accumulation in thin ruthenium films induced by repetitive exposure to femtosecond XUV pulses below the single-shot ablation threshold

Makhotkin, I. A., Milov, I., Chalupský, J., Tiedtke, K., Enkisch, H., de Vries, G., Scholze, F., Siewert, F., Sturm, J. M., Nikolaev, K. V., van de Kruijs, R. W. E., Smithers, M. A., Van Wolferen, H. A. G. M., Keim, E. G., Louis, E., Jacyna, I., Jurek, M., Klinger, D., Pelka, J. B., Juha, L. & 15 othersHájková, V., Vozda, V., Sburian, T., Saksl, K., Faatz, B., Keitel, B., Plönjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Donker, R., Mey, T. & Sobierajski, R., 1 Nov 2018, In : Journal of the Optical Society of America B: Optical Physics. 35, 11, p. 2799-2805 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

free electron lasers
ruthenium
ablation
shot
damage
2 Citations (Scopus)
3 Downloads (Pure)

Double matrix effect in Low Energy Ion Scattering from La surfaces

Zameshin, A. A., Yakshin, A. E., Sturm, J. M., Brongerma, H. H. & Bijkerk, F., 15 May 2018, In : Applied surface science. 440, p. 570-579 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Scattering
Ions
Charge transfer
Lanthanum
Conduction bands
2 Citations (Scopus)
43 Downloads (Pure)

Electrofusion of single cells in picoliter droplets

Schoeman, R. M., Van Den Beld, W. T. E., Kemna, E. W. M., Wolbers, F., Eijkel, J. C. T. & Van Den Berg, A., 27 Feb 2018, In : Scientific reports. 8, 3714.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Fusion reactions
Microfluidics
Assays
Microchannels
Platinum
7 Citations (Scopus)
22 Downloads (Pure)

Experimental study of EUV mirror radiation damage resistance under long-term free-electron laser exposures below the single-shot damage threshold

Makhotkin, I. A., Sobierajski, R., Chalupsky, J., Tiedtke, K., de Vries, G., Störmer, M., Scholze, F., Siewert, F., van de Kruijs, R. W. E., Milov, I., Louis, E., Jacyna, I., Jurek, M., Klinger, D., Nittler, L., Syryanyy, Y., Juha, L., Hájková, V., Vozda, V., Burian, T. & 13 othersSaksl, K., Faatz, B., Keitel, B., Plonjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Nienhuys, H. K., Gwalt, G., Mey, T. & Enkisch, H., Jan 2018, In : Journal of synchrotron radiation. 25, 1, p. 77-84 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Free electron lasers
Radiation damage
yield point
radiation damage
free electron lasers
63 Downloads (Pure)

Extreme UV photon and hydrogen radical interaction with graphene and ruthenium surfaces

Mund, B. K., 22 Nov 2018, Enschede: University of Twente. 107 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
1 Citation (Scopus)
2 Downloads (Pure)

Formation of H2O on a CO2 dosed Ru(0 0 0 1) surface under Extreme Ultraviolet Light and H2

Mund, B. K., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Oct 2018, In : Applied surface science. 456, p. 538-544 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Amorphous carbon
Temperature programmed desorption
Absorption spectroscopy
Reaction products
Carbon Dioxide

Formation of H2O on the surface of CO2 dosed Ru(0001) under Extreme Ultraviolet Light and H2

Mund, B. K., Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., Jan 2018.

Research output: Contribution to conferencePosterAcademic

Hydrogen diffusion measurements using Y thin film monitoring

Soroka, O., Sturm, J. M., Lee, C. J. & Bijkerk, F., Jan 2018.

Research output: Contribution to conferencePosterAcademic

96 Downloads (Pure)

Hydrogen induced blister formation in Mo/Si multilayer structures

van den Bos, R. A. J. M., 2 May 2018, Enschede: University of Twente. 113 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
blisters
laminates
hydrogen
particle telescopes
electromagnetic spectra
1 Citation (Scopus)
5 Downloads (Pure)

Influence of internal stress and layer thickness on the formation of hydrogen induced thin film blisters in Mo/Si multilayers

van den Bos, R. A. J. M., Reinink, J., Lopaev, D. V., Lee, C. J., Benschop, J. P. H. & Bijkerk, F., 22 Feb 2018, In : Journal of physics D: applied physics. 51, 11, 11 p., 115302.

Research output: Contribution to journalArticleAcademicpeer-review

blisters
residual stress
Hydrogen
Residual stresses
Multilayers
18 Downloads (Pure)

In situ and real-time monitoring of structure formation during non-reactive sputter deposition of lanthanum and reactive sputter deposition of lanthanum nitride

Krause, B., Kuznetsov, D. S., Yakshin, A. E., Ibrahimkutty, S., Baumbach, T. & Bijkerk, F., Aug 2018, In : Journal of applied crystallography. 51, p. 1013-1020 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Lanthanum
Sputter deposition
Nitrides
Monitoring
Crystallites
3 Citations (Scopus)
19 Downloads (Pure)

Mechanism of single-shot damage of Ru thin films irradiated by femtosecond extreme UV free-electron laser

Milov, I., Makhotkin, I. A., Sobierajski, R., Medvedev, N., lipp, V., Chalupsky, J., Sturm, J. M., Tiedtke, K., de Vries, G., Störmer, M., Siewert, F., van de Kruijs, R., Louis, E., Jacyna, I., Jurek, M., Juha, L., Hájková, V., Vozda, V., Burian, T., Saksl, K. & 13 othersFaatz, B., Keitel, B., Plönjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Nienhuys, H. K., Gwalt, G., Mey, T., Enkisch, H. & Bijkerk, F., 23 Jul 2018, In : Optics express. 26, 15, p. 19665-19685 21 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
ultraviolet lasers
free electron lasers
shot
damage
thin films
48 Downloads (Pure)

Metal diffusion and chemical processes of mono and bi-layer thin films

Pachecka, M., 13 Jul 2018, Enschede: University of Twente. 102 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
etching
thin films
dissociation
metals
MIM (semiconductors)
35 Downloads (Pure)

Modeling of XUV-induced damage in Ru films: The role of model parameters

Milov, I., Lipp, V., Medvedev, N., Makhotkin, I. A., Louis, E. & Bijkerk, F., 28 Sep 2018, In : Journal of the Optical Society of America B: Optical Physics. 35, 10, p. B43-B53 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
damage
photoabsorption
hot electrons
ruthenium
electrons

Modelling of damage in Ru thin films induced by femtosecond XUV laser pulses

Milov, I., Makhotkin, I. A., Sobierajski, R., Medvedev, N., lipp, V., Ziaja, B., Khokhlov, V., Zhakhovsky, V., Petrov, Y., Shepelev, V., Ilnisky, D., Migdal, K., Inogamov, N., Medvedev, V. V., Louis, E. & Bijkerk, F., 17 Sep 2018.

Research output: Contribution to conferencePosterAcademic

x ray lasers
spallation
free electron lasers
ballistic ranges
damage

Monitoring EUV and DUV spectral emission ratios of a high power EUVL source

Bayraktar, M., Liu, F., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 7 Nov 2018.

Research output: Contribution to conferencePosterAcademic

Open Access
73 Downloads (Pure)
Open Access
File
nitrogen ions
Ion bombardment
Ruthenium
ruthenium
bombardment
5 Citations (Scopus)

Novel EUV mask absorber evaluation in support of next-generation EUV imaging

Philipsen, V., Luong, K. V., Opsomer, K., Detavernier, C., Hendrickx, E., Erdmann, A., Evanschitzky, P., Van De Kruijs, R. W. E., Heidarnia-Fathabad, Z., Scholze, F. & Laubis, C., 10 Oct 2018, Photomask Technology 2018. Gallagher, E. E. & Rankin, J. H. (eds.). SPIE, Vol. 10810. 108100C. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10810).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

EUV Mask
Absorber
Mask
Masks
absorbers
409 Downloads (Pure)

Plasma-assisted cleaning of extreme UV optics

Dolgov, A. A., 1 Mar 2018, Enschede: University of Twente. 147 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
cleaning
optics
plasma chemistry
carbon
mirrors
77 Downloads (Pure)

Plasma-assisted oxide removal from ruthenium-coated EUV optics

Dolgov, A., Lee, C. J., Bijkerk, F., Abrikosov, A., Krivtsun, V. M., Lopaev, D., Yakushev, O. & van Kampen, M., 18 Apr 2018, In : Journal of applied physics. 123, 15, 9 p., 153301.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
ruthenium
hydrogen plasma
optics
cold plasmas
oxides
7 Downloads (Pure)

Probing atomic scale interface processes using X-rays and ions

Zameshin, A., 14 Nov 2018, Enschede: University of Twente. 150 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

ion scattering
theses
ions
x rays
matrices
45 Downloads (Pure)

Self-contained in-vacuum in situ thin film stress measurement tool

Reinink, J., Van De Kruijs, R. W. E. & Bijkerk, F., 14 May 2018, In : Review of scientific instruments. 89, 5, 6 p., 053904.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
stress measurement
Stress measurement
Vacuum
Thin films
vacuum

Source plasma emission spectrum under various operating conditions

Liu, F., Bayraktar, M., Goossens, T., Bijkerk, F., Quintana Ramirez, J. & Beenhakker, T., 21 Jun 2018.

Research output: Contribution to conferencePosterAcademic

29 Downloads (Pure)

Specular reflection intensity modulated by grazing-incidence diffraction in a wide angular range

Nikolaev, K. V., Makhotkin, I. A., Yakunin, S. N., Van De Kruijs, R. W. E., Chuev, M. A. & Bijkerk, F., 1 Sep 2018, In : Acta Crystallographica Section A: Foundations and Advances. 74, 5, p. 545-552 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
specular reflection
grazing incidence
X-Ray Diffraction
Theoretical Models
Diffraction
25 Downloads (Pure)

Sputter damage by low energy charged particle irradiation

Phadke, P., Sturm, M., van de Kruijs, R. & Bijkerk, F., 18 Jun 2018.

Research output: Contribution to conferencePosterAcademic

Open Access
File
quartz crystals
microbalances
charged particles
damage
metal crystals
58 Downloads (Pure)

Structure control of La/B multilayer systems by partial nitridation

Kuznetsov, D., 8 Nov 2018, Enschede: University of Twente. 100 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
theses
grazing incidence
thermal stability
incidence
mirrors
1 Citation (Scopus)

Study of ultrathin Pt/Co/Pt trilayers modified by nanosecond XUV pulses from laser-driven plasma source

Jacyna, I., Klinger, D., Pełka, J. B., Minikayev, R., Dłużewski, P., Dynowska, E., Jakubowski, M., Klepka, M. T., Zymierska, D., Bartnik, A., Kurant, Z., Wolska, A., Wawro, A., Sveklo, I., Plaisier, J. R., Eichert, D., Brigidi, F., Makhotkin, I., Maziewski, A. & Sobierajski, R., 30 Sep 2018, In : Journal of alloys and compounds. 763, p. 899-908 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Plasma sources
Laser pulses
X rays
Magnetization
Lasers
2017

Adaptive mirrors - upcoming powerful technologies for wavefront correction

Pollak, T., Finken, R., Hild, K., Wylie- Van Eerd, B., Jurgens, D. & Spengler, D., 28 Jun 2017.

Research output: Contribution to conferencePosterOther research output

7 Citations (Scopus)
38 Downloads (Pure)

Adsorption and Dissociation of CO2 on Ru (0001)

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 30 Mar 2017, In : Journal of physical chemistry. p. 6729-6735 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Carbon Monoxide
Temperature programmed desorption
Infrared spectroscopy
desorption
infrared spectroscopy

Advanced crystal surface characterization with asymmetrical X-ray diffraction

Nikolaev, K., Yakunin, S. N., Makhotkin, I. A., van de Kruijs, R. W. E. & Bijkerk, F., 17 Jan 2017.

Research output: Contribution to conferencePosterOther research output