Research Output

2001

Integrating e-mail use in design & technology lessons

van der Meij, H., van Graft, M. & Boersma, K., 2001, New media in Technology Education: Proceedings PATT-11 Conference, March 8-13 2001. Mottier, I. & de Vries, M. J. (eds.). Eindhoven: Eindhoven University of Technology, p. 153-168

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
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2 Downloads (Pure)
2005

Interfaces in soft X-ray multilayer mirrors

Kessels, M. J. H., 10 Mar 2005, Enschede: University of Twente. 107 p.

Research output: ThesisPhD Thesis - Research external, graduation UT

Open Access
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59 Downloads (Pure)
2006

Characterization of large off-axis EUV mirrors with high accuracy reflectometry at PTB

Laubis, C., Buchholz, C., Fischer, A., Plöger, S., Scholz, F., Wagner, H., Scholze, F., Ulm, G., Enkisch, H., Müllender, S., Wedowski, M., Louis, E. & Zoethout, E., 10 Jul 2006, Emerging Lithographic Technologies X. 61510I. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6151 I).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
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19 Citations (Scopus)
8 Downloads (Pure)
2007

Interface structure and interdiffusion in Mo/Si multilayers

Nedelcu, I., 7 Sep 2007, Enschede: University of Twente. 129 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

Open Access
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133 Downloads (Pure)
2008

Smoothing properties of single- and multilayer coatings, a method to smoothen substrates

Van Den Boogaard, A. J. R., Louis, E., Zoethout, E., Van Der Westen, S. A., Bijkerk, F. & Müllender, S., 1 Dec 2008, Emerging Lithographic Technologies XII. 69210R. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6921).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)

Spectral-purity-enhancing layer for multilayer mirrors

Van Herpen, M. M. J. W., Van De Kruijs, R. W. E., Klunder, D. J. W., Louis, E., Yakshin, A. E., Van Der Westen, S. A., Bijkerk, F. & Banine, V., 15 Mar 2008, In : Optics letters. 33, 6, p. 560-562 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

24 Citations (Scopus)

The Effect of Mo Crystallinity on Diffusion through the Si-on-Mo Interface in EUV Multilayer Systems

Bruijn, S., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 2008, In : Defect and diffusion forum. 283-286, p. 657-661

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)
2009

Atomic O and H exposure of C-covered and oxidezed d-metal surfaces

Tsarfati, T., Zoethout, E., van de Kruijs, R. W. E. & Bijkerk, F., 2009, In : Surface science. 603, 16, p. 2594-2599 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

Chemically mediated diffusion of d-metals and B through Si and agglomeration at Si-on-Mo interfaces

Tsarfati, T., Zoethout, E., van de Kruijs, R. W. E. & Bijkerk, F., 2009, In : Journal of Applied Physics. 105, 10, 5 p., 104305.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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48 Downloads (Pure)

Diffusion and interaction studied nondestructively and in real-time with depth-resolved low energy ion spectroscopy

de Rooij-Lohmann, V. I. T. A., Kleyn, A. W., Bijkerk, F., Brongersma, H. H. & Yakshin, A., 2009, In : Applied physics letters. 94, 6, p. 063107-1-063107-3 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)

Growth and sacrificial oxidation of transition metal nanolayers

Tsarfati, T., Zoethout, E., van de Kruijs, R. W. E. & Bijkerk, F., 2009, In : Surface science. 603, 7, p. 1041-1045 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

Growth of silicon nitride films by bombarding amorphous silicon with N+ ions: MD simulation

Gou, F., Gleeson, M. A., Kleyn, A. W., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 2009, In : Nuclear instruments and methods in physics research. Section B : Beam interactions with materials and atoms. 267, 18, p. 3245-3248 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

Improved contrast and reflectivity of multilayer reflective optics for wavelenghts beyond the Extreme UV

Tsarfati, T., Zoethout, E., Louis, E., van de Kruijs, R. W. E., Yakshin, A., Müllender, S. & Bijkerk, F., 24 Feb 2009, Proceedings of SPIE, The International Society for Optical Engineering. Schellenberg, F. M. & La Fontaine, B. M. (eds.). San Jose, CA, USA: SPIE, p. 72713V- (Proceedings of SPIE; vol. 7271).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

14 Citations (Scopus)

In-depth agglomeration of d-metals at Si-on-Mo interfaces

Tsarfati, T., Zoethout, E., van de Kruijs, R. W. E. & Bijkerk, F., 2009, In : Journal of Applied Physics. 105, 6, p. 064314-

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)

Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography

Tsarfati, T., van de Kruijs, R. W. E., Zoethout, E., Louis, E. & Bijkerk, F., 2009, In : Thin solid films. 518, 5, p. 1365-1368 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

50 Citations (Scopus)

Sputtering yields of Ru, Mo and Si under low energy Ar+ bombardment

Wu, S-M., van de Kruijs, R. W. E., Zoethout, E. & Bijkerk, F., 2009, In : Journal of Applied Physics. 106, 5, p. 054902-1-054902-6 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

13 Citations (Scopus)

Surface and interface dynamics in multilayered systems

Tsarfati, T., 26 Jun 2009, Enschede, the Netherlands: University of Twente. 103 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

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33 Downloads (Pure)
2010

Carbon film growth and hydrogenic retention of tungsten exposed to carbon-seeded high density deuterium plasmas

Wright, G. M., Al, R. S., Alves, E., Alves, L. C., Barradas, N. P., Kleyn, A. W., Cardozo, N. J. L., van der Meiden, H. J., Philipps, V., Rooij, G. J., Shumack, A. E., Vijvers, W. A. J., Westerhout, J., Zoethout, E. & Rapp, J., 2010, In : Journal of nuclear materials. 396, 2-3, p. 176-180

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

Chemical interaction of B4C, B and C with Mo/Si layered structures

de Rooij-Lohmann, V. I. T. A., Veldhuizen, L. W., Zoethout, E., Yakshin, A., van de Kruijs, R. W. E., Thijsse, B. J., Gorgoi, M., Schaefers, F. & Bijkerk, F., 2010, In : Journal of Applied Physics. 108, 094314.

Research output: Contribution to journalArticleAcademicpeer-review

13 Citations (Scopus)

Damage mechanisms in Mo/Si multilayer optics for short-wavelengths FELs

Loch, R. A., Sobierajski, R., Bostedt, C., Bozek, J., Bruijn, S., Burian, T., Castagna, J. C., Chalupsky, J., Feng, Y., Gaudin, J., Graf, A., Hajkova, V., van Hattum, E. D., Hau-Riege, S., van de Kruijs, R. W. E., Klinger, D., Krzywinski, J., Jastrow, U., Juha, L., Louis, E. & 4 others, Messerschmidt, M., Moeller, S., Tiedtke, K. & Bijkerk, F., 28 Jun 2010, p. -.

Research output: Contribution to conferencePoster

Determination of the density of ultrathin films using x-ray standing waves

Makhotkin, I. A., Louis, E., van de Kruijs, R. W. E., Yakshin, A., Seregin, A. Y., Lubomirskii, M. Y., Yakunin, S. N., Tereschenko, E. Y., Kovalchuk, M. V. & Bijkerk, F., 20 Sep 2010, p. -.

Research output: Contribution to conferencePoster

Dynamic diffusion rates during evolution of Mo/Si interlayers under annealing

Bosgra, A., Yakshin, A., van de Kruijs, R. W. E. & Bijkerk, F., 14 Feb 2010, p. -.

Research output: Contribution to conferencePoster

Electronic Structure of an XUV Photogenerated Solid-Density Aluminum Plasma

Vinko, S. M., Zastrau, U., Mazevet, S., Andreasson, J., Bajt, S., Burian, T., Chalupsky, J., Chapman, H. N., Cihelka, J., Doria, D., Döppner, T., Düsterer, S., Dzelzainis, T., Faustlin, R. R., Fortmann, C., Förster, E., Galtier, E. J., Glenzer, S. H., Göde, S., Gregori, G. & 29 others, Hajdu, J., Hajkova, V., Heimann, P. A., Irsig, R., Juha, L., Jurek, M., Krzywinski, J., Laarmann, T., Lee, H. J., Lee, R. W., Li, B., Meiwes-Broer, K-H., Mithen, J. P., Nagler, B., Nelson, A. J., Przystawik, A., Redmer, R., Riley, D., Rosmej, F. B., Sobierajski, R., Tavella, F., Thiele, R., Tiggesbaümker, J., Toleikis, S., Tschentscher, T., Vysin, L., Whitcher, T., White, N. & Wark, J., 4 Jun 2010, In : Physical review letters. 104, 22, 4 p., 225001.

Research output: Contribution to journalArticleAcademicpeer-review

50 Citations (Scopus)

Enhanced diffusion upon amorphous-to-nanocrystalline phase transition in Mo/B4C/Si layered systems

de Rooij-Lohmann, V. I. T. A., Yakshin, A., van de Kruijs, R. W. E., Zoethout, E., Kleyn, A. W., Keim, E. G., Gorgoi, M., Schäfers, F., Brongersma, H. H. & Bijkerk, F., 2010, In : Journal of Applied Physics. 108, 1, p. 014314/1-014314/5 5 p., 014314.

Research output: Contribution to journalArticleAcademicpeer-review

16 Citations (Scopus)

EUV-multilayers on grating-like topographies

van den Boogaard, T., Louis, E., Goldberg, K. A., Mochi, I. & Bijkerk, F., 2010, Extreme Ultraviolet (EUV) Lithography: 22–25 February 2010, San Jose, California, United States. La Fontaine, B. M. (ed.). San Jose, CA, USA: SPIE - The International Society for Optical Engineering, 5 p. (Proceedings of SPIE; vol. 7636).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Formation of Si/SiC multilayers by low-energy ion implantation and thermal annealing

Dobrovolskiy, S., Yakshin, A., Tichelaar, F. D., Verhoeven, J., Louis, E. & Bijkerk, F., 2010, In : Nuclear instruments and methods in physics research. Section B : Beam interactions with materials and atoms. 268, 6, p. 560-567 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Growthof silicon nitride thin films at room temperature

Zoethout, E., Louis, E. & Bijkerk, F., 19 Jan 2010, p. -.

Research output: Contribution to conferencePoster

Growth of silicon nitride thin films at room termperature

Zoethout, E. & Bijkerk, F., 19 Jan 2010, p. -.

Research output: Contribution to conferencePoster

High reflectance multilayer coating technology for 3100 EUVL projection optics

van Hattum, E. D., Louis, E., van der Westen, A., Salle, P., Zoethout, E., von Blanckenhage, G., Enkish, H., Müllender, S. & Bijkerk, F., 21 Feb 2010, p. -.

Research output: Contribution to conferencePoster

High reflectance multilayers for EUVL HVM-projection optics

Louis, E., van Hattum, E. D., Alonso van der Westen, S., Sallé, P., Grootkarzijn, K., Zoethout, E., Bijkerk, F., von Blanckenhagen, G. & Müllender, S., 22 Mar 2010, Extreme Ultraviolet (EUV) Lithography. La Fontaine, B. M. (ed.). San Jose, USA: SPIE - The International Society for Optical Engineering, Vol. 7636. 5 p. 76362T. (Proceedings of SPIE; vol. 7636).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

High-resolution, high-reflective operation of lamellar multilayer amplitude gratings: identification of the single-order regime

Kozhevnikov, I. V., van der Meer, R., Bastiaens, H. M. J., Boller, K-J. & Bijkerk, F., 2010, In : Optics express. 18, 15, p. 16234-16242 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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25 Citations (Scopus)
29 Downloads (Pure)

Hydrogen interaction with EUVL-relevant optical materials

Kuznetsov, A., van de Kruijs, R. W. E., Gleeson, M. A., Schmid, K. & Bijkerk, F., 2010, In : Journal of surface investigation. X-ray, synchrotron and neutron techniques. 4, 4, p. 563-566 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)

Hydrogen interaction with mirrors for EUVL lithography

Kuznetsov, A., van de Kruijs, R. W. E., Gleeson, A. J., Schmid, K. & Bijkerk, F., 19 Jan 2010, p. -.

Research output: Contribution to conferencePoster

Interaction of short x-ray pulses with low-Z x-ray optics materials at the LCLS free-electron laser

Hau-Riege, S. P., London, R. A., Graf, A., Baker, S. L., Soufli, R., Sobierajski, R., Burian, T., Chalupsky, J., Juha, L., Gaudin, J., Krzywinski, J., Moeller, S., Messerschmidt, M., Bozek, J. & Bostedt, C., 2010, In : Optics express. 18, 23, p. 23933-23938

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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32 Citations (Scopus)
14 Downloads (Pure)

Method for manufacturing a multilayer structure with a lateral pattern for application in the XUV wavelength range, and BF and LMAG structures manufactured according to this method

Bijkerk, F., van der Wiel, W. G., van der Meer, R. & Hegeman, P. E., 2010, (Submitted) Patent No. 10769182.3, Priority No. NL20092003950 20091211, WO2010NL50832 20101208

Research output: Patent

Molecular dynamics simulation of the effects of the samples' temperature on Ar+ interactions with SiC surface

Sun, W-Z., Zhao, C. L., Liu, H., Zhang, J., Lu, X. D., Pan, Y. & Gou, F., 2010, In : Nuclear fusion and plasma physics = Hejubian yu Denglizitiwuli. 30, 4, p. 317-322

Research output: Contribution to journalArticleAcademicpeer-review

Nanoscale diffusion, compound formation and phase transitions in Mo/Si multilayer structures

de Rooij-Lohmann, V. I. T. A., 1 Oct 2010, Enschede: University of Twente. 109 p.

Research output: ThesisPhD Thesis - Research external, graduation UT

File
48 Downloads (Pure)

Nitridation and contrast of B4C/La interfaces and multilayer optics

Tsarfati, T., van de Kruijs, R. W. E., Zoethout, E., Louis, E. & Bijkerk, F., 2010, In : Thin solid films. 518, 24, p. 7249-7252 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

25 Citations (Scopus)

Oppervlaktechemie van nanolaagspiegels

Tsarfati, T., Zoethout, E., van de Kruijs, R. W. E. & Bijkerk, F., 2010, In : Nederlands tijdschrift voor natuurkunde. 76, 8, p. 8-

Research output: Contribution to journalArticleAcademic

Properties of broadband depth-graded multilayer mirrors for EUV optical systems

Yakshin, A. E., Kozhevnikov, I. V., Zoethout, E., Louis, E. & Bijkerk, F., 2010, In : Optics express. 18, 7, p. 6957-6971 15 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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29 Citations (Scopus)
70 Downloads (Pure)

Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby

Koshelev, K. N., Bijkerk, F., Zukavishvili, G. G., Korop, E. D. & Ivanov, V. V., 2010, (In preparation) Patent No. US20060600340 20061116, Priority date 3 Jul 2000, Priority No. EP20000202304 20000703, US20060600340 20061116

Research output: Patent

Reflective element for EUV lithography device

Yakshin, A., van de Kruijs, R. W. E., Bijkerk, F., Louis, E. & Nedelcu, I., 2010, (Submitted) Patent No. US20090536251 20090805, Priority date 5 Aug 2009

Research output: Patent

Reflektives optisches Element und Verfahren zu seiner Herstellung/ Method to enhance layer contrast of a multilayer for reflection at the B absorption edge

Tsarfati, T., Zoethout, E., Louis, E. & Bijkerk, F., 2010, (Submitted) Patent No. # US 61/079307 (US); # DE102008040265 (Germany), Priority date 30 May 2009

Research output: Patent

Roughness evolution of Si surfaces upon Ar ion erosion

de Rooij-Lohmann, V. I. T. A., Kozhevnikov, I. V., Peverini, L., Ziegler, E., Cuerno, R., Bijkerk, F. & Yakshin, A., 2010, In : Applied surface science. 256, 16, p. 5011-5014 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

Secondary electron yield measurements of carbon covered multilayer optics

Chen, J., Louis, E., Verhoeven, J., Harmsen, R., Lee, C. J., Lubomska, M., van Kampen, M., van Schaik, W. & Bijkerk, F., 2010, In : Applied surface science. 257, 2, p. 354-361 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

13 Citations (Scopus)

Single shot damage mechanism of Mo/Si multilayer optics under intense pulsed XUV-exposures

Khorsand, A. R., Sobierajski, R., Louis, E., Bruijn, S., van de Kruijs, R. W. E., Krzywinski, J., Hau-Riege, S., Gleeson, A., Gullikson, E. M. & Bijkerk, F., 2010, In : Optics express. 18, 2, p. 700-712 13 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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49 Citations (Scopus)
24 Downloads (Pure)

Spot size characterization of focused non-Gaussian beams

Chalupský, J., Krzywinski, J., Juha, L., Hájková, V., Cihelka, J., Burian, T., Vyšín, L., Gaudin, J., Gleeson, A. J., Jurek, M., Khorsand, A. R., Klinger, D., Wabnitz, H., Sobierajski, R., Störmer, M., Tiedtke, K. & Toleikis, S., 2010, In : Optics express. 18, 26, p. 27836-27845

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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62 Citations (Scopus)
91 Downloads (Pure)

Surface morphology of Kr+-polished amorphous Si layers

van den Boogaard, T., Louis, E., Zoethout, E., Müllender, S. & Bijkerk, F., 2010, In : Journal of vacuum science and technology A: vacuum, surfaces, and films. 28, 4, p. 552-558 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)

Thermally induced decomposition of B4C barrier layers in Mo/Si multilayer structures

Bruijn, S., van de Kruijs, R. W. E., Yakshin, A., Zoethout, E. & Bijkerk, F., 2010, In : Surface and coatings technology. 205, 7, p. 2469-2473 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

8 Citations (Scopus)

ZFEL: a compact, soft X-ray FEL in the Netherlands

Beijers, J. P. M., Brandenburg, S., Eikema, K. S. E., Hoekstra, S., Jungmann, K., Schlathölter, T., Timmermans, R. G. E., Willmann, R., Hoekstra, R., van Loosdrecht, P. H. M., Noheda, B., Palstra, T. T. M., Rudolf, P., Luiten, O. J. & Bijkerk, F., 23 Aug 2010, Free Electron Laser (FEL) Conference 2010, Malmö, Sweden. Malmö, Sweden, p. 163-164

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
5 Citations (Scopus)