Research Output

2019

Multiscale modeling of damage processes in Ru thin films induced by femtosecond laser pulses

Milov, I., Lipp, V., Ilnitsky, D., Medvedev, N., Migdal, K., Zhakhovsky, V., Khokhlov, V., Petrov, Y., Inogamov, N., Ziaja, B., Medvedev, V., Makhotkin, I. A., Louis, E. & Bijkerk, F., 30 Sep 2019.

Research output: Contribution to conferencePoster

Multiscale modeling of damage processes in Ru thin films induced by femtosecond laser pulses

Milov, I., Lipp, V., Ilnitsky, D., Medvedev, N., Migdal, K., Zhakhovsky, V., Khokhlov, V., Petrov, Y., Inogamov, N., Ziaja, B., Medvedev, V., Makhotkin, I. A., Louis, E. & Bijkerk, F., 30 Oct 2019.

Research output: Contribution to conferencePoster

Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics

Nematollahi, M., Lucke, P., Bayraktar, M., Yakshin, A., Rijnders, A. J. H. M. & Bijkerk, F., 15 Oct 2019, In : Optics letters. 44, 20, p. 5104-5107 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

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35 Downloads (Pure)

Nanoscale Transition Metal Thin Films: Growth Characteristics and Scaling Law for Interlayer Formation

Chandrasekaran, A., van de Kruijs, R. W. E., Sturm, J. M., Zameshin, A. & Bijkerk, F., 11 Dec 2019, In : ACS applied materials & interfaces. 11, 49, p. 46311−46326 16 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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1 Citation (Scopus)
18 Downloads (Pure)
Open Access
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2 Citations (Scopus)
131 Downloads (Pure)

Optical and structural characterization of orthorhombic LaLuO3 using extreme ultraviolet reflectometry

Tryus, M., Nikolaev, K. V., Makhotkin, I. A., Schubert, J., Kibkalo, L., Danylyuk, S., Giglia, A., Nicolosi, P. & Juschkin, L., 30 Jun 2019, In : Thin solid films. 680, p. 94-101 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Oxidation of metal thin films by atomic oxygen: A low energy ion scattering study

Stilhano Vilas Boas, C. R., Sturm, J. M. & Bijkerk, F., 21 Oct 2019, In : Journal of Applied Physics. 126, 15, 7 p., 155301.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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2 Citations (Scopus)
45 Downloads (Pure)
Open Access
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6 Downloads (Pure)

Radiation transport and scaling of optical depth in Nd:YAG laser-produced microdroplet-tin plasma

Schupp, R., Torretti, F., Meijer, R. A., Bayraktar, M., Sheil, J., Scheers, J., Kurilovich, D., Bayerle, A., Schafgans, A. A., Purvis, M., Eikema, K. S. E., Witte, S., Ubachs, W., Hoekstra, R. & Versolato, O. O., 20 Sep 2019, In : Applied physics letters. 115, 12, 124101.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
Open Access
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2 Downloads (Pure)

Spectral characterization of an industrial EUV light source for nanolithography

Torretti, F., Liu, F., Bayraktar, M., Scheers, J., Bouza, Z., Ubachs, W., Hoekstra, R. & Versolato, O., 28 Nov 2019, In : Journal of physics D: applied physics. 53, 5, 055204.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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1 Citation (Scopus)
3 Downloads (Pure)

Spectral investigation of Sn laser-produced plasmas in the extreme ultraviolet range

Bouza, Z., Scheers, J., Sheil, J., Schupp, R., Torretti, F., Bayraktar, M., Bijkerk, F., Shah, C., Bekker, H., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R. & Versolato, O., 8 Oct 2019.

Research output: Contribution to conferencePoster

Spectral Unraveling of EUV Lithography Light Sources

Bouza, Z., Scheers, J., Sheil, J., Schupp, R., Bayraktar, M., Bijkerk, F., Shah, C., Bekker, H., Ubachs, W., Hoekstra, R. & Versolato, O., 10 May 2019.

Research output: Contribution to conferencePoster

Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography

Versolato, O., Bayerle, A., Bayraktar, M., Behnke, L., Bekker, H., Bouza, Z., Colgan, J., Crespo Lopez-Urrutia, J., Deuzeman, M. J., Hoekstra, R., Kurilovich, D., Poirier, L., Liu, B., Meijer, R., Neukirch, A., Rai, S., Ryabtsev, A., Witte, S., Scheers, J., Schupp, R. & 3 others, Sheil, J., Torretti, F. & Ubachs, W., 24 Jul 2019.

Research output: Contribution to conferencePoster

Spectroscopic Measurements of Sn Laser-Produced Plasmas

Behnke, L., Schupp, R., Bouza, Z., Scheers, J., Sheil, J., Torretti, F., Bayraktar, M., Shah, C., Crespo Lopez-Urrutia, J. R., Ubachs, W., Hoekstra, R. & Versolato, O. O., 4 Nov 2019.

Research output: Contribution to conferencePoster

Open Access
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6 Downloads (Pure)

Surface structure determination by x-ray standing waves at a free-electron laser

Mercurio, G., Makhotkin, I. A., Milov, I., Kim, Y., Zaluzhnyy, I., Dziarzhytski, S., Wenthaus, L., Vartanyants, I. & Wurth, W., 28 Mar 2019, In : New journal of physics. 21, 3, 13 p., 033031.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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2 Citations (Scopus)
33 Downloads (Pure)
2018

Advancing X-ray standing wave data analysis

Makhotkin, I. A., Yakunin, S. N., Hendrikx, C. P., Chandrasekaran, A., van de Kruijs, R. W. E. & Bijkerk, F., 7 Nov 2018.

Research output: Contribution to conferencePoster

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20 Downloads (Pure)

Aromatic structure degradation of single layer graphene on an amorphous silicon substrate in the presence of water, hydrogen and Extreme Ultraviolet light

Mund, B. K., Sturm, J. M., Lee, C. J. & Bijkerk, F., 1 Jan 2018, In : Applied surface science. 427, Part B, p. 1033-1040 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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2 Citations (Scopus)
22 Downloads (Pure)

Broadband spectrometer development based on high-density free-standing transmission gratings

Bayraktar, M., Liu, F., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 31 Jan 2018.

Research output: Contribution to conferencePoster

Comprehensive studies of single-shot damage of Ru thin films induced by EUV FEL fs pulses

Milov, I., Makhotkin, I. A., Sobierajski, R., Medvedev, N., Lipp, V., Ziaja, B., Khokhlov, V., Zhakhovsky, V., Petrov, Y., Shepelev, V., Ilnitsky, D., Migdal, K., Inogamov, N., Medvedev, V., Louis, E. & Bijkerk, F., 25 Jan 2018.

Research output: Contribution to conferencePoster

Comprehensive studies of single-shot damage of Ru thin films induced by EUV FEL fs pulses

Milov, I., Makhotkin, I. A., Sobierajski, R., Medvedev, N., Lipp, V., Ziaja, B., Khokhlov, V., Zhakhovsky, V., Petrov, Y., Shepelev, V., Ilnitsky, D., Migdal, K., Inogamov, N., Medvedev, V., Louis, E. & Bijkerk, F., 23 Jan 2018.

Research output: Contribution to conferencePoster

Control of YH3 formation and stability via hydrogen surface adsorption and desorption

Soroka, O., Sturm, J. M., van de Kruijs, R. W. E., Lee, C. J. & Bijkerk, F., 15 Oct 2018, In : Applied surface science. 455, p. 70-74 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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4 Citations (Scopus)
24 Downloads (Pure)

Damage accumulation in thin ruthenium films induced by repetitive exposure to femtosecond XUV pulses below the single-shot ablation threshold

Makhotkin, I. A., Milov, I., Chalupský, J., Tiedtke, K., Enkisch, H., de Vries, G., Scholze, F., Siewert, F., Sturm, J. M., Nikolaev, K. V., van de Kruijs, R. W. E., Smithers, M. A., Van Wolferen, H. A. G. M., Keim, E. G., Louis, E., Jacyna, I., Jurek, M., Klinger, D., Pelka, J. B., Juha, L. & 15 others, Hájková, V., Vozda, V., Sburian, T., Saksl, K., Faatz, B., Keitel, B., Plönjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Donker, R., Mey, T. & Sobierajski, R., 1 Nov 2018, In : Journal of the Optical Society of America B: Optical Physics. 35, 11, p. 2799-2805 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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4 Citations (Scopus)
78 Downloads (Pure)

Damage processes in thin Ru films induced by single and multiple ultra-short XUV pulses

Makhotkin, I. A., Milov, I., Sobierajski, R., Medvedev, N., Lipp, V., Ziaja, B., Khokhlov, V., Zhakhovsky, V., Petrov, Y., Shepelev, V., Ilnitsky, D., Migdal, K., Inogamov, N., Medvedev, V., Louis, E. & Bijkerk, F., 17 Sep 2018.

Research output: Contribution to conferencePoster

Double matrix effect in Low Energy Ion Scattering from La surfaces

Zameshin, A. A., Yakshin, A. E., Sturm, J. M., Brongerma, H. H. & Bijkerk, F., 15 May 2018, In : Applied surface science. 440, p. 570-579 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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5 Citations (Scopus)
29 Downloads (Pure)

Electrofusion of single cells in picoliter droplets

Schoeman, R. M., Van Den Beld, W. T. E., Kemna, E. W. M., Wolbers, F., Eijkel, J. C. T. & Van Den Berg, A., 27 Feb 2018, In : Scientific reports. 8, 3714.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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2 Citations (Scopus)
61 Downloads (Pure)

Experimental study of EUV mirror radiation damage resistance under long-term free-electron laser exposures below the single-shot damage threshold

Makhotkin, I. A., Sobierajski, R., Chalupsky, J., Tiedtke, K., de Vries, G., Störmer, M., Scholze, F., Siewert, F., van de Kruijs, R. W. E., Milov, I., Louis, E., Jacyna, I., Jurek, M., Klinger, D., Nittler, L., Syryanyy, Y., Juha, L., Hájková, V., Vozda, V., Burian, T. & 13 others, Saksl, K., Faatz, B., Keitel, B., Plonjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Nienhuys, H. K., Gwalt, G., Mey, T. & Enkisch, H., Jan 2018, In : Journal of synchrotron radiation. 25, 1, p. 77-84 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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10 Citations (Scopus)
59 Downloads (Pure)

Extreme UV photon and hydrogen radical interaction with graphene and ruthenium surfaces

Mund, B. K., 22 Nov 2018, Enschede: University of Twente. 107 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

Open Access
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112 Downloads (Pure)

Formation of H2O on a CO2 dosed Ru(0 0 0 1) surface under Extreme Ultraviolet Light and H2

Mund, B. K., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Oct 2018, In : Applied surface science. 456, p. 538-544 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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1 Citation (Scopus)
28 Downloads (Pure)

Formation of H2O on the surface of CO2 dosed Ru(0001) under Extreme Ultraviolet Light and H2

Mund, B. K., Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., Jan 2018.

Research output: Contribution to conferencePoster

Hydrogen diffusion measurements using Y thin film monitoring

Soroka, O., Sturm, J. M., Lee, C. J. & Bijkerk, F., Jan 2018.

Research output: Contribution to conferencePoster

Hydrogen induced blister formation in Mo/Si multilayer structures

van den Bos, R. A. J. M., 2 May 2018, Enschede: University of Twente. 113 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

Open Access
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199 Downloads (Pure)

Influence of internal stress and layer thickness on the formation of hydrogen induced thin film blisters in Mo/Si multilayers

van den Bos, R. A. J. M., Reinink, J., Lopaev, D. V., Lee, C. J., Benschop, J. P. H. & Bijkerk, F., 22 Feb 2018, In : Journal of physics D: applied physics. 51, 11, 11 p., 115302.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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2 Citations (Scopus)
36 Downloads (Pure)

In situ and real-time monitoring of structure formation during non-reactive sputter deposition of lanthanum and reactive sputter deposition of lanthanum nitride

Krause, B., Kuznetsov, D. S., Yakshin, A. E., Ibrahimkutty, S., Baumbach, T. & Bijkerk, F., Aug 2018, In : Journal of applied crystallography. 51, p. 1013-1020 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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34 Downloads (Pure)

Mechanism of single-shot damage of Ru thin films irradiated by femtosecond extreme UV free-electron laser

Milov, I., Makhotkin, I. A., Sobierajski, R., Medvedev, N., lipp, V., Chalupsky, J., Sturm, J. M., Tiedtke, K., de Vries, G., Störmer, M., Siewert, F., van de Kruijs, R., Louis, E., Jacyna, I., Jurek, M., Juha, L., Hájková, V., Vozda, V., Burian, T., Saksl, K. & 13 others, Faatz, B., Keitel, B., Plönjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Nienhuys, H. K., Gwalt, G., Mey, T., Enkisch, H. & Bijkerk, F., 23 Jul 2018, In : Optics express. 26, 15, p. 19665-19685 21 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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5 Citations (Scopus)
42 Downloads (Pure)

Metal diffusion and chemical processes of mono and bi-layer thin films

Pachecka, M., 13 Jul 2018, Enschede: University of Twente. 102 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

Open Access
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69 Downloads (Pure)

Method, apparatus and computer program for measuring and processing a spectrum of an XUV light source from soft x-rays to infrared wavelengths

Bijkerk, F., Bayraktar, M., Bastiaens, H. M. J. & Bruineman, C., 11 May 2018, IPC No. 164742.NL Dokter Octrooibureau, WO2018/084708 A1, Patent No. 2017729 IDF, Priority date 7 Nov 2016

Research output: Patent

Modeling of XUV-induced damage in Ru films: The role of model parameters

Milov, I., Lipp, V., Medvedev, N., Makhotkin, I. A., Louis, E. & Bijkerk, F., 28 Sep 2018, In : Journal of the Optical Society of America B: Optical Physics. 35, 10, p. B43-B53 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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1 Citation (Scopus)
56 Downloads (Pure)

Modelling of damage in Ru thin films induced by femtosecond XUV laser pulses

Milov, I., Makhotkin, I. A., Sobierajski, R., Medvedev, N., lipp, V., Ziaja, B., Khokhlov, V., Zhakhovsky, V., Petrov, Y., Shepelev, V., Ilnisky, D., Migdal, K., Inogamov, N., Medvedev, V. V., Louis, E. & Bijkerk, F., 17 Sep 2018.

Research output: Contribution to conferencePoster

Monitoring EUV and DUV spectral emission ratios of a high power EUVL source

Bayraktar, M., Liu, F., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 7 Nov 2018.

Research output: Contribution to conferencePoster

Open Access

Novel EUV mask absorber evaluation in support of next-generation EUV imaging

Philipsen, V., Luong, K. V., Opsomer, K., Detavernier, C., Hendrickx, E., Erdmann, A., Evanschitzky, P., Van De Kruijs, R. W. E., Heidarnia-Fathabad, Z., Scholze, F. & Laubis, C., 10 Oct 2018, Photomask Technology 2018. Gallagher, E. E. & Rankin, J. H. (eds.). SPIE, Vol. 10810. 108100C. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10810).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
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11 Citations (Scopus)
51 Downloads (Pure)
3 Downloads (Pure)

Plasma-assisted cleaning of extreme UV optics

Dolgov, A. A., 1 Mar 2018, Enschede: University of Twente. 147 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

Open Access
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623 Downloads (Pure)

Plasma-assisted oxide removal from ruthenium-coated EUV optics

Dolgov, A., Lee, C. J., Bijkerk, F., Abrikosov, A., Krivtsun, V. M., Lopaev, D., Yakushev, O. & van Kampen, M., 18 Apr 2018, In : Journal of Applied Physics. 123, 15, 9 p., 153301.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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128 Downloads (Pure)

Probing atomic scale interface processes using X-rays and ions

Zameshin, A., 14 Nov 2018, Enschede: University of Twente. 150 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

12 Downloads (Pure)

Self-contained in-vacuum in situ thin film stress measurement tool

Reinink, J., Van De Kruijs, R. W. E. & Bijkerk, F., 14 May 2018, In : Review of scientific instruments. 89, 5, 6 p., 053904.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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1 Citation (Scopus)
69 Downloads (Pure)

Source plasma emission spectrum under various operating conditions

Liu, F., Bayraktar, M., Goossens, T., Bijkerk, F., Quintana Ramirez, J. & Beenhakker, T., 21 Jun 2018.

Research output: Contribution to conferencePoster

Specular reflection intensity modulated by grazing-incidence diffraction in a wide angular range

Nikolaev, K. V., Makhotkin, I. A., Yakunin, S. N., Van De Kruijs, R. W. E., Chuev, M. A. & Bijkerk, F., 1 Sep 2018, In : Acta Crystallographica Section A: Foundations and Advances. 74, 5, p. 545-552 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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Sputter damage by low energy charged particle irradiation

Phadke, P., Sturm, M., van de Kruijs, R. & Bijkerk, F., 18 Jun 2018.

Research output: Contribution to conferencePoster

Open Access
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34 Downloads (Pure)