Research Output per year
Research Output
25 kHz narrow spectral bandwidth of a wavelength tunable diode laser with a short waveguide-based external cavity
Oldenbeuving, R., Klein, E. J., Offerhaus, H. L., Lee, C. J., Song, H. & Boller, K. J., 10 Dec 2013, In : Laser physics letters. 10, 1, p. 015804-1-015804-8 8 p., 015804.Research output: Contribution to journal › Article › Academic › peer-review
2D PIC modeling of the EUV induced hydrogen plasma and comparison to the observed carbon etching rate
Astakhov, D., Goedheer, W. J., Lopaev, D., Ivanov, V., Krivtsun, V. M., Yakushev, O., Koshelev, K. & Bijkerk, F., 22 Jan 2013, p. -.Research output: Contribution to conference › Poster
2D PIC Modeling of the EUV Induced Hydrogen Plasma and Comparison to the Observed Carbon Etching Rate
Astakhov, D., Goedheer, W. J., Lopaev, D., Ivanov, V., Yakushev, O., Krivtsun, V. M., Koshelev, K. & Bijkerk, F., 8 Oct 2012, p. 49-49.Research output: Contribution to conference › Poster
Open Access
File
10
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(Pure)
Ab-initio simulated X-ray Absorption Spectroscopy of hexagonal Boron Nitride
Huber, S., van de Kruijs, R. W. E., Bijkerk, F., Gullikson, E. M. & Prendergast, D., 20 Jan 2015, p. -.Research output: Contribution to conference › Poster
Accurate determination of oxygen diffusion kinetics for thin film ruthenium oxidation
Coloma Ribera, R., 1 Oct 2015, p. -.Research output: Contribution to conference › Poster
Adaptive mirrors - upcoming powerful technologies for wavefront correction
Pollak, T., Finken, R., Hild, K., Wylie- Van Eerd, B., Jurgens, D. & Spengler, D., 28 Jun 2017.Research output: Contribution to conference › Poster
Adaptive multilayer optics for extreme ultraviolet wavelengths
Bayraktar, M., 26 Feb 2015, Enschede: Universiteit Twente. 124 p.Research output: Thesis › PhD Thesis - Research UT, graduation UT
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Adaptive piezoelectric optics for XUV wavelengths
Bayraktar, M., Lucke, P., Nematollahi, M., Yakshin, A., Louis, E., Rijnders, A. J. H. M. & Bijkerk, F., 13 Jun 2019.Research output: Contribution to conference › Poster
Open Access
Adsorption and Dissociation of CO2 on Ru (0001)
Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 30 Mar 2017, In : Journal of physical chemistry. p. 6729-6735 7 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
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Advanced crystal surface characterization with asymmetrical X-ray diffraction
Nikolaev, K., Yakunin, S. N., Makhotkin, I. A., van de Kruijs, R. W. E. & Bijkerk, F., 17 Jan 2017.Research output: Contribution to conference › Poster
Advanced metrology for multilayer mirrors
Makhotkin, I. A., van de Kruijs, R. W. E., Yakunin, S. N., Zoethout, E., Louis, E., Yakshin, A. & Bijkerk, F., 21 Jan 2014, p. -.Research output: Contribution to conference › Poster
Advancing X-ray standing wave data analysis
Makhotkin, I. A., Yakunin, S. N., Hendrikx, C. P., Chandrasekaran, A., van de Kruijs, R. W. E. & Bijkerk, F., 7 Nov 2018.Research output: Contribution to conference › Poster
File
20
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A gain-coefficient switched Alexandrite laser
Lee, C. J., van der Slot, P. J. M. & Boller, K. J., 11 Sep 2013, In : Journal of physics D: applied physics. 46, 1, p. - 4 p., 015103.Research output: Contribution to journal › Article › Academic › peer-review
A hybrid semiconductor-glass waveguide laser
Fan, Y., Oldenbeuving, R., Klein, E. J., Lee, C. J., Song, H., Khan, M. R. H., Offerhaus, H. L., van der Slot, P. J. M. & Boller, K-J., 14 Apr 2014, Laser Sources and Applications II. Mackenzie, J. I., Jelinkova, H., Taira, T. & Ahmed, M. A. (eds.). Brussels, Belgium: SPIE, 91351B. (Proceedings of SPIE; vol. 9135).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Alternative EUV absorptive materials and novel architectures for EUV reticle in nm node technology scanner
Edrisi, A., 4 Mar 2019, Enschede: University of Twente. 80 p.Research output: Thesis › Pd Eng Thesis
Open Access
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86
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(Pure)
A model for hydrogen induced blister growth in Mo/Si multilayer mirror structures
van den Bos, R., Benschop, J., Bijkerk, F. & Lee, C. J., 17 Jan 2017.Research output: Contribution to conference › Poster
A model for pressurized hydrogen induced thin film blisters
van den Bos, R. A. J. M., Reshetniak, V., Lee, C. J., Benschop, J. P. H. & Bijkerk, F., 2016, In : Journal of Applied Physics. 120, 23, p. 235304- 8 p., 235304.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
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Analysis of extreme ultraviolet induced surface defect processes
Gao, A., 22 Oct 2015, Enschede: Universiteit Twente. 134 p.Research output: Thesis › PhD Thesis - Research UT, graduation UT
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Angular and spectral bandwidth of Extreme UV multilayers near spacer material absorption edges
Zameshin, A., Yakshin, A., Chandrasekaran, A. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 602-608 7 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
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Angular and spectral bandwidth of XUV multilayers near spacer material absorption edges
Zameshin, A., 21 Jan 2019.Research output: Contribution to conference › Poster
Anisotropy of heat conduction in Mo/Si multilayers
Medvedev, V., Yang, J., Schmidt, A. J., Yakshin, A., van de Kruijs, R. W. E., Zoethout, E. & Bijkerk, F., 2015, In : Journal of Applied Physics. 118, 8, p. - 085101.Research output: Contribution to journal › Article › Academic › peer-review
Anomalous transmission filters for spectral monitoring in the extreme ultraviolet wavelength region
Barreaux, J. L. P., Kozhevnikov, I. V., Bayraktar, M., van de Kruijs, R. W. E., Bastiaens, H. M. J., Bijkerk, F. & Boller, K. J., 17 Jan 2017, p. -.Research output: Contribution to conference › Poster
5
Citations
(Scopus)
Aromatic structure degradation of single layer graphene on an amorphous silicon substrate in the presence of water, hydrogen and Extreme Ultraviolet light
Mund, B. K., Sturm, J. M., Lee, C. J. & Bijkerk, F., 1 Jan 2018, In : Applied surface science. 427, Part B, p. 1033-1040 8 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
2
Citations
(Scopus)
22
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(Pure)
A semi-Analytical approach for the characterization of ordered 3D nanostructures using grazing-incidence X-ray fluorescence
Nikolaev, K. V., Soltwisch, V., Honicke, P., Scholze, F., De La Rie, J., Yakunin, S. N., Makhotkin, I. A., Van De Kruijs, R. W. E. & Bijkerk, F., 1 Mar 2020, In : Journal of synchrotron radiation. 27, p. 386-395 10 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
1
Citation
(Scopus)
8
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(Pure)
Assumption-independent approach for GIXRR data analysis for periodic structures
Zameshin, A., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 25 Sep 2014, p. -.Research output: Contribution to conference › Poster
Atomic H diffusion and C etching in multilayer graphene monitored using a y based optical sensor
Mund, B. K., Soroka, O., Sturm, J. M., Van Den Beld, W. T. E., Lee, C. J. & Bijkerk, F., 1 Sep 2019, In : Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics. 37, 5, 6 p., 051801.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
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Atomic O and H exposure of C-covered and oxidezed d-metal surfaces
Tsarfati, T., Zoethout, E., van de Kruijs, R. W. E. & Bijkerk, F., 2009, In : Surface science. 603, 16, p. 2594-2599 6 p.Research output: Contribution to journal › Article › Academic › peer-review
Atomic quantum scattering and molecular diffraction
Kleijn, A., 2011, In : Progress in surface science. 86, 9-10, p. 163-168Research output: Contribution to journal › Article › Academic › peer-review
A wide band transmission mode spectrometer for diagnosis of EUV sources
Barreaux, J. L. P., Bayraktar, M., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 5 Oct 2015, p. -.Research output: Contribution to conference › Poster
B4C/Si based EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation
Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 2011, Maui, Hawaii, USResearch output: Other contribution › Other research output
B4C/Si based EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation
Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 13 Jun 2011, p. -.Research output: Contribution to conference › Poster
Behavior of transition metal and metal oxide surfaces under oxidative and reductive environment
Kuznetsov, A., van de Kruijs, R. W. E., Gleeson, A. J. & Bijkerk, F., 18 Jan 2011, p. -.Research output: Contribution to conference › Poster
Blister formation in Mo/Si multilayered structures induced by hydrogen ions
Van Den Bos, R. A. J. M., Lee, C. J., Benschop, J. P. H. & Bijkerk, F., 9 Jun 2017, In : Journal of physics D: applied physics. 50, 26, 265302.Research output: Contribution to journal › Article › Academic › peer-review
12
Citations
(Scopus)
2
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(Pure)
Blister formation on multilayer mirrors due to the exposure of hydrogen
van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 20 Jun 2013, p. -.Research output: Contribution to conference › Poster
Blistering behavior in Mo/Si multilayers
Kuznetsov, A. S., Gleeson, M. A., van de Kruijs, R. W. E. & Bijkerk, F., 18 Apr 2011, SPIE Optics + Optoelectronics 2011. Kuznetsov, A. S. (ed.). SPIE, 6 p. 807713. (Proceedings of SPIE; vol. 8077).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Blister mechanism in extreme ultraviolet multilayer mirrors
van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2015, p. -.Research output: Contribution to conference › Poster
Bragg reflectors with IR suppression for Extreme Ultraviolet Lithography
Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M., Koshelev, K. & Bijkerk, F., 10 Dec 2012, p. -.Research output: Contribution to conference › Poster
Broadband spectrometer development based on high-density free-standing transmission gratings
Bayraktar, M., Liu, F., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 19 Dec 2017.Research output: Contribution to conference › Poster
Broadband spectrometer development based on high-density free-standing transmission gratings
Bayraktar, M., Liu, F., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 31 Jan 2018.Research output: Contribution to conference › Poster
Calibrated broadband spectroscopy using transmission gratings in the EUV to DUV wavelengths
Bayraktar, M., Bastiaens, H. M. J. & Bijkerk, F., 4 Nov 2019.Research output: Contribution to conference › Poster
Open Access
Carbon film growth and hydrogenic retention of tungsten exposed to carbon-seeded high density deuterium plasmas
Wright, G. M., Al, R. S., Alves, E., Alves, L. C., Barradas, N. P., Kleyn, A. W., Cardozo, N. J. L., van der Meiden, H. J., Philipps, V., Rooij, G. J., Shumack, A. E., Vijvers, W. A. J., Westerhout, J., Zoethout, E. & Rapp, J., 2010, In : Journal of nuclear materials. 396, 2-3, p. 176-180Research output: Contribution to journal › Article › Academic › peer-review
Carbon induced extreme ultraviolet (EUV) reflectance loss characterized using visible-light ellipsometry
Chen, J., Louis, E., Wormeester, H., Harmsen, R., van de Kruijs, R. W. E., Lee, C. J., van Schaik, W. & Bijkerk, F., 2011, In : Measurement science and technology. 22, 10, p. - 8 p., 105705.Research output: Contribution to journal › Article › Academic › peer-review
CF3+ etching silicon surface: A molecular dynamics study
Zhao, C., Lu, X., He, P., Zhang, P., Sun, W., Zhang, J., Chen, F. & Gou, F., 2012, In : Vacuum. 86, 7, p. 913-916Research output: Contribution to journal › Article › Academic › peer-review
Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source
Dolgov, A., Lopaev, D., Lee, C. J., Zoethout, E., Medvedev, V., Yakushev, O. & Bijkerk, F., 23 Jun 2015, In : Applied surface science. 353, p. 708-713 6 p.Research output: Contribution to journal › Article › Academic › peer-review
Characterization of EUV induced contamination on multilayer optics
Chen, J., 1 Jul 2011, Enschede: Universiteit Twente. 119 p.Research output: Thesis › PhD Thesis - Research external, graduation UT
Open Access
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587
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Characterization of large off-axis EUV mirrors with high accuracy reflectometry at PTB
Laubis, C., Buchholz, C., Fischer, A., Plöger, S., Scholz, F., Wagner, H., Scholze, F., Ulm, G., Enkisch, H., Müllender, S., Wedowski, M., Louis, E. & Zoethout, E., 10 Jul 2006, Emerging Lithographic Technologies X. 61510I. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6151 I).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open Access
File
19
Citations
(Scopus)
10
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(Pure)
Characterization of Mo/Si multilayer growth on stepped topographies
van den Boogaard, A. J. R., Louis, E., Zoethout, E., Goldberg, K. A. & Bijkerk, F., 2011, In : Journal of vacuum science and technology. B: Microelectronics and nanometer structures. 29, 5, p. 1-9 9 p., 051803.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
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Characterization of nanoscale multilayer structures upon thermal annealing
Makhotkin, I. A., Zameshin, A., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 13 Apr 2015, In : Proceedings of SPIE - the international society for optical engineering. 9510, 95100V, p. - 4 p., 95100V.Research output: Contribution to journal › Article › Academic › peer-review
Characterization of nitrogen doped graphene bilayers synthesized by fast, low temperature microwave plasma-enhanced chemical vapour deposition
Stilhano Vilas Boas, C. R., Focassio, B., Marinho Jr., E., G. Larrude, D., Salvadori, M. C., Rocha Leao, C. & dos Santos, D., 23 Sep 2019, In : Scientific reports. 9, 12 p., 13715.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
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Characterization of self-assembled monolayers on a ruthenium surface
Shaheen, A., Sturm, J. M., Ricciardi, R., Huskens, J., Lee, C. J. & Bijkerk, F., 6 Jun 2017, In : Langmuir. 33, 25, p. 6419-6429 8 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
4
Citations
(Scopus)
49
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(Pure)