Research Output

25 kHz narrow spectral bandwidth of a wavelength tunable diode laser with a short waveguide-based external cavity

Oldenbeuving, R., Klein, E. J., Offerhaus, H. L., Lee, C. J., Song, H. & Boller, K. J., 10 Dec 2013, In : Laser physics letters. 10, 1, p. 015804-1-015804-8 8 p., 015804.

Research output: Contribution to journalArticleAcademicpeer-review

56 Citations (Scopus)

2D PIC modeling of the EUV induced hydrogen plasma and comparison to the observed carbon etching rate

Astakhov, D., Goedheer, W. J., Lopaev, D., Ivanov, V., Krivtsun, V. M., Yakushev, O., Koshelev, K. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePoster

2D PIC Modeling of the EUV Induced Hydrogen Plasma and Comparison to the Observed Carbon Etching Rate

Astakhov, D., Goedheer, W. J., Lopaev, D., Ivanov, V., Yakushev, O., Krivtsun, V. M., Koshelev, K. & Bijkerk, F., 8 Oct 2012, p. 49-49.

Research output: Contribution to conferencePoster

Open Access
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Ab-initio simulated X-ray Absorption Spectroscopy of hexagonal Boron Nitride

Huber, S., van de Kruijs, R. W. E., Bijkerk, F., Gullikson, E. M. & Prendergast, D., 20 Jan 2015, p. -.

Research output: Contribution to conferencePoster

Accurate determination of oxygen diffusion kinetics for thin film ruthenium oxidation

Coloma Ribera, R., 1 Oct 2015, p. -.

Research output: Contribution to conferencePoster

Adaptive mirrors - upcoming powerful technologies for wavefront correction

Pollak, T., Finken, R., Hild, K., Wylie- Van Eerd, B., Jurgens, D. & Spengler, D., 28 Jun 2017.

Research output: Contribution to conferencePoster

Adaptive multilayer optics for extreme ultraviolet wavelengths

Bayraktar, M., 26 Feb 2015, Enschede: Universiteit Twente. 124 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

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154 Downloads (Pure)

Adaptive piezoelectric optics for XUV wavelengths

Bayraktar, M., Lucke, P., Nematollahi, M., Yakshin, A., Louis, E., Rijnders, A. J. H. M. & Bijkerk, F., 13 Jun 2019.

Research output: Contribution to conferencePoster

Open Access

Adsorption and Dissociation of CO2 on Ru (0001)

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 30 Mar 2017, In : Journal of physical chemistry. p. 6729-6735 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

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9 Citations (Scopus)
58 Downloads (Pure)

Advanced crystal surface characterization with asymmetrical X-ray diffraction

Nikolaev, K., Yakunin, S. N., Makhotkin, I. A., van de Kruijs, R. W. E. & Bijkerk, F., 17 Jan 2017.

Research output: Contribution to conferencePoster

Advanced metrology for multilayer mirrors

Makhotkin, I. A., van de Kruijs, R. W. E., Yakunin, S. N., Zoethout, E., Louis, E., Yakshin, A. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePoster

Advancing X-ray standing wave data analysis

Makhotkin, I. A., Yakunin, S. N., Hendrikx, C. P., Chandrasekaran, A., van de Kruijs, R. W. E. & Bijkerk, F., 7 Nov 2018.

Research output: Contribution to conferencePoster

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A gain-coefficient switched Alexandrite laser

Lee, C. J., van der Slot, P. J. M. & Boller, K. J., 11 Sep 2013, In : Journal of physics D: applied physics. 46, 1, p. - 4 p., 015103.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

A hybrid semiconductor-glass waveguide laser

Fan, Y., Oldenbeuving, R., Klein, E. J., Lee, C. J., Song, H., Khan, M. R. H., Offerhaus, H. L., van der Slot, P. J. M. & Boller, K-J., 14 Apr 2014, Laser Sources and Applications II. Mackenzie, J. I., Jelinkova, H., Taira, T. & Ahmed, M. A. (eds.). Brussels, Belgium: SPIE, 91351B. (Proceedings of SPIE; vol. 9135).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

20 Citations (Scopus)
Open Access
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A model for hydrogen induced blister growth in Mo/Si multilayer mirror structures

van den Bos, R., Benschop, J., Bijkerk, F. & Lee, C. J., 17 Jan 2017.

Research output: Contribution to conferencePoster

A model for pressurized hydrogen induced thin film blisters

van den Bos, R. A. J. M., Reshetniak, V., Lee, C. J., Benschop, J. P. H. & Bijkerk, F., 2016, In : Journal of Applied Physics. 120, 23, p. 235304- 8 p., 235304.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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9 Citations (Scopus)
73 Downloads (Pure)

Analysis of extreme ultraviolet induced surface defect processes

Gao, A., 22 Oct 2015, Enschede: Universiteit Twente. 134 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

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Angular and spectral bandwidth of Extreme UV multilayers near spacer material absorption edges

Zameshin, A., Yakshin, A., Chandrasekaran, A. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 602-608 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

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Angular and spectral bandwidth of XUV multilayers near spacer material absorption edges

Zameshin, A., 21 Jan 2019.

Research output: Contribution to conferencePoster

Anisotropy of heat conduction in Mo/Si multilayers

Medvedev, V., Yang, J., Schmidt, A. J., Yakshin, A., van de Kruijs, R. W. E., Zoethout, E. & Bijkerk, F., 2015, In : Journal of Applied Physics. 118, 8, p. - 085101.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)

Anomalous transmission filters for spectral monitoring in the extreme ultraviolet wavelength region

Barreaux, J. L. P., Kozhevnikov, I. V., Bayraktar, M., van de Kruijs, R. W. E., Bastiaens, H. M. J., Bijkerk, F. & Boller, K. J., 17 Jan 2017, p. -.

Research output: Contribution to conferencePoster

5 Citations (Scopus)

Aromatic structure degradation of single layer graphene on an amorphous silicon substrate in the presence of water, hydrogen and Extreme Ultraviolet light

Mund, B. K., Sturm, J. M., Lee, C. J. & Bijkerk, F., 1 Jan 2018, In : Applied surface science. 427, Part B, p. 1033-1040 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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2 Citations (Scopus)
22 Downloads (Pure)

A semi-Analytical approach for the characterization of ordered 3D nanostructures using grazing-incidence X-ray fluorescence

Nikolaev, K. V., Soltwisch, V., Honicke, P., Scholze, F., De La Rie, J., Yakunin, S. N., Makhotkin, I. A., Van De Kruijs, R. W. E. & Bijkerk, F., 1 Mar 2020, In : Journal of synchrotron radiation. 27, p. 386-395 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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1 Citation (Scopus)
8 Downloads (Pure)
Open Access
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Atomic O and H exposure of C-covered and oxidezed d-metal surfaces

Tsarfati, T., Zoethout, E., van de Kruijs, R. W. E. & Bijkerk, F., 2009, In : Surface science. 603, 16, p. 2594-2599 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

Atomic quantum scattering and molecular diffraction

Kleijn, A., 2011, In : Progress in surface science. 86, 9-10, p. 163-168

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

A wide band transmission mode spectrometer for diagnosis of EUV sources

Barreaux, J. L. P., Bayraktar, M., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 5 Oct 2015, p. -.

Research output: Contribution to conferencePoster

B4C/Si based EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 2011, Maui, Hawaii, US

Research output: Other contributionOther research output

B4C/Si based EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 13 Jun 2011, p. -.

Research output: Contribution to conferencePoster

Behavior of transition metal and metal oxide surfaces under oxidative and reductive environment

Kuznetsov, A., van de Kruijs, R. W. E., Gleeson, A. J. & Bijkerk, F., 18 Jan 2011, p. -.

Research output: Contribution to conferencePoster

Blister formation in Mo/Si multilayered structures induced by hydrogen ions

Van Den Bos, R. A. J. M., Lee, C. J., Benschop, J. P. H. & Bijkerk, F., 9 Jun 2017, In : Journal of physics D: applied physics. 50, 26, 265302.

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)
2 Downloads (Pure)

Blister formation on multilayer mirrors due to the exposure of hydrogen

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePoster

Blistering behavior in Mo/Si multilayers

Kuznetsov, A. S., Gleeson, M. A., van de Kruijs, R. W. E. & Bijkerk, F., 18 Apr 2011, SPIE Optics + Optoelectronics 2011. Kuznetsov, A. S. (ed.). SPIE, 6 p. 807713. (Proceedings of SPIE; vol. 8077).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

Blister mechanism in extreme ultraviolet multilayer mirrors

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2015, p. -.

Research output: Contribution to conferencePoster

Bragg reflectors with IR suppression for Extreme Ultraviolet Lithography

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M., Koshelev, K. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePoster

Broadband spectrometer development based on high-density free-standing transmission gratings

Bayraktar, M., Liu, F., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 19 Dec 2017.

Research output: Contribution to conferencePoster

Broadband spectrometer development based on high-density free-standing transmission gratings

Bayraktar, M., Liu, F., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 31 Jan 2018.

Research output: Contribution to conferencePoster

Carbon film growth and hydrogenic retention of tungsten exposed to carbon-seeded high density deuterium plasmas

Wright, G. M., Al, R. S., Alves, E., Alves, L. C., Barradas, N. P., Kleyn, A. W., Cardozo, N. J. L., van der Meiden, H. J., Philipps, V., Rooij, G. J., Shumack, A. E., Vijvers, W. A. J., Westerhout, J., Zoethout, E. & Rapp, J., 2010, In : Journal of nuclear materials. 396, 2-3, p. 176-180

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

Carbon induced extreme ultraviolet (EUV) reflectance loss characterized using visible-light ellipsometry

Chen, J., Louis, E., Wormeester, H., Harmsen, R., van de Kruijs, R. W. E., Lee, C. J., van Schaik, W. & Bijkerk, F., 2011, In : Measurement science and technology. 22, 10, p. - 8 p., 105705.

Research output: Contribution to journalArticleAcademicpeer-review

8 Citations (Scopus)

CF3+ etching silicon surface: A molecular dynamics study

Zhao, C., Lu, X., He, P., Zhang, P., Sun, W., Zhang, J., Chen, F. & Gou, F., 2012, In : Vacuum. 86, 7, p. 913-916

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source

Dolgov, A., Lopaev, D., Lee, C. J., Zoethout, E., Medvedev, V., Yakushev, O. & Bijkerk, F., 23 Jun 2015, In : Applied surface science. 353, p. 708-713 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)

Characterization of EUV induced contamination on multilayer optics

Chen, J., 1 Jul 2011, Enschede: Universiteit Twente. 119 p.

Research output: ThesisPhD Thesis - Research external, graduation UT

Open Access
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Characterization of large off-axis EUV mirrors with high accuracy reflectometry at PTB

Laubis, C., Buchholz, C., Fischer, A., Plöger, S., Scholz, F., Wagner, H., Scholze, F., Ulm, G., Enkisch, H., Müllender, S., Wedowski, M., Louis, E. & Zoethout, E., 10 Jul 2006, Emerging Lithographic Technologies X. 61510I. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6151 I).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
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19 Citations (Scopus)
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Characterization of Mo/Si multilayer growth on stepped topographies

van den Boogaard, A. J. R., Louis, E., Zoethout, E., Goldberg, K. A. & Bijkerk, F., 2011, In : Journal of vacuum science and technology. B: Microelectronics and nanometer structures. 29, 5, p. 1-9 9 p., 051803.

Research output: Contribution to journalArticleAcademicpeer-review

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3 Citations (Scopus)
14 Downloads (Pure)

Characterization of nitrogen doped graphene bilayers synthesized by fast, low temperature microwave plasma-enhanced chemical vapour deposition

Stilhano Vilas Boas, C. R., Focassio, B., Marinho Jr., E., G. Larrude, D., Salvadori, M. C., Rocha Leao, C. & dos Santos, D., 23 Sep 2019, In : Scientific reports. 9, 12 p., 13715.

Research output: Contribution to journalArticleAcademicpeer-review

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5 Citations (Scopus)
15 Downloads (Pure)

Characterization of self-assembled monolayers on a ruthenium surface

Shaheen, A., Sturm, J. M., Ricciardi, R., Huskens, J., Lee, C. J. & Bijkerk, F., 6 Jun 2017, In : Langmuir. 33, 25, p. 6419-6429 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

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4 Citations (Scopus)
49 Downloads (Pure)