XUV Optics

Research Output

Research Output per year

2001 2021

• 226 Article
• 176 Poster
• 28 Conference contribution
• 21 Other contribution
• 66 More
  • 20 Patent
  • 20 PhD Thesis - Research UT, graduation UT
  • 10 PhD Thesis - Research external, graduation UT
  • 5 Abstract
  • 2 Conference article
  • 2 Pd Eng Thesis
  • 2 Working paper
  • 1 Report
  • 1 Chapter
  • 1 Paper
  • 1 Review article
  • 1 Web publication/site

Research Output per year

Research Output per year

Search results

• 25 kHz narrow spectral bandwidth of a wavelength tunable diode laser with a short waveguide-based external cavity

  Oldenbeuving, R., Klein, E. J., Offerhaus, H. L., Lee, C. J., Song, H. & Boller, K. J., 10 Dec 2013, In : Laser physics letters. 10, 1, p. 015804-1-015804-8 8 p., 015804.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Semiconductor lasers
  • Waveguides
  • Wavelength
  • Laser resonators
  • Laser tuning
  59 Citations (Scopus)

• 2D PIC modeling of the EUV induced hydrogen plasma and comparison to the observed carbon etching rate

  Astakhov, D., Goedheer, W. J., Lopaev, D., Ivanov, V., Krivtsun, V. M., Yakushev, O., Koshelev, K. & Bijkerk, F., 22 Jan 2013, p. -.

  Research output: Contribution to conference › Poster › Other research output

  • hydrogen plasma
  • etching
  • carbon
  • ions
  • hydrogen ions

• 2D PIC Modeling of the EUV Induced Hydrogen Plasma and Comparison to the Observed Carbon Etching Rate

  Astakhov, D., Goedheer, W. J., Lopaev, D., Ivanov, V., Yakushev, O., Krivtsun, V. M., Koshelev, K. & Bijkerk, F., 8 Oct 2012, p. 49-49.

  Research output: Contribution to conference › Poster › Other research output

  Open Access

  File
  15 Downloads (Pure)

• Ab-initio simulated X-ray Absorption Spectroscopy of hexagonal Boron Nitride

  Huber, S., van de Kruijs, R. W. E., Bijkerk, F., Gullikson, E. M. & Prendergast, D., 20 Jan 2015, p. -.

  Research output: Contribution to conference › Poster › Other research output

• Accurate determination of oxygen diffusion kinetics for thin film ruthenium oxidation

  Coloma Ribera, R., 1 Oct 2015, p. -.

  Research output: Contribution to conference › Poster › Other research output

• Adaptive mirrors - upcoming powerful technologies for wavefront correction

  Pollak, T., Finken, R., Hild, K., Wylie- Van Eerd, B., Jurgens, D. & Spengler, D., 28 Jun 2017.

  Research output: Contribution to conference › Poster › Other research output

• Adaptive multilayer optics for extreme ultraviolet wavelengths

  Bayraktar, M., 26 Feb 2015, Enschede: Universiteit Twente. 124 p.

  Research output: Thesis › PhD Thesis - Research UT, graduation UT

  File

  • optics
  • theses
  • ultraviolet radiation
  • wavelengths
  • purification
  208 Downloads (Pure)

• Adaptive piezoelectric optics for XUV wavelengths

  Bayraktar, M., Lucke, P., Nematollahi, M., Yakshin, A., Louis, E., Rijnders, A. J. H. M. & Bijkerk, F., 13 Jun 2019.

  Research output: Contribution to conference › Poster › Academic

  Open Access

• Adsorption and Dissociation of CO2 on Ru (0001)

  Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 30 Mar 2017, In : Journal of physical chemistry. p. 6729-6735 7 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  File

  • Temperature programmed desorption
  • Infrared spectroscopy
  • Spectroscopy
  • Carbon Monoxide
  • Single crystal surfaces
  12 Citations (Scopus)

  66 Downloads (Pure)

• Advanced crystal surface characterization with asymmetrical X-ray diffraction

  Nikolaev, K., Yakunin, S. N., Makhotkin, I. A., van de Kruijs, R. W. E. & Bijkerk, F., 17 Jan 2017.

  Research output: Contribution to conference › Poster › Other research output

• Advanced metrology for multilayer mirrors

  Makhotkin, I. A., van de Kruijs, R. W. E., Yakunin, S. N., Zoethout, E., Louis, E., Yakshin, A. & Bijkerk, F., 21 Jan 2014, p. -.

  Research output: Contribution to conference › Poster › Other research output

• Advancing X-ray standing wave data analysis

  Makhotkin, I. A., Yakunin, S. N., Hendrikx, C. P., Chandrasekaran, A., van de Kruijs, R. W. E. & Bijkerk, F., 7 Nov 2018.

  Research output: Contribution to conference › Poster › Academic

  File

  • standing waves
  • x rays
  • fluorescence
  • mirrors
  • reflectance
  27 Downloads (Pure)

• A gain-coefficient switched Alexandrite laser

  Lee, C. J., van der Slot, P. J. M. & Boller, K. J., 11 Sep 2013, In : Journal of physics D: applied physics. 46, 1, p. - 4 p., 015103.

  Research output: Contribution to journal › Article › Academic › peer-review

  • alexandrite
  • Laser pulses
  • Lasers
  • Laser modes
  • Electrooptical effects
  4 Citations (Scopus)

• A hybrid semiconductor-glass waveguide laser

  Fan, Y., Oldenbeuving, R., Klein, E. J., Lee, C. J., Song, H., Khan, M. R. H., Offerhaus, H. L., van der Slot, P. J. M. & Boller, K-J., 14 Apr 2014, Laser Sources and Applications II. Mackenzie, J. I., Jelinkova, H., Taira, T. & Ahmed, M. A. (eds.). Brussels, Belgium: SPIE, 91351B. (Proceedings of SPIE; vol. 9135).

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

  • waveguide lasers
  • glass lasers
  • lasers
  • glass
  • waveguides
  21 Citations (Scopus)

• Alternative EUV absorptive materials and novel architectures for EUV reticle in nm node technology scanner

  Edrisi, A., 4 Mar 2019, Enschede: University of Twente. 80 p.

  Research output: Thesis › Pd Eng Thesis

  Open Access

  File

  • Silver
  • Extreme ultraviolet lithography
  • Nickel
  • Surface roughness
  • Ruthenium
  123 Downloads (Pure)

• A model for hydrogen induced blister growth in Mo/Si multilayer mirror structures

  van den Bos, R., Benschop, J., Bijkerk, F. & Lee, C. J., 17 Jan 2017.

  Research output: Contribution to conference › Poster › Other research output

• A model for pressurized hydrogen induced thin film blisters

  van den Bos, R. A. J. M., Reshetniak, V., Lee, C. J., Benschop, J. P. H. & Bijkerk, F., 2016, In : Journal of Applied Physics. 120, 23, p. 235304- 8 p., 235304.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  File

  • blisters
  • hydrogen
  • thin films
  • caps
  • internal pressure
  10 Citations (Scopus)

  85 Downloads (Pure)

• Analysis of extreme ultraviolet induced surface defect processes

  Gao, A., 22 Oct 2015, Enschede: Universiteit Twente. 134 p.

  Research output: Thesis › PhD Thesis - Research UT, graduation UT

  File
  1435 Downloads (Pure)

• Angular and spectral bandwidth of Extreme UV multilayers near spacer material absorption edges

  Zameshin, A., Yakshin, A., Chandrasekaran, A. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 602-608 7 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  File

  • Electric Power Supplies
  • material absorption
  • Synchrotrons
  • Optical Devices
  • spacers
  167 Downloads (Pure)

• Angular and spectral bandwidth of XUV multilayers near spacer material absorption edges

  Zameshin, A., 21 Jan 2019.

  Research output: Contribution to conference › Poster › Academic

• Anisotropy of heat conduction in Mo/Si multilayers

  Medvedev, V. V., Yang, J., Schmidt, A. J., Yakshin, A. E., van de Kruijs, R. W. E., Zoethout, E. & Bijkerk, F., 2015, In : Journal of Applied Physics. 118, 8, 085101.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  File

  • conductive heat transfer
  • anisotropy
  • thermal conductivity
  • mean free path
  • tensors
  7 Citations (Scopus)

  1 Downloads (Pure)

• Anomalous transmission filters for spectral monitoring in the extreme ultraviolet wavelength region

  Barreaux, J. L. P., Kozhevnikov, I. V., Bayraktar, M., van de Kruijs, R. W. E., Bastiaens, H. M. J., Bijkerk, F. & Boller, K. J., 17 Jan 2017, p. -.

  Research output: Contribution to conference › Poster › Other research output

  5 Citations (Scopus)

• Aromatic structure degradation of single layer graphene on an amorphous silicon substrate in the presence of water, hydrogen and Extreme Ultraviolet light

  Mund, B. K., Sturm, J. M., Lee, C. J. & Bijkerk, F., 1 Jan 2018, In : Applied surface science. 427, Part B, p. 1033-1040 8 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  File

  • Graphite
  • Amorphous silicon
  • Graphene
  • Hydrogen
  • Substrates
  2 Citations (Scopus)

  30 Downloads (Pure)

• A semi-Analytical approach for the characterization of ordered 3D nanostructures using grazing-incidence X-ray fluorescence

  Nikolaev, K. V., Soltwisch, V., Honicke, P., Scholze, F., De La Rie, J., Yakunin, S. N., Makhotkin, I. A., Van De Kruijs, R. W. E. & Bijkerk, F., 1 Mar 2020, In : Journal of synchrotron radiation. 27, p. 386-395 10 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  File

  • Nanostructures
  • Fluorescence
  • grazing incidence
  • X rays
  • fluorescence
  3 Citations (Scopus)

  19 Downloads (Pure)

• Assumption-independent approach for GIXRR data analysis for periodic structures

  Zameshin, A., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 25 Sep 2014, p. -.

  Research output: Contribution to conference › Poster › Other research output

• Atomic H diffusion and C etching in multilayer graphene monitored using a y based optical sensor

  Mund, B. K., Soroka, O., Sturm, J. M., van den Beld, W. T. E., Lee, C. J. & Bijkerk, F., 1 Sep 2019, In : Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics. 37, 5, 6 p., 051801.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  File

  • Graphite
  • Optical sensors
  • Graphene
  • optical measuring instruments
  • Etching
  19 Downloads (Pure)

• Atomic O and H exposure of C-covered and oxidezed d-metal surfaces

  Tsarfati, T., Zoethout, E., van de Kruijs, R. W. E. & Bijkerk, F., 2009, In : Surface science. 603, 16, p. 2594-2599 6 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Desorption
  • metal surfaces
  • Oxides
  • desorption
  • Metals
  9 Citations (Scopus)

• Atomic quantum scattering and molecular diffraction

  Kleijn, A., 2011, In : Progress in surface science. 86, 9-10, p. 163-168

  Research output: Contribution to journal › Article › Academic › peer-review

  • Atomic beams
  • Molecular beams
  • Surface structure
  • atomic beams
  • Diffraction
  2 Citations (Scopus)

• A wide band transmission mode spectrometer for diagnosis of EUV sources

  Barreaux, J. L. P., Bayraktar, M., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 5 Oct 2015. 1 p.

  Research output: Contribution to conference › Poster › Other research output

  Open Access

  File
  1 Downloads (Pure)

• B4C/Si based EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation

  Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 13 Jun 2011, p. -.

  Research output: Contribution to conference › Poster › Other research output

• B4C/Si based EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation

  Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 2011, Maui, Hawaii, US

  Research output: Other contribution › Other research output

  • infrared radiation
  • laser beams
  • mirrors
  • reflectance
  • retarding

• Behavior of transition metal and metal oxide surfaces under oxidative and reductive environment

  Kuznetsov, A., van de Kruijs, R. W. E., Gleeson, A. J. & Bijkerk, F., 18 Jan 2011, p. -.

  Research output: Contribution to conference › Poster › Other research output

• Blister formation in Mo/Si multilayered structures induced by hydrogen ions

  Van Den Bos, R. A. J. M., Lee, C. J., Benschop, J. P. H. & Bijkerk, F., 9 Jun 2017, In : Journal of physics D: applied physics. 50, 26, 265302.

  Research output: Contribution to journal › Article › Academic › peer-review

  • blisters
  • hydrogen ions
  • Protons
  • Ions
  • Fluxes
  16 Citations (Scopus)

  2 Downloads (Pure)

• Blister formation on multilayer mirrors due to the exposure of hydrogen

  van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 20 Jun 2013, p. -.

  Research output: Contribution to conference › Poster › Other research output

• Blistering behavior in Mo/Si multilayers

  Kuznetsov, A. S., Gleeson, M. A., van de Kruijs, R. W. E. & Bijkerk, F., 18 Apr 2011, SPIE Optics + Optoelectronics 2011. Kuznetsov, A. S. (ed.). SPIE, 6 p. 807713. (Proceedings of SPIE; vol. 8077).

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

  • blisters
  • hydrogen isotopes
  • gas flow
  • fluence
  • damage
  5 Citations (Scopus)

• Blister mechanism in extreme ultraviolet multilayer mirrors

  van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2015, p. -.

  Research output: Contribution to conference › Poster › Other research output

• Bragg reflectors with IR suppression for Extreme Ultraviolet Lithography

  Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M., Koshelev, K. & Bijkerk, F., 10 Dec 2012, p. -.

  Research output: Contribution to conference › Poster › Other research output

  • Bragg reflectors
  • lithography
  • retarding
  • reflectance
  • radiation

• Broadband spectrometer development based on high-density free-standing transmission gratings

  Bayraktar, M., Liu, F., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 19 Dec 2017.

  Research output: Contribution to conference › Poster › Other research output

• Broadband spectrometer development based on high-density free-standing transmission gratings

  Bayraktar, M., Liu, F., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 31 Jan 2018.

  Research output: Contribution to conference › Poster › Academic

• Broadband transmission grating spectrometer for measuring the emission spectrum of EUV sources

  Bayraktar, M., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 2016, In : NEVAC blad. 54, 1, p. 14-19 6 p.

  Research output: Contribution to journal › Article › Academic

  File

  • emission spectra
  • spectrometers
  • gratings
  • broadband
  • wavelengths
  226 Downloads (Pure)

• Calibrated broadband spectroscopy using transmission gratings in the EUV to DUV wavelengths

  Bayraktar, M., Bastiaens, H. M. J. & Bijkerk, F., 4 Nov 2019.

  Research output: Contribution to conference › Poster › Academic

  Open Access

• Carbon film growth and hydrogenic retention of tungsten exposed to carbon-seeded high density deuterium plasmas

  Wright, G. M., Al, R. S., Alves, E., Alves, L. C., Barradas, N. P., Kleyn, A. W., Cardozo, N. J. L., van der Meiden, H. J., Philipps, V., Rooij, G. J., Shumack, A. E., Vijvers, W. A. J., Westerhout, J., Zoethout, E. & Rapp, J., 2010, In : Journal of nuclear materials. 396, 2-3, p. 176-180

  Research output: Contribution to journal › Article › Academic › peer-review

  • Thermal desorption spectroscopy
  • Nuclear reactions
  • Film growth
  • Carbon films
  • Deuterium
  1 Citation (Scopus)

• Carbon induced extreme ultraviolet (EUV) reflectance loss characterized using visible-light ellipsometry

  Chen, J., Louis, E., Wormeester, H., Harmsen, R., van de Kruijs, R. W. E., Lee, C. J., van Schaik, W. & Bijkerk, F., 2011, In : Measurement science and technology. 22, 10, p. - 8 p., 105705.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Ellipsometry
  • Carbon
  • Optical constants
  • Multilayers
  • Spectroscopic ellipsometry
  9 Citations (Scopus)

• CF3+ etching silicon surface: A molecular dynamics study

  Zhao, C., Lu, X., He, P., Zhang, P., Sun, W., Zhang, J., Chen, F. & Gou, F., 2012, In : Vacuum. 86, 7, p. 913-916

  Research output: Contribution to journal › Article › Academic › peer-review

  • Silicon
  • Molecular dynamics
  • Etching
  • etching
  • molecular dynamics
  1 Citation (Scopus)

• Characterization of 1- and 2-μm-wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light

  Schupp, R., Behnke, L., Sheil, J., Bouza, Z., Bayraktar, M., Ubachs, W., Hoekstra, R. & Versolato, O., 28 Dec 2020, (arXiv.org).

  Research output: Working paper

  File

  • ultraviolet radiation
  • tin
  • characterization
  • wavelengths
  • lasers
  1 Downloads (Pure)

• Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source

  Dolgov, A., Lopaev, D., Lee, C. J., Zoethout, E., Medvedev, V., Yakushev, O. & Bijkerk, F., 23 Jun 2015, In : Applied surface science. 353, p. 708-713 6 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Tin
  • Light sources
  • Atoms
  • Contamination
  • Ions
  20 Citations (Scopus)

• Characterization of EUV induced contamination on multilayer optics

  Chen, J., 1 Jul 2011, Enschede: Universiteit Twente. 119 p.

  Research output: Thesis › PhD Thesis - Research external, graduation UT

  Open Access

  File

  • contamination
  • optics
  • theses
  • characterization
  • reflectance
  755 Downloads (Pure)

• Characterization of large off-axis EUV mirrors with high accuracy reflectometry at PTB

  Laubis, C., Buchholz, C., Fischer, A., Plöger, S., Scholz, F., Wagner, H., Scholze, F., Ulm, G., Enkisch, H., Müllender, S., Wedowski, M., Louis, E. & Zoethout, E., 10 Jul 2006, Emerging Lithographic Technologies X. 61510I. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6151 I).

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

  Open Access

  File

  • Reflectometry
  • Mirror
  • High Accuracy
  • Coating
  • Extreme Ultraviolet Lithography
  19 Citations (Scopus)

  20 Downloads (Pure)

• Characterization of megahertz X-ray laser beams by multishot desorption imprints in PMMA

  Vozda, V., Burian, T., Hájková, V., Juha, L., Enkisch, H., Faatz, B., Hermann, M., Jacyna, I., Jurek, M., Keitel, B., Klinger, D., Loch, R., Louis, E., Makhotkin, I. A., Plönjes, E., Saksl, K., Siewert, F., Sobierajski, R., Strobel, S., Tiedtke, K. & 4 others, Toleikis, S., Vries, G. D. E., Zelinger, Z. & Chalupský, J., 31 Aug 2020, In : Optics express. 28, 18, p. 25664-25681 18 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  File

  • polymethyl methacrylate
  • desorption
  • free electron lasers
  • laser beams
  • characterization
  1 Citation (Scopus)

• Characterization of Mo/Si multilayer growth on stepped topographies

  van den Boogaard, A. J. R., Louis, E., Zoethout, E., Goldberg, K. A. & Bijkerk, F., 2011, In : Journal of vacuum science and technology. B: Microelectronics and nanometer structures. 29, 5, p. 1-9 9 p., 051803.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  File

  • Topography
  • Multilayers
  • topography
  • Characterization (materials science)
  • characterization
  3 Citations (Scopus)

  23 Downloads (Pure)